公开(公告)号：US20200049141A1

公开(公告)日：2020-02-13

申请号：US16533838

申请日：2019-08-07

Applicant: Seiko Epson Corporation

Inventor： Tsukasa FUNASAKA ,  Yuki HANAMURA

IPC: F04B45/047 ,  F04B53/08

Abstract: A diaphragm-type compressor includes a substrate, a diaphragm, and an actuator, the substrate, the diaphragm, and the actuator being laminated and provided in this order. In a plan view from a direction of the lamination, the diaphragm includes a first film section that overlaps the actuator and a second film section that does not overlap the actuator. A step is provided on a surface at the diaphragm side of the substrate. A portion corresponding to the first film section and a portion corresponding to the second film section of the substrate are respectively different stages.

公开(公告)号：US20140241114A1

公开(公告)日：2014-08-28

申请号：US14192040

申请日：2014-02-27

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiroshi MATSUDA ,  Tsukasa FUNASAKA

IPC: H01L41/047 ,  G01S7/56

CPC classification number: H01L41/0475 ,  B06B1/0622 ,  G01S7/56

Abstract: An ultrasonic transducer device includes an ultrasonic transducer element array, a first signal terminal, and a second signal terminal. The ultrasonic transducer element array has a 1st element group to a kth element group (where k is a natural number such that k≧2). The first signal terminal is connected with a control section configured and arranged to perform at least one of receiving and transmitting of signals. The second signal terminal is connected with the first signal terminal via the ultrasonic transducer element array. Each of the 1st element group to the kth element group includes a plurality of ultrasonic transducer elements electrically connected in series. The 1st element group to the kth element group are electrically connected in parallel between the first signal terminal and the second signal terminal.

Abstract translation: 超声波换能器装置包括超声波换能器元件阵列，第一信号端子和第二信号端子。 超声波换能器元件阵列具有第k个元件组的第1个元件组（其中k是k≥2的自然数）。 第一信号端子与被配置和布置为执行信号的接收和发送中的至少一个的控制部分连接。 第二信号端子经由超声波换能器元件阵列与第一信号端子连接。 与第k个元件组的第一元件组中的每一个包括串联电连接的多个超声换能器元件。 第一元件组的第一元件组在第一信号端子和第二信号端子之间并联电连接。

公开(公告)号：US20130082567A1

公开(公告)日：2013-04-04

申请号：US13684925

申请日：2012-11-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Tsukasa FUNASAKA ,  Tomoaki NAKAMURA

IPC: H02N2/00

CPC classification number: H02N2/0075 ,  G01H11/08 ,  G06F3/043 ,  G06F3/0436 ,  G10K9/122

Abstract: An ultrasonic device is configured to transmit ultrasonic waves and includes a substrate, a diaphragm, a piezoelectric member and a control unit. The substrate has an opening. The diaphragm covers the opening of the substrate. The piezoelectric member is coupled to the diaphragm, and includes a first piezoelectric part and a second piezoelectric part. The control unit controls a voltage applied to the first piezoelectric part to be a vibration voltage and controls a voltage applied to the second piezoelectric part to be a constant voltage when the ultrasonic device transmits the ultrasonic waves.

Abstract translation: 超声波装置被配置为发送超声波，并且包括基板，隔膜，压电构件和控制单元。 基板有开口。 隔膜覆盖基板的开口。 压电元件耦合到隔膜，并包括第一压电元件和第二压电元件。 控制单元将施加到第一压电部件的电压控制为振动电压，并且当超声波装置发送超声波时，将施加到第二压电部件的电压控制为恒定电压。

公开(公告)号：US20200056605A1

公开(公告)日：2020-02-20

申请号：US16541616

申请日：2019-08-15

Applicant: Seiko Epson Corporation

Inventor： Tsukasa FUNASAKA ,  Yuki HANAMURA

IPC: F04B43/02 ,  G03B21/16

Abstract: A structure according to an embodiment includes a first substrate including a first valve and a second substrate joined to the first substrate. The structure includes a region where the first valve and the second substrate are not joined. A sticking suppressing section is provided in at least one of the first valve and the second substrate in the region. By configuring the structure in this way, it is possible to suppress sticking of the first valve to the second substrate in the structure including the first substrate including the first valve and the second substrate joined to the first substrate.

公开(公告)号：US20200040885A1

公开(公告)日：2020-02-06

申请号：US16525750

申请日：2019-07-30

Applicant: Seiko Epson Corporation

Inventor： Tsukasa FUNASAKA ,  Yuki HANAMURA

IPC: F04B43/04 ,  F04B53/08

Abstract: A diaphragm-type compressor includes a substrate, an actuator, a diaphragm provided between the substrate and the actuator, and a case in which the diaphragm, the actuator, and the substrate are provided. A recessed section formed at the actuator side of the substrate and the actuator overlap in a plan view. The case has an inflow port of fluid further on the actuator side than the substrate based on the position of the diaphragm. The substrate includes a suction port for causing the recessed section to suck the fluid.

