公开(公告)号：US09470526B2

公开(公告)日：2016-10-18

申请号：US14266676

申请日：2014-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC: G01C19/56 ,  G01C19/5712

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

公开(公告)号：USRE45792E1

公开(公告)日：2015-11-03

申请号：US14062687

申请日：2013-10-24

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

IPC: G01C19/56 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0828

Abstract: A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.

Abstract translation: 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内提供一个开口，并且传感块布置在开口内。 弹性支撑和锚固元件使得感测质量在旋转运动中固定到驱动质量块，并且在检测运动中基本上与驱动质量分离。 检测运动是围绕位于平面中的轴的旋转。 在平面图中，感测质量具有非矩形形状; 特别地，感测质量具有径向几何形状，并且在平面图中是径向环形扇区的整体形状。

公开(公告)号：US20140230548A1

公开(公告)日：2014-08-21

申请号：US14266676

申请日：2014-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract translation: 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US20140021564A1

公开(公告)日：2014-01-23

申请号：US14037163

申请日：2013-09-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Giacomo Calcaterra

IPC: B81B3/00

CPC classification number: B81B3/0018 ,  G01C19/5712 ,  Y10T29/49826

Abstract: An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.

Abstract translation: 集成的微机电结构设置有驱动质量块，通过弹性锚固元件锚固到基底，并被设计成在具有驱动运动的平面中被致动; 以及第一感测质量块和第二感测质量块，悬挂在驱动质量块内并通过相应的弹性支撑元件联接到驱动质量块，以便在所述驱动运动中相对于其固定，并响应于角度来执行相应的检测运动 速度。 特别地，第一感测质量和第二感测质量通过弹性耦合元件连接在一起，被配置为耦合其振动模式。

公开(公告)号：US20170059322A1

公开(公告)日：2017-03-02

申请号：US15140349

申请日：2016-04-27

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga

IPC: G01C19/5747

CPC classification number: G01C19/5747 ,  G01C19/5712 ,  G01P9/02 ,  Y10T29/49002

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

Abstract translation: 集成的MEMS结构包括锚定到基板并由驱动运动致动的驱动组件。 悬挂在基板上并且经由弹性元件联接到驱动组件的一对感测质量被固定在驱动运动中，并且响应于外部应力而沿着第一检测方向进行运动。 联接组件机械耦合该对感测块以耦合振动模式。 联接组件由刚性元件形成，该刚性元件连接感测质量并且具有在感测质量块之间的中间位置处的约束点，以及用于将刚性元件耦合到感测质量的弹性联接元件，以将第一刚度呈现为 沿着检测方向的相位相对运动和大于第一刚度的第二刚度相对于传感块的同相运动。

公开(公告)号：US09739613B2

公开(公告)日：2017-08-22

申请号：US15140349

申请日：2016-04-27

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga

IPC: G01C19/5712 ,  G01C19/5747 ,  G01C19/02

CPC classification number: G01C19/5747 ,  G01C19/5712 ,  G01P9/02 ,  Y10T29/49002

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

公开(公告)号：US20170023363A1

公开(公告)日：2017-01-26

申请号：US14578255

申请日：2014-12-19

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: G01C19/5747

CPC classification number: G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

Abstract: An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Abstract translation: 集成的MEMS陀螺仪具有：至少第一驱动质量块，当驱动电极的组件偏压时，沿着第一轴线沿着第一驱动运动驱动，第一驱动运动在存在旋转的情况下产生至少一个感测运动 的集成MEMS陀螺仪; 以及在集成的MEMS陀螺仪的转动存在的情况下，沿着第二轴线横向于第一轴线的第二驱动运动驱动的至少第二驱动质量块，第二驱动运动至少产生相应的感测运动。 集成的MEMS陀螺仪还设置有第一弹性耦合元件，该第一弹性耦合元件使得第一驱动质量块和第二驱动质量块以使得第一驱动运动以给定的运动比率耦合到第二驱动运动的方式弹性耦合。

