公开(公告)号：US20050231226A1

公开(公告)日：2005-10-20

申请号：US11148707

申请日：2005-06-08

Applicant: Randy Schwindt

Inventor： Randy Schwindt

IPC: G01R1/073 ,  G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  H01L21/66

CPC classification number: G01R31/08 ,  G01R1/06 ,  G01R1/07342 ,  G01R1/07371 ,  G01R1/18 ,  G01R31/06 ,  G01R31/2822

Abstract: A low-current probe card for measuring currents down to the femtoamp region includes a dielectric board, such as of glass-epoxy material, forming an opening. A plurality of probing devices, such as ceramic blades, are edge-mounted about the opening so that the probing elements or needles included thereon terminate below the opening in a pattern suitable for probing a test device. A plurality of cables are attached to the card for respectively connecting each device to a corresponding channel of a test instrument. The on-board portion of each cable is of coaxial type and includes an inner layer between the inner dielectric and outer conductor for suppressing the triboelectric effect. An inner conductive area and a conductive backplane that are respectively located below and on one side of each device are set to guard potential via the outer conductor of the corresponding cable so as to guard the signal path on the other side of the device. The lead-in portion of each cable, which is detachably connected to the corresponding on-board portion through a plug-in type connector, is of triaxial type and includes, besides the inner layer between the inner dielectric and outer conductor, a second inner dielectric and second outer conductor. A conductive cover and an outer conductive area that substantially enclose the components on the card are set to shield potential via the second outer conductor and connector.

Abstract translation: 用于测量下降到毫微微区域的电流的低电流探针卡包括形成开口的介电板，例如玻璃环氧树脂材料。 诸如陶瓷刀片的多个探测装置围绕开口边缘安装，使得其中包括的探测元件或针以适合于探测测试装置的图案在开口下方终止。 多个电缆连接到卡，用于分别将每个设备连接到测试仪器的相应通道。 每个电缆的板上部分是同轴型的，并且包括用于抑制摩擦电效应的内部电介质和外部导体之间的内层。 分别设置在每个装置的一侧的一侧的内部导电区域和导电背板被设置为通过相应电缆的外部导体来保护电位，以便保护装置另一侧上的信号路径。 通过插入型连接器可拆卸地连接到相应的板上部分的每个电缆的引入部分是三轴型的，并且除了内部电介质和外部导体之间的内层之外还包括第二内部 电介质和第二外导体。 将导电盖和基本上包围卡上的部件的外部导电区域设置成通过第二外导体和连接器来屏蔽电位。

公开(公告)号：US06496024B2

公开(公告)日：2002-12-17

申请号：US10086331

申请日：2002-03-01

Applicant: Randy Schwindt

Inventor： Randy Schwindt

IPC: G01R3106

CPC classification number: G01R1/067 ,  B82Y35/00 ,  G01R1/06705 ,  G01R1/06772 ,  G01R1/07342 ,  G01R1/18 ,  G01R19/0023 ,  G01R35/00 ,  H01R11/18

Abstract: A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

Abstract translation: 用于测试设备的低电流测试的系统包括用于探测测试设备上的探测位置的探测设备。 探测装置包括具有第一和第二侧面的电介质基底，在基底的第一侧上的细长导电路径，连接到细长导电路径的细长探测元件，以便以悬臂方式延伸超过基底，并且导电 在基板的第二面上的区域。 探头外壳可与探测装置配合地可拆卸地接合。

公开(公告)号：US20060208748A1

公开(公告)日：2006-09-21

申请号：US11406737

申请日：2006-04-18

Applicant: Randy Schwindt

Inventor： Randy Schwindt

IPC: G01R31/02

CPC classification number: G01R1/067 ,  B82Y35/00 ,  G01R1/06705 ,  G01R1/06772 ,  G01R1/07342 ,  G01R1/18 ,  G01R19/0023 ,  G01R35/00 ,  H01R11/18

Abstract: A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

公开(公告)号：US07057407B2

公开(公告)日：2006-06-06

申请号：US10954496

申请日：2004-09-29

Applicant: Randy Schwindt

Inventor： Randy Schwindt

IPC: G01R31/06

CPC classification number: G01R1/067 ,  B82Y35/00 ,  G01R1/06705 ,  G01R1/06772 ,  G01R1/07342 ,  G01R1/18 ,  G01R19/0023 ,  G01R35/00 ,  H01R11/18

Abstract: A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

公开(公告)号：US20050194983A1

公开(公告)日：2005-09-08

申请号：US11112813

申请日：2005-04-21

Applicant: Randy Schwindt ,  Warren Harwood ,  Paul Tervo ,  Kenneth Smith ,  Richard Warner

Inventor： Randy Schwindt ,  Warren Harwood ,  Paul Tervo ,  Kenneth Smith ,  Richard Warner

IPC: H01L21/66 ,  A46D1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  H01L21/687

CPC classification number: G01R31/2886 ,  A46D1/00 ,  G01R1/0416 ,  G01R1/06705 ,  G01R1/06794 ,  G01R1/07392 ,  G01R1/18 ,  G01R31/2887 ,  H01L21/68785

Abstract: A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.

公开(公告)号：US5610529A

公开(公告)日：1997-03-11

申请号：US431104

申请日：1995-04-28

Applicant: Randy Schwindt

Inventor： Randy Schwindt

IPC: G01R1/06 ,  G01R19/32 ,  G01R31/28 ,  H01L21/66 ,  G01R31/02

CPC classification number: G01R19/32

Abstract: A probe station suitable for low noise measurements includes a chuck for supporting a test device and a supporting surface for the test device. The probe station has means for controlling the temperature in the vicinity of the test device by sensing the temperature and, in response to the sensing, alternatively raising or lowering the temperature. At least two layers including a first electrically conductive layer adhered to an insulator layer are disposed between the supporting surface and the chuck. The electrically conductive layer is electrically connected to one of the chuck and supporting surface.

Abstract translation: 适用于低噪声测量的探测台包括用于支撑测试装置的卡盘和用于测试装置的支撑表面。 探测台具有用于通过感测温度来控制测试装置附近的温度的装置，并且响应于感测，交替地升高或降低温度。 至少两层包括粘附到绝缘体层上的第一导电层设置在支撑表面和卡盘之间。 导电层电连接到卡盘和支撑表面之一。