公开(公告)号：US20210074594A1

公开(公告)日：2021-03-11

申请号：US16847727

申请日：2020-04-14

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Junbum PARK ,  Younghwan KIM ,  Jongsu KIM ,  Youngjoo LEE ,  Yoojin JEONG

IPC分类号： H01L21/66 ,  G01B11/06 ,  H01J37/32 ,  G01N21/95

摘要： A semiconductor substrate measuring apparatus includes a light source to generate irradiation light having a sequence of on/off at a predetermined interval, the light source to provide the irradiation light to a chamber with an internal space for processing a semiconductor substrate using plasma, an optical device between the light source and the chamber, the optical device to split a first measurement light into a first optical path, condensed while the light source is turned on, to split a second measurement light into a second optical path, condensed while the light source is turned off, and to synchronize with the on/off sequence, and a photodetector connected to the first and second optical paths, the photodetector to subtract spectra of first and second measurement lights to detect spectrum of reflected light, and to detect plasma emission light emitted from the plasma based on the spectrum of the second measurement light.

公开(公告)号：US20200319025A1

公开(公告)日：2020-10-08

申请号：US16751356

申请日：2020-01-24

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Jongsu KIM ,  Younghwan KIM ,  Junbum PARK ,  Youngjoo LEE ,  Sungho JANG

IPC分类号： G01J3/02 ,  G01J3/10 ,  G02B27/14

摘要： An optical emission spectroscopy (OES) calibration system includes a chamber, an adapter, an OES device, a calibration device, and a spectrometer. The chamber includes a viewport. The adapter is fastened to the viewport, and includes a first beam splitter and a second beam splitter. The OES device detects plasma light generated in the chamber and transmitted through the adapter and generates OES data based on the detected plasma light. The calibration device includes a light source, and generates correction data for compensating for deviations in the OES data. The spectrometer detects light emitted from the light source and split by the first beam splitter or the second beam splitter. Each of the OES device, the calibration device, and the spectrometer is fastened to the adapter through an optical cable, and the calibration device generates the correction data using an intensity of light detected by the spectrometer.

公开(公告)号：US20180235471A1

公开(公告)日：2018-08-23

申请号：US15896434

申请日：2018-02-14

申请人： Samsung Electronics Co., Ltd.

发明人： Injo JEONG ,  Jeahyuck LEE ,  Younghwan KIM ,  Seungeun LEE ,  Yongjin LEE ,  Bokun CHOI

IPC分类号： A61B5/00 ,  A61B5/11 ,  A61B5/0205

CPC分类号： A61B5/0026 ,  A61B5/0006 ,  A61B5/0205 ,  A61B5/1116 ,  A61B5/1118 ,  A61B5/746 ,  G06K9/00013 ,  G06K9/00335 ,  G06K9/00362 ,  G06K9/00771 ,  G06K9/3233

摘要： An electronic device and method are disclosed herein. The electronic device includes an image sensor, a radio frequency (RF) sensor, and a processor. The processor implements the method, including capturing an image including at least one object using an image sensor, determining an interest area of the at least one object included within the captured image, transmitting a radio frequency (RF) signal to at least a portion of the interest area using an RF sensor, receiving the transmitted RF signal reflected from the at least the portion of the interest area using the RF sensor, and obtaining biometric information for the at least one object based on the reflected RF signal.

公开(公告)号：US20230091161A1

公开(公告)日：2023-03-23

申请号：US17711181

申请日：2022-04-01

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Sejin OH ,  Youngdo KIM ,  Sanghun KIM ,  Sungyeol KIM ,  Younghwan KIM ,  Taemin EARMME ,  Changyun LEE ,  Sunghun JANG

IPC分类号： H01J37/32 ,  H01L21/311

摘要： A plasma control device includes a matching circuit, a resonance circuit, and a controller. The matching circuit is connected to a first electrode of a plasma chamber including the first electrode and a second electrode, and matches impedance of a radio frequency (RF) power by an RF driving signal with an impedance of the first electrode. The RF driving signal is based on a first RF signal having a first frequency. The resonance circuit is connected between the second electrode and a ground voltage, and controls plasma distribution within the plasma chamber by providing resonance with respect to harmonics associated with the first frequency and by adjusting a ground impedance between the second electrode and the ground voltage. The controller provides the resonance circuit with a capacitance control signal associated with the resonance and switch control signals associated with the ground impedance.