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公开(公告)号：US20240128072A1
公开(公告)日：2024-04-18
申请号：US18485311
申请日：2023-10-12
Applicant: SHIMADZU CORPORATION
Inventor： Shunki SHIBA , Tomoyoshi MATSUSHITA
CPC classification number: H01J49/24 , F25B41/42 , H01J49/0431
Abstract: A flow rate switching mechanism including: a first section including: a first housing with a passage internally bored through, the passage having a narrowed portion at a distance from one end of the passage, and the narrowed portion having a smaller cross-sectional area than the cross-sectional area of the passage at the one end; a capillary having an internal passage having a smaller cross-sectional area than the cross-sectional area of the narrowed portion; and a hermetic support member supporting the capillary and to provide a seal; a second section having a second housing identical in shape to the first housing, without having the capillary and the hermetic support member; and a three-way valve being alternatively switchable between a first state in which the outlet end is connected to the first inlet end and a second state in which the outlet end is connected to the second inlet end.
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公开(公告)号：US20190033256A1
公开(公告)日：2019-01-31
申请号：US15777352
申请日：2015-11-20
Applicant: SHIMADZU CORPORATION
Inventor： Tomoyoshi MATSUSHITA
Abstract: A vacuum processing apparatus 1 includes a processing chamber 3 that can bring an inside of the processing chamber into a vacuum state, a load lock chamber 2 that is coupled to the processing chamber 3 and that is switchable between an atmospheric state and the vacuum state, a communication unit 10 configured to communicate the processing chamber 3 and the load lock chamber 2, a stage 5 on which a processing object 9 is placed, the stage being movable between the processing chamber 3 and the load lock chamber 2 through the communication unit 10, and a sealing unit 6 fixed to the stage 5, the sealing unit being larger than an opening 300 of the communication unit 10 on a side of the processing chamber 3.
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