公开(公告)号：US09054673B2

公开(公告)日：2015-06-09

申请号：US14069748

申请日：2013-11-01

Applicant: Samsung Electronics Co., Ltd. ,  Korea University Industrial & Academic Collaboration Foundation

Inventor： Yun-kwon Park ,  Byeoung-ju Ha ,  Byeong-Kwon Ju ,  Jae-sung Rieh ,  In-sang Song ,  Jin-woo Lee ,  Jea-shik Shin ,  Young-min Park

IPC: H01L21/00 ,  H03H9/46 ,  B81C1/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/00 ,  H03H3/007 ,  H03H9/24

CPC classification number: H03H9/462 ,  B81B2201/0271 ,  B81C1/00142 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H03H3/0072 ,  H03H9/2463

Abstract: A resonator fabrication method is provided. A method includes providing a plurality of electrode patterns disposed apart from each other on a substrate using a nano-imprint technique; and forming an extended electrode pattern connected to a plurality of electrode patterns, and forming a nano structure laid across an extended electrode patterns. Therefore, a nano-electromechanical system (NEMS) resonator is easily fabricated at a nanometer level.

Abstract translation: 提供了一种谐振器制造方法。 一种方法包括使用纳米压印技术在基板上提供彼此分离的多个电极图案; 以及形成连接到多个电极图案的延伸电极图案，并且形成跨越延伸的电极图案的纳米结构。 因此，纳米机电系统（NEMS）谐振器容易在纳米级制造。