公开(公告)号：US20180059067A1

公开(公告)日：2018-03-01

申请号：US15681883

申请日：2017-08-21

Applicant: Seiko Epson Corporation

Inventor： Hiromu MIYAZAWA ,  Hiroshi ITO ,  Tomoaki NAKAMURA ,  Masayoshi YAMADA ,  Kanechika KIYOSE ,  Tsukasa FUNASAKA

IPC: G01N29/24 ,  A61B8/00

CPC classification number: G01N29/2437 ,  A61B8/4411 ,  A61B8/4427 ,  A61B8/4483 ,  A61B8/4494 ,  A61B8/54 ,  B06B1/0688 ,  G01N29/0681 ,  G01N29/221 ,  G01N2291/02466 ,  G01N2291/0426 ,  G01N2291/102 ,  G01N2291/105

Abstract: An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and closes the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and that is sandwiched between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and that is sandwiched between a pair of electrodes in an intersecting direction intersecting with the thickness direction of the substrate.

公开(公告)号：US20150273526A1

公开(公告)日：2015-10-01

申请号：US14669123

申请日：2015-03-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Jiro TSURUNO ,  Tsukasa FUNASAKA ,  Tomoaki NAKAMURA ,  Hiromu MIYAZAWA ,  Hiroshi ITO ,  Masayoshi YAMADA

IPC: B06B1/06 ,  A61B8/00 ,  A61B8/14

CPC classification number: B06B1/0666 ,  A61B8/14 ,  A61B8/4488 ,  A61B8/4494 ,  A61B8/462 ,  B06B1/0629 ,  B06B1/0662 ,  B06B1/067

Abstract: A piezoelectric element includes a vibrating film, a piezoelectric body, a first electrode, a second electrode, and a groove. The piezoelectric body is arranged upon the vibrating film. The first electrode is arranged upon the piezoelectric body. The second electrode is arranged upon the piezoelectric body and at a position that is separated from the first electrode. The groove is located between the first electrode and the second electrode and splits a surface of the piezoelectric body in two, as seen in plan view from a thickness direction of the vibrating film.

Abstract translation: 压电元件包括​​振动膜，压电体，第一电极，第二电极和沟槽。 压电体设置在振动膜上。 第一电极布置在压电体上。 第二电极设置在压电体上并与第一电极分离的位置。 凹槽位于第一电极和第二电极之间，并且从振动膜的厚度方向的平面图中可以看出，压电体的表面分成两部分。

公开(公告)号：US20140153098A1

公开(公告)日：2014-06-05

申请号：US14176615

申请日：2014-02-10

Applicant: Seiko Epson Corporation

Inventor： Yuki HANAMURA ,  Takeo FUNAKAWA ,  Tsukasa FUNASAKA

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G02B5/284

Abstract: An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

Abstract translation: 光滤波器包括：第一基板，形成在第一基板上的第一反射镜，耦合到第一基板的第二基板，第二基板包括凹部，形成在凹部上并面向第一反射镜的第二反射镜， 电极，形成在第二基板上并围绕第二反射镜。 第一基板包括多个第一铰链部分和多个第一铰链部分内的多个第二铰链部分。

公开(公告)号：US20130037703A1

公开(公告)日：2013-02-14

申请号：US13655963

申请日：2012-10-19

Applicant: SEIKO EPSON CORPORATION

Inventor： Tsukasa FUNASAKA

IPC: G02B26/00 ,  G01J3/51

CPC classification number: G02B1/10 ,  G02B5/20 ,  G02B5/28 ,  G02B27/0006

Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The second substrate faces the first substrate. The second substrate includes a first surface and a second surface. The second surface surrounds the first surface in a plan view and a second height of the second surface is lower than a first height of the first surface. The first mirror is formed on the first surface of the second substrate. The second mirror is formed on the first substrate, the second mirror facing the first mirror. The first electrode is formed on the first substrate. The second electrode is formed on the second surface of the second substrate. The second electrode faces the first electrode.

Abstract translation: 滤光器包括第一和第二基板，第一和第二反射镜以及第一和第二电极。 第二基板面向第一基板。 第二基板包括第一表面和第二表面。 第二表面在平面图中围绕第一表面，第二表面的第二高度低于第一表面的第一高度。 第一反射镜形成在第二基板的第一表面上。 第二反射镜形成在第一基板上，第二反射镜面向第一反射镜。 第一电极形成在第一基板上。 第二电极形成在第二基板的第二表面上。 第二电极面对第一电极。