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公开(公告)号：US20210188620A1
公开(公告)日：2021-06-24
申请号：US17126903
申请日：2020-12-18
Applicant: STMicroelectronics S.r.l.
Inventor： Luca SEGHIZZI , Nicolo' BONI , Laura OGGIONI , Roberto CARMINATI , Marta CARMINATI
Abstract: For manufacturing an optical microelectromechanical device, a first wafer of semiconductor material having a first surface and a second surface is machined to form a suspended mirror structure, a fixed structure surrounding the suspended mirror structure, elastic supporting elements which extend between the fixed structure and the suspended mirror structure, and an actuation structure coupled to the suspended mirror structure. A second wafer is machined separately to form a chamber delimited by a bottom wall having a through opening. The second wafer is bonded to the first surface of the first wafer in such a way that the chamber overlies the actuation structure and the through opening is aligned to the suspended mirror structure. Furthermore, a third wafer is bonded to the second surface of the first wafer to form a composite wafer device. The composite wafer device is then diced to form an optical microelectromechanical device.
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12.发明申请公开(公告)号：US20200301130A1
公开(公告)日：2020-09-24
申请号：US16827282
申请日：2020-03-23
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.
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13.发明申请公开(公告)号：US20200057298A1
公开(公告)日：2020-02-20
申请号：US16539109
申请日：2019-08-13
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A micromechanical device includes a fixed structure, a mobile portion rotatable about a first rotation axis, and a first actuation structure arranged between the fixed structure and the mobile portion to enable rotation of the mobile portion about the first rotation axis. The mobile portion includes a supporting structure, a tiltable platform rotatable about a second rotation axis, transverse to the first rotation axis, and a second actuation structure coupled between the tiltable platform and the supporting structure. Stiffening elements are arranged between the supporting structure and the fixed structure. The micromechanical device may be used within a picoprojector.
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14.发明公开公开(公告)号：US20230168488A1
公开(公告)日：2023-06-01
申请号：US18058152
申请日：2022-11-22
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Federico VERCESI , Fabrizio CERINI , Luca GUERINONI , Nicolo' BONI
IPC: G02B26/04
CPC classification number: G02B26/04
Abstract: A MEMS shutter including: a substrate of semiconductor material traversed by a main aperture, and a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures; a plurality of actuators; and a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first semiconductor layer and the second semiconductor layer, the shielding structures being arranged angularly around the underlying main aperture so as to provide shielding of the main aperture, each shielding structure being further coupled to the supporting structure via a corresponding deformable structure. Each actuator may be controlled so as to cause a rotation of a corresponding shielding structure between a respective first position and a respective second position, thus varying shielding of the main aperture. The first and second positions of the shielding structures are such that, in at least one operating condition of the MEMS shutter, pairs of adjacent shielding structures at least partially overlap one another.
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15.发明公开公开(公告)号：US20230168415A1
公开(公告)日：2023-06-01
申请号：US18058147
申请日：2022-11-22
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Federico VERCESI , Nicolo' BONI , Fabrizio CERINI , Luca GUERINONI
Abstract: A MEMS shutter including: a semiconductor substrate traversed by an aperture; a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers; a plurality of actuators; a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers, the shielding structures being arranged angularly around the underlying aperture so as to provide shielding of the aperture, each shielding structure being further coupled to the supporting structure via a deformable structure. Each actuator may be controlled so as to translate a corresponding shielding structure between a first position and a second position, thus varying shielding of the aperture; the first and second positions of the shielding structures are such that, in at least one operating condition, pairs of adjacent shielding structures at least partially overlap one another.
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Patent Agency Ranking
公开(公告)号：US20230035607A1
公开(公告)日：2023-02-02
申请号：US17964672
申请日：2022-10-12
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A microelectromechanical (MEMS) structure includes a fixed frame internally defining a cavity, and a mobile mass suspended in the cavity and movable with a first resonant rotational mode about a first rotation axis and with a second resonant rotational mode about a second rotation axis orthogonal to the first. A pair of supporting elements extends in the cavity, is rigidly coupled to the fixed frame, and is elastically deformable to cause rotation of the mobile mass about the first rotation axis. A pair of elastic-coupling elements is elastically coupled between the mobile mass and the first pair of supporting elements. Each of the elastic-coupling elements includes a first and second elastic portions, the first elastic portion being compliant to torsion about the second rotation axis. The second elastic portion is compliant to bending outside of a horizontal plane of main extension of the MEMS structure.
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公开(公告)号：US20220334378A1
公开(公告)日：2022-10-20
申请号：US17720506
申请日：2022-04-14
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto CARMINATI , Nicolo' BONI , Andrea BARBIERI , Marco ZAMPROGNO , Luca MOLINARI
Abstract: A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.
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公开(公告)号：US20220229287A1
公开(公告)日：2022-07-21
申请号：US17715639
申请日：2022-04-07
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto CARMINATI , Nicolo' BONI , Massimiliano MERLI
IPC: G02B26/08
Abstract: Disclosed herein is a method of making a microelectromechanical (MEMS) device. The method includes, in a single structural layer, affixing a tiltable structure to an anchorage portion with first and second supporting arms extending between the anchorage portion and opposite sides of the tiltable structure, and forming first and second resonant piezoelectric actuation structures extending between a constraint portion of the first supporting arm and the anchorage portion, on opposite sides of the first supporting arm. The method further includes coupling a handling wafer underneath the structural layer to define a cavity therebetween, and forming a passivation layer over the structural layer, the passivation layer having contact openings defined therein for routing metal regions for electrical coupling to respective electrical contact pads, the electrical contact pads being electrically connected to the first and second resonant piezoelectric actuation structures.
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19.发明申请公开(公告)号：US20210191107A1
公开(公告)日：2021-06-24
申请号：US17121961
申请日：2020-12-15
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.
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20.发明申请公开(公告)号：US20190068934A1
公开(公告)日：2019-02-28
申请号：US16174801
申请日：2018-10-30
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Roberto CARMINATI , Nicolo' BONI
Abstract: Disclosed herein is a MEMS device including a fixed structure, a mobile structure, and deformable structures extending therebetween. The deformable structures have first ends anchored along X and Y axes of the fixed structure, and have second ends anchored offset from the X and Y axes of the fixed structure. The deformable structures are shaped so as to curve from their anchoring points along the mobile structure back toward the mobile structure, to extend along the perimeter of the mobile structure, and to then curve away from the mobile structure and toward their anchoring points along the fixed structure. Each deformable structure has two piezoelectric elements that extend along the length of that deformable structure, with one piezoelectric element having a greater length than the other piezoelectric element.
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