公开(公告)号：US20170119349A1

公开(公告)日：2017-05-04

申请号：US15332381

申请日：2016-10-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiromu MIYAZAWA ,  Hiroshi ITO ,  Tomoaki NAKAMURA ,  Masayoshi YAMADA ,  Sayaka YAMASAKI ,  Tsukasa FUNASAKA

IPC: A61B8/00 ,  H01L41/08 ,  H01L41/113 ,  G01S7/52 ,  H01L41/29 ,  H01L41/27 ,  B06B1/06 ,  G01S15/89 ,  H01L41/047 ,  H01L41/187

CPC classification number: A61B8/4494 ,  A61B8/4472 ,  A61B8/54 ,  B06B1/0622 ,  G01S7/5208 ,  G01S7/52082 ,  G01S15/8913 ,  G01S15/8925 ,  H01L27/20 ,  H01L41/047 ,  H01L41/081 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1132 ,  H01L41/1876 ,  H01L41/27 ,  H01L41/29 ,  H01L41/318 ,  H01L41/319 ,  H01L41/332

Abstract: A receiving transducer includes: a flexible portion; a piezoelectric film provided on the flexible portion; a first electrode provided between a first surface of the flexible portion, on which the piezoelectric body is provided, and a second surface of the piezoelectric film that is a surface not facing the flexible portion; and a second electrode that is provided between the first and second surfaces and that faces the first electrode with a gap interposed therebetween in plan view as viewed from the thickness direction of the flexible portion.

公开(公告)号：US20170095837A1

公开(公告)日：2017-04-06

申请号：US15283367

申请日：2016-10-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Hiromu MIYAZAWA ,  Hiroshi ITO ,  Tomoaki NAKAMURA ,  Masayoshi YAMADA ,  Jiro TSURUNO ,  Tsukasa FUNASAKA

IPC: B06B1/06 ,  A61B8/00 ,  G01N29/24

CPC classification number: B06B1/0603 ,  A61B8/4444 ,  A61B8/4494 ,  B06B1/0622 ,  G01N29/2437

Abstract: A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.

公开(公告)号：US20150085366A1

公开(公告)日：2015-03-26

申请号：US14557723

申请日：2014-12-02

Applicant: SEIKO EPSON CORPORATION

Inventor： Tsukasa FUNASAKA

IPC: G02B5/28

CPC classification number: G02B1/10 ,  G02B5/20 ,  G02B5/28 ,  G02B27/0006

Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.

Abstract translation: 滤光器包括第一和第二基板，第一和第二反射镜以及第一和第二电极。 第一基板具有平坦表面。 第二基板包括第一表面，第二表面和第三表面，第二表面在平面图中围绕第一表面，第三表面在平面图中围绕第二表面，第一表面在第二表面上方的高度 低于第二表面上方的第三表面的高度，第一表面和第二表面面对第一基底的平坦表面。 第一反射镜设置在第一基板的平坦表面上。 第二反射镜设置在第二基板的第一表面上，第二反射镜面向第一反射镜。 第一电极设置在第一基板的平坦表面上。 第二电极设置在第二基板的第二表面上，第二电极面对第一电极。

公开(公告)号：US20140078588A1

公开(公告)日：2014-03-20

申请号：US14086292

申请日：2013-11-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Tsukasa FUNASAKA

IPC: G02B5/28

CPC classification number: G02B1/10 ,  G02B5/20 ,  G02B5/28 ,  G02B27/0006

Abstract: An optical filter includes first and second substrates, first and second mirrors and first and second electrodes. The second substrate includes first, second and third surfaces. The second surface surrounds the first surface in a plan view, and the third surface surrounds the second surface in a plan view. A second height of the second surface is lower than a first height of the first surface, and a third height of the third surface is higher than the first height of the first surface. The first, second and third surfaces face a single flat surface of the first substrate. The first mirror is disposed on the first surface. The second mirror is disposed on the first substrate and faces the first mirror. The first electrode is disposed on the first substrate. The second electrode is disposed on the second surface of the second substrate and faces the first electrode.

Abstract translation: 光学滤波器包括第一和第二基板，第一和第二反射镜以及第一和第二电极。 第二基板包括第一，第二和第三表面。 第二表面在平面图中围绕第一表面，并且第三表面在平面图中围绕第二表面。 第二表面的第二高度低于第一表面的第一高度，第三表面的第三高度高于第一表面的第一高度。 第一，第二和第三表面面对第一基底的单个平坦表面。 第一个镜子设置在第一个表面上。 第二反射镜设置在第一基板上并面向第一反射镜。 第一电极设置在第一基板上。 第二电极设置在第二基板的第二表面上并面向第一电极。

公开(公告)号：US20190204722A1

公开(公告)日：2019-07-04

申请号：US16227644

申请日：2018-12-20

Applicant: Seiko Epson Corporation

Inventor： Yuki HANAMURA ,  Tsukasa FUNASAKA

IPC: G03B21/16 ,  H05K7/20

CPC classification number: G03B21/16 ,  H05K7/20309 ,  H05K7/20318 ,  H05K7/20327

Abstract: A cooling device of an optical element includes a circulation passage through which a fluid circulates. The circulation passage includes a window portion that is disposed on an incidence side or an emission side of the optical element and transmits light, an evaporation portion that is connected to the window portion and includes a plurality of channel portions, and a heat radiation portion that radiates heat of the fluid. The fluid transmits the light in a liquid state. The fluid is a liquid in the window portion. The fluid that is a liquid evaporates to vapor in the plurality of channel portions. The fluid that is vapor condenses into a liquid in the heat radiation portion. A sectional area of each channel portion is less than a sectional area of a boundary between the window portion and the evaporation portion.