公开(公告)号：US20130320332A1

公开(公告)日：2013-12-05

申请号：US13897502

申请日：2013-05-20

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Suguru HONDO ,  Akihisa SHIMOMURA ,  Masaki KOYAMA ,  Motomu KURATA ,  Kazuya HANAOKA ,  Sho NAGAMATSU ,  Kosei NEI ,  Toru HASEGAWA

IPC: H01L29/66 ,  H01L29/786

CPC classification number: H01L29/66969 ,  H01L21/46 ,  H01L29/78618 ,  H01L29/7869 ,  H01L29/78693 ,  H01L29/78696

Abstract: A transistor including an oxide semiconductor film, which has stable electric characteristics is provided. A transistor including an oxide semiconductor film, which has excellent on-state characteristics is also provided. A semiconductor device in which an oxide semiconductor film having low resistance is formed and the resistance of a channel region of the oxide semiconductor film is increased. Note that an oxide semiconductor film is subjected to a process for reducing the resistance to have low resistance. The process for reducing the resistance of the oxide semiconductor film may be a laser process or heat treatment at a temperature higher than or equal to 450° C. and lower than or equal to 740° C., for example. A process for increasing the resistance of the channel region of the oxide semiconductor film having low resistance may be performed by plasma oxidation or implantation of oxygen ions, for example.