公开(公告)号：US20230102201A1

公开(公告)日：2023-03-30

申请号：US17874475

申请日：2022-07-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Vladimir Vsevolodovich PROTOPOPOV ,  Vasily Grigorievich PASHKOVSKIY ,  Chansoo KANG ,  Youngdo KIM ,  Hoonseop KIM ,  Sangki NAM ,  Sejin OH ,  Changsoon LIM

IPC: H01J37/32

Abstract: A device for measuring a density of plasma is provided. The device includes a first sensor configured to measure a microwave spectrum of an input port reflection parameter of plasma, the first sensor having a probe including a conductive material and a flat plate shape, and a second sensor configured to measure an optical signal generated from the plasma, the second sensor being configured to detect the optical signal through the probe of the first sensor.

公开(公告)号：US20230091161A1

公开(公告)日：2023-03-23

申请号：US17711181

申请日：2022-04-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sejin OH ,  Youngdo KIM ,  Sanghun KIM ,  Sungyeol KIM ,  Younghwan KIM ,  Taemin EARMME ,  Changyun LEE ,  Sunghun JANG

IPC: H01J37/32 ,  H01L21/311

Abstract: A plasma control device includes a matching circuit, a resonance circuit, and a controller. The matching circuit is connected to a first electrode of a plasma chamber including the first electrode and a second electrode, and matches impedance of a radio frequency (RF) power by an RF driving signal with an impedance of the first electrode. The RF driving signal is based on a first RF signal having a first frequency. The resonance circuit is connected between the second electrode and a ground voltage, and controls plasma distribution within the plasma chamber by providing resonance with respect to harmonics associated with the first frequency and by adjusting a ground impedance between the second electrode and the ground voltage. The controller provides the resonance circuit with a capacitance control signal associated with the resonance and switch control signals associated with the ground impedance.

公开(公告)号：US20210335325A1

公开(公告)日：2021-10-28

申请号：US17370069

申请日：2021-07-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yongkoo HER ,  Youngdo KIM ,  Jungbae BAE ,  Hyunchang SHIN ,  Joongyu LEE ,  Songhee JUNG ,  Jaeseung CHOI

IPC: G09G5/10 ,  G09G3/3233

Abstract: Various embodiments disclose a method and an apparatus including a display, a memory including information on a number of duty cycles per one refresh period for emitting light by pixels of the display corresponding to each of a plurality of refresh rates of the display, and a processor, wherein the processor is configured to control the electronic device to perform an operation according to a first number of duty cycles based on the display operating at a first refresh rate, and perform an operation according to a second number of duty cycles based on the display operating at a second refresh rate, wherein the first number is less than the second number based on the first refresh rate being higher than the second refresh rate.