公开(公告)号：US09097525B2

公开(公告)日：2015-08-04

申请号：US13660954

申请日：2012-10-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: G01C19/56 ,  G01C19/5762 ,  G01C19/5776 ,  G01C19/5726

CPC classification number: G01C19/5762 ,  G01C19/5726 ,  G01C19/5776

Abstract: A driving circuit for a gyroscope device provided with a micromechanical detection structure having a driving mass, which is driven in resonance condition and elastically coupled to which is a sensing mass for enabling detection of angular velocity; the driving circuit has: a set of driving electrodes, coupled to the driving mass; a driving stage supplying driving signals to the set of driving electrodes to cause oscillation in resonance condition of the driving mass; and a reading stage, which detects movement of the driving mass to implement a feedback control of the driving signals. In particular, the reading stage is selectively coupleable to the set of driving electrodes in a way temporally alternative to the driving stage, for discrete-time detection of the movement of the driving mass.

Abstract translation: 一种用于陀螺仪装置的驱动电路，其具有微机械检测结构，该微机械检测结构具有驱动质量块，该驱动质量块以共振状态驱动并被弹性耦合到其上，用于检测角速度; 驱动电路具有：一组驱动电极，耦合到驱动质量块; 向所述驱动电极组提供驱动信号以在所述驱动质量块的共振状态下产生振荡的驱动级; 以及读取级，其检测驱动质量块的移动，以实现对驾驶信号的反馈控制。 特别地，读取级选择性地以与驱动级相对的时间替代方式与驱动电极组耦合，以便对驱动质量的运动进行离散时间检测。

公开(公告)号：US08736405B2

公开(公告)日：2014-05-27

申请号：US13718964

申请日：2012-12-18

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: H01H51/22

CPC classification number: B81B3/0018 ,  B81B3/0013 ,  B81B2201/0235 ,  B81B2201/0242

Abstract: An embodiment of a microelectromechanical device having a first structural element, a second structural element, which is mobile with respect to the first structural element, and an elastic supporting structure, which extends between the first and second structural elements to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure, which includes at least one flexible element, which is fixed only with respect to the first structural element and, in a condition of rest, is set at a first distance from the second structural element. The anti-stiction structure is designed to generate a repulsive force between the first and second structural elements in the case of relative movement by an amount greater than the first distance.

Abstract translation: 具有第一结构元件，相对于第一结构元件可移动的第二结构元件的微机电装置的实施例和在第一和第二结构元件之间延伸的弹性支撑结构，以使得能够在 第一和第二结构元件。 此外，微电子机械装置具有抗静电结构，其包括至少一个柔性元件，其仅相对于第一结构元件固定，并且在休止状态下被设置在离第二结构元件第一距离处。 抗静力结构被设计成在相对运动大于第一距离的量的情况下在第一和第二结构元件之间产生排斥力。

公开(公告)号：US20140116136A1

公开(公告)日：2014-05-01

申请号：US14149660

申请日：2014-01-07

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga

IPC: G01C19/02

CPC classification number: G01C19/5747 ,  G01C19/5712 ,  G01P9/02 ,  Y10T29/49002

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

Abstract translation: 集成的MEMS结构包括锚定到基板并由驱动运动致动的驱动组件。 悬挂在基板上并且经由弹性元件联接到驱动组件的一对感测质量被固定在驱动运动中，并且响应于外部应力而沿着第一检测方向进行运动。 联接组件机械耦合该对感测块以耦合振动模式。 联接组件由刚性元件形成，该刚性元件连接感测质量并且具有在感测质量块之间的中间位置处的约束点，以及用于将刚性元件耦合到感测质量的弹性联接元件，以将第一刚度呈现为 沿着检测方向的相位相对运动和大于第一刚度的第二刚度相对于传感块的同相运动。