公开(公告)号：US20230036566A1

公开(公告)日：2023-02-02

申请号：US17868479

申请日：2022-07-19

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Daniele PRATI ,  Luca Giuseppe FALORNI ,  Luca GUERINONI

IPC: G01C19/5712

Abstract: The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.

公开(公告)号：US20220404150A1

公开(公告)日：2022-12-22

申请号：US17821724

申请日：2022-08-23

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro TOCCHIO ,  Luca Giuseppe FALORNI ,  Claudia COMI ,  Valentina ZEGA

IPC: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US20220380202A1

公开(公告)日：2022-12-01

申请号：US17744310

申请日：2022-05-13

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca GUERINONI ,  Patrick FEDELI ,  Luca Giuseppe FALORNI

IPC: B81B7/02 ,  B81B3/00

Abstract: A microelectromechanical device includes a substrate, a first structural layer, and a second structural layer of semiconductor material. A sensing mass extends in the first structural layer and is coupled to the substrate by first elastic connections to enable oscillation of the sensing mass in a sensing direction perpendicular to the substrate by a maximum amount relative to a resting position of the sensing mass. An out-of-plane stopper structure includes an anchorage fixed to the substrate and a mechanical end-of-travel structure, which extends in the second structural layer, faces the sensing mass, and is separated therefrom by a gap having a width smaller than the maximum displacement distance of the sensing mass. The mechanical end-of-travel structure is coupled to the anchorage by second elastic connections that enable movement of the mechanical end-of-travel structure in the sensing direction in response to an impact of the sensing mass.

公开(公告)号：US20240175682A1

公开(公告)日：2024-05-30

申请号：US18515075

申请日：2023-11-20

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca GUERINONI ,  Patrick FEDELI ,  Luca Giuseppe FALORNI

IPC: G01C19/5712 ,  G01C25/00

CPC classification number: G01C19/5712 ,  G01C25/00

Abstract: A microelectromechanical device includes: a support body; at least one movable mass of semiconductor material, elastically constrained to the support body so as to be able to oscillate; fixed detection electrodes rigidly connected to the support body and capacitively coupled to the at least one movable mass; and at least one test structure of semiconductor material, rigidly connected to the support body and distinct from the fixed detection electrodes. The test structure is capacitively coupled to the at least one movable mass and is configured to apply electrostatic forces to the at least one movable mass in response to a voltage between the test structure and the at least one movable mass.

公开(公告)号：US20230228570A1

公开(公告)日：2023-07-20

申请号：US18150720

申请日：2023-01-05

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Patrick FEDELI ,  Luca GUERINONI ,  Paola CARULLI ,  Luca Giuseppe FALORNI

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A microelectromechanical gyroscope is provided with a detection structure having: a substrate with a top surface parallel to a horizontal plane (xy); a mobile mass, suspended above the substrate to perform, as a function of a first angular velocity (Ωx) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (Ωx). The detection structure has a single mechanical anchorage structure for anchoring both the mobile mass and the stator elements to the substrate, arranged internally with respect to the mobile mass, which is coupled to this single mechanical anchorage structure by coupling elastic elements yielding to torsion around the second axis; the stator elements are integrally coupled to the single mechanical anchorage structure in an arrangement suspended above the top surface of the substrate.

公开(公告)号：US20220170745A1

公开(公告)日：2022-06-02

申请号：US17524609

申请日：2021-11-11

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca GUERINONI ,  Luca Giuseppe FALORNI

IPC: G01C19/5712 ,  G01C25/00

Abstract: A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.

公开(公告)号：US20180106617A1

公开(公告)日：2018-04-19

申请号：US15858909

申请日：2017-12-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele PRATI ,  Carlo VALZASINA ,  Luca Giuseppe FALORNI ,  Matteo Fabio BRUNETTO

IPC: G01C19/5733 ,  G01C19/5762 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US20160313123A1

公开(公告)日：2016-10-27

申请号：US15201133

申请日：2016-07-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Carlo VALZASINA ,  Luca Giuseppe FALORNI

IPC: G01C19/5712 ,  G01C19/5747

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.