公开(公告)号：US20230060486A1

公开(公告)日：2023-03-02

申请号：US17748152

申请日：2022-05-19

申请人： Samsung Electronics Co., Ltd.

发明人： Changyun LEE ,  Myoungsoo KIM ,  Sangchul HAN ,  Daeman SEO

IPC分类号： H05H1/46

摘要： A plasma generator includes a coaxial tube assembly, a radio frequency (RF) electrode, and a feed including an inner circumferential surface that defines a first and second recesses at opposite, first and second ends of the feed. A first protrusion of the coaxial tube assembly is coupled to the first recess of the feed. A second protrusion of the coaxial tube assembly is coupled to the second recess of the feed. The feed includes first and second inner surfaces that define first and second insertion grooves in the inner circumferential surface at the first and second ends of the feed, respectively. First and second coil springs are at least partially within the first and second insertion grooves, respectively. The coaxial tube assembly, the RF electrode, and the feed provide an RF power transmission path based on the feed being coupled between the coaxial tube assembly and the RF electrode.

公开(公告)号：US20230091161A1

公开(公告)日：2023-03-23

申请号：US17711181

申请日：2022-04-01

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Sejin OH ,  Youngdo KIM ,  Sanghun KIM ,  Sungyeol KIM ,  Younghwan KIM ,  Taemin EARMME ,  Changyun LEE ,  Sunghun JANG

IPC分类号： H01J37/32 ,  H01L21/311

摘要： A plasma control device includes a matching circuit, a resonance circuit, and a controller. The matching circuit is connected to a first electrode of a plasma chamber including the first electrode and a second electrode, and matches impedance of a radio frequency (RF) power by an RF driving signal with an impedance of the first electrode. The RF driving signal is based on a first RF signal having a first frequency. The resonance circuit is connected between the second electrode and a ground voltage, and controls plasma distribution within the plasma chamber by providing resonance with respect to harmonics associated with the first frequency and by adjusting a ground impedance between the second electrode and the ground voltage. The controller provides the resonance circuit with a capacitance control signal associated with the resonance and switch control signals associated with the ground impedance.