System and method for adjusting performance of manufacturing operations or steps
    11.
    发明申请
    System and method for adjusting performance of manufacturing operations or steps 有权
    用于调整制造操作或步骤性能的系统和方法

    公开(公告)号:US20060277754A1

    公开(公告)日:2006-12-14

    申请号:US11148191

    申请日:2005-06-09

    IPC分类号: B23P15/02

    摘要: A manufacturing system and manufacturing method for adjusting the performance of manufacturing operations or steps in manufacturing components having three-dimensional external structural characteristics. An embodiment of the system broadly comprises: (a) a plurality of manufacturing operations for processing a component having three-dimensional external structural characteristics; (b) at least one analytical device for analyzing at least one characteristic of the component after the performance of one or more manufacturing operations to generate a component data set; (c) at least one data storage device for storing the generated component data sets and for providing at least a relevant portion of accumulated component data; and (d) a communication mechanism for transmitting at least a relevant portion of accumulated component data to one or more manufacturing operations so that the performance thereof can be adjusted in response to the transmitted portion of accumulated component data. An embodiment of the method broadly comprises the following steps: (a) providing a component having three-dimensional external structural characteristics; (b) providing at least a relevant portion of accumulated component data comprising at least two different component data sets; and (c) performing a manufacturing step on the component to provide a processed component, wherein the at least relevant portion of accumulated component data is used to adjust the manner in which the manufacturing step is performed.

    摘要翻译: 一种制造系统和制造方法,用于调整具有三维外部结构特征的制造部件的制造操作或步骤的性能。 该系统的一个实施例广泛地包括:(a)用于处理具有三维外部结构特征的部件的多个制造操作; (b)至少一个用于在执行一个或多个制造操作之后分析所述部件的至少一个特征以产生部件数据组的分析装置; (c)至少一个数据存储装置,用于存储所生成的分量数据集,并提供至少累积分量数据的相关部分; 以及(d)用于将累积分量数据的至少相关部分的至少一部分发送到一个或多个制造操作的通信机构,使得可以响应于所累积的分量数据的发送部分来调整其性能。 该方法的一个实施例广泛地包括以下步骤:(a)提供具有三维外部结构特征的部件; (b)提供至少包括至少两个不同分量数据集的累积分量数据的相关部分; 以及(c)对所述部件执行制造步骤以提供处理部件,其中所述累积部件数据的所述至少相关部分用于调整所述制造步骤的执行方式。

    DYNAMIC ROUTING CONTROL METHODS AND SYSTEMS FOR A CLUSTER TOOL
    14.
    发明申请
    DYNAMIC ROUTING CONTROL METHODS AND SYSTEMS FOR A CLUSTER TOOL 有权
    用于集群工具的动态路由控制方法和系统

    公开(公告)号:US20130226336A1

    公开(公告)日:2013-08-29

    申请号:US13594750

    申请日:2012-08-24

    IPC分类号: B25J9/16

    摘要: Systems, methods, and apparatus are provided for operating a cluster tool including receiving recipe time data; receiving transfer time data; receiving process programs and associated substrate lots wherein the process programs include a plurality of sequences; determining cluster tool chambers associated with sequences that are bottleneck sequences; setting equipment constant values for components of the cluster tool to implement transfer priorities wherein the chambers associated with bottleneck sequences are given highest priority; executing a next sequence based on the transfer priorities; and repeating the determining, setting and executing for each remaining sequence. Numerous additional aspects are disclosed.

    摘要翻译: 提供了用于操作集群工具的系统,方法和装置,包括接收配方时间数据; 接收传输时间数据; 接收过程程序和相关的衬底批次,其中过程程序包括多个序列; 确定与作为瓶颈序列的序列相关联的簇工具室; 为集群工具的组件设置设备常数值以实现转移优先级,其中与瓶颈序列相关联的室被赋予最高优先级; 基于传送优先级执行下一个序列; 并重复确定,设置和执行每个剩余的序列。 公开了许多附加方面。

    Frequency monitoring to detect plasma process abnormality
    15.
    发明授权
    Frequency monitoring to detect plasma process abnormality 有权
    频率监测检测等离子体过程异常

    公开(公告)号:US08174400B2

    公开(公告)日:2012-05-08

    申请号:US13042408

    申请日:2011-03-07

    IPC分类号: G08B21/00

    摘要: Abnormal conditions within an RF-powered plasma process chamber are detected by detecting whether the frequency of a variable-frequency RF power supply moves outside established lower and upper limits. In a first aspect, a first pair of lower and upper limits are established as a function of the frequency of the power supply sampled after a new process step begins or after a sample control signal changes state. In a second aspect, a second pair of lower and upper limits are not adapted to the frequency of the power supply. Both aspects preferably are used together to detect different occurrences of abnormal conditions.

    摘要翻译: 通过检测可变频率RF电源的频率是否移动到建立的下限和上限之外,来检测RF供电的等离子体处理室内的异常情况。 在第一方面,根据在新处理步骤开始之后或在采样控制信号改变状态之后采样的电源的频率,建立第一对下限和上限。 在第二方面,第二对下限和上限不适合电源的频率。 两个方面优选一起用于检测异常状况的不同出现。

    MAINFRAME PREMOVE FOR A CLUSTER TOOL
    16.
    发明申请
    MAINFRAME PREMOVE FOR A CLUSTER TOOL 审中-公开
    MAINFRAME PREMOVE FOR CLUSTER TOOL

    公开(公告)号:US20120059510A1

    公开(公告)日:2012-03-08

    申请号:US12877043

    申请日:2010-09-07

    IPC分类号: G06F7/00

    摘要: A method and system for a mainframe premove for a cluster tool is described herein. In one embodiment, the state of a process chamber which is to be used to run a process is obtained. A determination is made of whether the state of the process chamber indicates an almost ready state. A prepare command is sent to a transfer module if the state of the process chamber indicates the almost ready state. A transfer command is sent to the process chamber if the state of the process chamber indicates the almost ready state.

