Peeling method
    11.
    发明授权

    公开(公告)号:US09735398B2

    公开(公告)日:2017-08-15

    申请号:US14450463

    申请日:2014-08-04

    CPC classification number: H01L51/56 H01L51/0024 H01L51/003 H01L51/524

    Abstract: To improve the yield in a peeling process and improve the yield in a manufacturing process of a flexible light-emitting device or the like, a peeling method includes a first step of forming a peeling layer over a first substrate, a second step of forming a layer to be peeled including a first layer in contact with the peeling layer over the peeling layer, a third step of curing a bonding layer in an overlapping manner with the peeling layer and the layer to be peeled, a fourth step of removing part of the first layer overlapping with the peeled layer and the bonding layer to form a peeling starting point, and a fifth step of separating the peeling layer and the layer to be peeled. The peeling starting point is preferably formed by laser light irradiation.

    Film Formation Apparatus, Film Formation Method, Manufacturing Apparatus, and Method for Manufacturing Light-Emitting Device
    19.
    发明申请
    Film Formation Apparatus, Film Formation Method, Manufacturing Apparatus, and Method for Manufacturing Light-Emitting Device 有权
    成膜装置,成膜方法,制造装置以及制造发光装置的方法

    公开(公告)号:US20130074763A1

    公开(公告)日:2013-03-28

    申请号:US13679391

    申请日:2012-11-16

    Abstract: An object is to improve use efficiency of an evaporation material, to reduce manufacturing cost of a light-emitting device, and to reduce manufacturing time needed for a light-emitting device including a layer containing an organic compound. The pressure of a film formation chamber is reduced, a plate is rapidly heated by heat conduction or heat radiation by using a heat source, a material layer on a plate is vaporized in a short time to be evaporated to a substrate on which the material layer is to be formed (formation substrate), and then the material layer is formed on the formation substrate. The area of the plate that is heated rapidly is set to have the same size as the formation substrate and film formation on the formation substrate is completed by one application of heat.

    Abstract translation: 本发明的目的在于提高蒸发材料的使用效率,降低发光元件的制造成本,减少含有有机化合物的层的发光元件所需的制造时间。 成膜室的压力减小,通过使用热源的热传导或热辐射快速加热板,在短时间内蒸发板上的材料层以蒸发到其上的材料层 (形成衬底),然后在形成衬底上形成材料层。 将快速加热的板的面积设定为与形成基板相同的尺寸,并且通过一次加热完成在形成基板上的成膜。

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