公开(公告)号：US20130104652A1

公开(公告)日：2013-05-02

申请号：US13660954

申请日：2012-10-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: G01C19/56 ,  H02N1/00

CPC classification number: G01C19/5762 ,  G01C19/5726 ,  G01C19/5776

Abstract: A driving circuit for a gyroscope device provided with a micromechanical detection structure having a driving mass, which is driven in resonance condition and elastically coupled to which is a sensing mass for enabling detection of angular velocity; the driving circuit has: a set of driving electrodes, coupled to the driving mass; a driving stage supplying driving signals to the set of driving electrodes to cause oscillation in resonance condition of the driving mass; and a reading stage, which detects movement of the driving mass to implement a feedback control of the driving signals. In particular, the reading stage is selectively coupleable to the set of driving electrodes in a way temporally alternative to the driving stage, for discrete-time detection of the movement of the driving mass.

Abstract translation: 一种用于陀螺仪装置的驱动电路，其具有微机械检测结构，该微机械检测结构具有驱动质量块，该驱动质量块以共振状态驱动并被弹性耦合到其上，用于检测角速度; 驱动电路具有：一组驱动电极，耦合到驱动质量块; 向所述驱动电极组提供驱动信号以在所述驱动质量块的共振状态下产生振荡的驱动级; 以及读取级，其检测驱动质量块的移动，以实现对驾驶信号的反馈控制。 特别地，读取级选择性地以与驱动级相对的时间替代方式与驱动电极组耦合，以便对驱动质量的运动进行离散时间检测。

公开(公告)号：US11079229B2

公开(公告)日：2021-08-03

申请号：US16263416

申请日：2019-01-31

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/02

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

公开(公告)号：US09340413B2

公开(公告)日：2016-05-17

申请号：US14035798

申请日：2013-09-24

Applicant: STMicroelectronics S.r.l.

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Luca Coronato

IPC: H04R25/00 ,  B81C1/00 ,  B81B3/00 ,  H04R7/24 ,  H04R19/00 ,  H04R31/00 ,  H04R19/04

CPC classification number: B81C1/00182 ,  B81B3/0035 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R7/24 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49005

Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.

公开(公告)号：US20150000400A1

公开(公告)日：2015-01-01

申请号：US13890984

申请日：2013-05-09

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: G01C19/5747

CPC classification number: G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

Abstract: An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Abstract translation: 集成的MEMS陀螺仪具有：至少第一驱动质量块，当驱动电极的组件偏压时，沿着第一轴线沿着第一驱动运动驱动，第一驱动运动在存在旋转的情况下产生至少一个感测运动 的集成MEMS陀螺仪; 以及在集成的MEMS陀螺仪的转动存在的情况下，沿着第二轴线横向于第一轴线的第二驱动运动驱动的至少第二驱动质量块，第二驱动运动至少产生相应的感测运动。 集成的MEMS陀螺仪还设置有第一弹性耦合元件，该第一弹性耦合元件使得第一驱动质量块和第二驱动质量块以使得第一驱动运动以给定的运动比率耦合到第二驱动运动的方式弹性耦合。

公开(公告)号：US08733172B2

公开(公告)日：2014-05-27

申请号：US13789476

申请日：2013-03-07

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract translation: 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US20140116135A1

公开(公告)日：2014-05-01

申请号：US14149653

申请日：2014-01-07

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: G01C19/02

CPC classification number: G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

Abstract: An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Abstract translation: 集成的MEMS陀螺仪具有：至少第一驱动质量块，当驱动电极的组件偏压时，沿着第一轴线沿着第一驱动运动驱动，第一驱动运动在存在旋转的情况下产生至少一个感测运动 的集成MEMS陀螺仪; 以及在集成的MEMS陀螺仪的转动存在的情况下，沿着第二轴线横向于第一轴线的第二驱动运动驱动的至少第二驱动质量块，第二驱动运动至少产生相应的感测运动。 集成的MEMS陀螺仪还设置有第一弹性耦合元件，该第一弹性耦合元件使得第一驱动质量块和第二驱动质量块以使得第一驱动运动以给定的运动比率耦合到第二驱动运动的方式弹性耦合。

公开(公告)号：US20130180334A1

公开(公告)日：2013-07-18

申请号：US13789476

申请日：2013-03-07

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract translation: 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US10209071B2

公开(公告)日：2019-02-19

申请号：US15654584

申请日：2017-07-19

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Coronato ,  Gabriele Cazzaniga

IPC: G01C19/5712 ,  G01C19/5747 ,  G01C19/02

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

公开(公告)号：US10168154B2

公开(公告)日：2019-01-01

申请号：US14578255

申请日：2014-12-19

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: G01C19/56 ,  G01C19/5747 ,  G01C19/02

Abstract: An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

公开(公告)号：US09278847B2

公开(公告)日：2016-03-08

申请号：US14037163

申请日：2013-09-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Giacomo Calcaterra

IPC: G01C19/56 ,  B81B3/00 ,  G01C19/5712

CPC classification number: B81B3/0018 ,  G01C19/5712 ,  Y10T29/49826

Abstract: An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.