    摘要翻译: 本文描述了用于群集工具的主机预置的方法和系统。 在一个实施例中,获得用于运行过程的处理室的状态。 确定处理室的状态是否表示几乎就绪状态。 如果处理室的状态指示几乎就绪状态,则准备命令被发送到传送模块。 如果处理室的状态指示几乎就绪状态,则传送命令被发送到处理室。

    Detecting plasma chamber malfunction
    17.
    发明申请
    Detecting plasma chamber malfunction 有权
    检测等离子体室故障

    公开(公告)号:US20100245084A1

    公开(公告)日:2010-09-30

    申请号:US12661699

    申请日:2010-03-19

    IPC分类号: G08B21/00

    摘要: Malfunction of a component within an RF-powered plasma chamber is detected by observing an operating condition of the plasma chamber and detecting when the operating condition deviates from a previously observed range bounded by lower and upper limits. The lower and upper limits are determined by observing the minimum and maximum values of that operating condition during the processing of workpieces throughout one or more plasma chamber cleaning cycles immediately preceding the most recent cleaning of the plasma chamber.

    摘要翻译: 通过观察等离子体室的操作状态并检测何时操作条件偏离由下限和上限限定的先前观察范围,来检测RF供电的等离子体室内部件的故障。 通过在紧邻等离子体室的最近清洁之前的一个或多个等离子体室清洁循环期间观察工件处理期间该操作条件的最小值和最大值来确定下限和上限。

    ASPHERIC TORIC INTRAOCULAR LENS
    18.
    发明申请
    ASPHERIC TORIC INTRAOCULAR LENS 有权
    腹腔镜内镜

    公开(公告)号:US20090279048A1

    公开(公告)日:2009-11-12

    申请号:US12435241

    申请日:2009-05-04

    IPC分类号: G02C7/06

    摘要: An aspheric toric intraocular lens (IOL) having toricity and asphericity in a single lens. The toricity and asphericity may be provided on separate surfaces, such as an anterior surface and a posterior surface, or the toricity and asphericity may be combined onto a single surface. The edge thickness may be varied sinusoidal to maintain equal edge thickness at 45 degree meridian.

    摘要翻译: 在单个透镜中具有复曲面和非球面性的非球面复曲面眼内透镜(IOL)。 可以在单独的表面(例如前表面和后表面)上提供复曲面和非球面性,或者可以将单面和非球面度组合到单个表面上。 边缘厚度可以正弦变化,以在45度子午线处保持相等的边缘厚度。

    Methods and apparatus for enhancing electronic device manufacturing throughput
    19.
    发明授权
    Methods and apparatus for enhancing electronic device manufacturing throughput 失效
    用于增强电子设备制造吞吐量的方法和装置

    公开(公告)号:US07477956B2

    公开(公告)日:2009-01-13

    申请号:US11179812

    申请日:2005-07-12

    IPC分类号: G06F19/00

    CPC分类号: G06Q10/06

    摘要: In some aspects, a method is provided for enhancing electronic device manufacturing throughput within an electronic device manufacturing tool. The method includes the steps of (1) for the electronic device manufacturing tool, creating an electronic device manufacturing schedule based on process factors and mechanical factors associated with the manufacturing tool; and (2) employing the electronic device manufacturing schedule during electronic device manufacturing within the electronic device manufacturing tool. Numerous other aspects are provided.

    摘要翻译: 在一些方面,提供了一种用于增强电子设备制造工具内的电子设备制造吞吐量的方法。 该方法包括以下步骤:(1)对于电子设备制造工具,基于与制造工具相关联的过程因素和机械因素创建电子设备制造进度; 和(2)在电子设备制造工具中的电子设备制造期间采用电子设备制造进度。 提供了许多其他方面。

    System and method for measuring machining tools and using data generated therefrom
    20.
    发明申请
    System and method for measuring machining tools and using data generated therefrom 审中-公开
    用于测量加工工具并使用由此产生的数据的系统和方法

    公开(公告)号:US20070198123A1

    公开(公告)日:2007-08-23

    申请号:US11359420

    申请日:2006-02-23

    IPC分类号: G06F19/00

    摘要: A system which broadly comprises: (a) an NC machine having at least one machining tool; (b) a smart image acquisition device that measures at least one characteristic of the machining tool to generate acquired data from the measured machining tool; (c) optionally a machining tool program that uses the acquired data to control the operational use of the measured machining tool by the NC machine or to determine the operational condition of the measured machining tool or the NC machine. Also disclosed is a method which broadly comprises the following steps: (a) providing a machining tool from an NC machining operation; (b) measuring at least one characteristic of the machining tool with a smart image acquisition device to generate acquired data from the measured machining tool; (c) optionally using the acquired data to control the operational use of the measured machining tool by the NC machining operation or to determine the operational condition of measured machining tool or NC machine.

    摘要翻译: 一种系统,其广泛地包括:(a)具有至少一个加工工具的NC机床; (b)智能图像采集装置,其测量所述加工工具的至少一个特征以从所述测量的加工工具产生获取的数据; (c)可选的加工工具程序,其使用所获取的数据来控制由NC机床测量的加工工具的操作使用或确定所测量的加工工具或NC机床的操作状态。 还公开了一种广泛地包括以下步骤的方法:(a)从NC加工操作提供加工工具; (b)用智能图像采集装置测量加工工具的至少一个特性,以从测量的加工工具产生获得的数据; (c)可选地使用所获取的数据来控制通过NC加工操作测量的加工刀具的操作使用,或者确定测量的加工刀具或NC机床的操作条件。