摘要:
An angular rate sensor provides a digital delta theta output signal. A drive member is formed of a single, silicon wafer having a pair of oppositely-facing planar surfaces. The drive member includes a frame and a drive member central portion connected to the frame and arranged to have rotational compliance between the frame and the central portion about an axis perpendicular to the planar surfaces of the silicon wafer. Drive signals are applied to a plurality of electrodes on the central portion to cause rotational oscillation of the drive member central portion about a drive axis perpendicular to the planar surfaces of the silicon wafer. A silicon sensing member is connected to the drive member. The sensing member has a central support member connected to the drive member central portion such that rotational oscillations of the drive member central portion are transmitted to the sensing member central portion. A sensing portion is connected to the sensing member central support member to allow the sensing portion to oscillate about the drive axis and to allow an input rotation rate about an axis perpendicular to the drive axis to produce out-of-plane oscillations of the sensing portions. Signal processing apparatus is connected to the sensing portion for producing a signal indicative of the input rotational rate as a function of the amplitude of the out-of-plane oscillations of the sensing portion.
摘要:
A dithered Coriolis acceleration sensor system has a proof mass that is free of feedback in the accelerometer servo loop at the dither frequency by totally notching out all feedback torque at this frequency. The proof mass relative motion is then a direct measure of the rate because there is no feedback torque to alter the proof mass response to the acceleration. The feedback modulation system according to the invention captures the Coriolis-sensor output such that the phase and gain of the signal generated from the sensor are of no concern in maintaining good scale factor.
摘要:
Quadrature error occurs in vibrating gyroscopes because of manufacturing flaws that permit the sensing element (proof mass) to oscillate about an axis that is not orthogonal to the output axis. This creates an oscillation about the output axis that has a component of the sensing element's vibration acceleration. This output axis oscillation, which is in phase with the driven acceleration of the sensing element, is called quadrature torque since it is ninety degrees out of phase with the angular rate induced acceleration. In order to eliminate this output axis oscillation, the present invention generates sinusoidal forces on the dither mass by applying dc voltages on the dither mass pickoff electrodes. These forces create a counter dither motion about the output axis that cancels the output axis oscillation generated by the non-orthogonal dither axis.
摘要:
An integrated accelerometer includes features for minimizing the effects of foreseeable operational stresses. The accelerometer is of a type that includes a planar support base having an internal aperture for accommodating a hinged strut and limit stops for minimizing the travel of the shadow paddle portion of the strut. The limit stops are fabricated of material of suitable spring constant to provide an appropriate degree of "give" without degrading instrument performance or accuracy. Two-piece arrangements sandwich the hinges, thereby limiting flexure to an acceptable range. The predictable mechanical stresses resulting, for example, from thermal coefficient mismatches between the materials of the torquer coil and the strut are minimized by the use of a spacer intermediate the base and the coil. The spacer, fabricated of material whose thermal coefficient closely matches that of the pendulous mass is generally circular, and includes diametrically-opposed prongs on the upper and lower edges thereof, such arrangements of prongs being staggered by ninety degrees.
摘要:
A vibrating rotation rate sensor of the type that includes a generally-planar, H-shaped frame of piezoelectric material such as quartz. A first set of drive electrodes is fixed to a pair of upper tines and a second set of pickoff electrodes is fixed to a pair of lower tines. An array of control electrodes is fixed to the upper tine pair adjacent the cross-piece of the H-shaped frame. The control electrodes permit the application of control signals for nulling Coriolis-induced out-of-plane vibration of the upper tines allowing use of a resonant frame.
摘要:
A multisensor of the type that employs counteroscillating rotor-mounted accelerometers to measure both linear and Coriolis accelerations operates open loop to sense linear acceleration and closed loop to sense the Coriolis acceleration from angular rate inputs. Accelerometers mounted to arms of the counteroscillating rotors are designed so that the natural frequency of the proofmass with respect to the accelerometer frame closely approximates the resonant frequency .omega..sub.D of the driven rotor pair. A robust hinge design permits open loop operation for low frequency linear acceleration inputs without saturation. Low voltage closed-loop operation is made possible by the highly compliant nature of the resonant structure in responding to the much higher frequency Coriolis accelerations generated by angular rate inputs.
摘要:
A digital circuit for adapting the output of a closed-loop accelerometer to a utilization circuit where the cycle time of the rebalance loop of the accelerometer is unrelated to the cycle time of the utilization circuit. A register receives and stores a digital value representative of measured acceleration and a bank of serially-arranged divide-by-two counters accepts the output of the rebalance loop clock. A gate arrangement makes one-by-one correlations between the states of the register and the outputs of the divide-by-two counters. A trigger circuit receives the gate outputs, providing a pulse when triggered by a downgoing edge of a square wave output of the gate array. A counter receives the pulse stream and is gated, in turn, in accordance with the cycle time of the utilization circuit so that the accelerometer data employed therein is representative of the portion of the acceleration occurring during a cycle of the utilization circuit.
摘要:
A force balanced accelerometer system comprises an accelerometric sensor and a control system. The sensor comprises a conductive pendulum pivotably mounted between first and second electrode plates. The control system establishes a cycle period with three phases. In the first phase, the pendulum is electrically isolated in an electric field established between the electrodes. The pendulum is moved from a null position in response to inertial acceleration, and a pickoff signal indicative of the acceleration-responsive position is generated. The pickoff signal is fed into a sample-and-hold circuit and then into a servo compensation circuit, having proportional and integral control, so as to generate a force-indicative signal indicative of the magnitude and direction of the force required to restore the pendulum to the null position. At the start of the second phase, the electrode required to restore the pendulum to its null position, selected in accordance with the sign of the force-indicative signal, is maintained at a first fixed potential, while the pendulum and the other plate are switched to a second fixed potential. The second phase is maintained for a time period determined by the magnitude of the force-indicative signal, which time period is a measure of the sensed acceleration. At the end of the second phase, the third phase begins with the electrodes and pendulum switched to ground, until the cycle repeats. The cycle period and the timing of the phases are controlled by a microprocessor.
摘要:
An exemplary vibrating mass gyroscope uses a mass disposed for movement along an x-axis and y-axis. First and second electrodes are disposed adjacent surfaces of the mass along an x-axis and y-axis. Circuitry, coupled to the first and second electrodes, provides during a first mode a dither driving voltage on one of the first and second electrodes causing vibrating displacement of the mass along the one of the x-axis and y-axis. The measurement voltage is sensed on the other of the first and second electrodes where the measurement voltage represents a first angular rate value. During a second mode, the circuitry provides a dither driving voltage on the other of the first and second electrodes causing vibrating displacement of the mass along the other of the x-axis and y-axis and measurement voltage is sensed on the one of the first and second electrodes where the measurement voltage represents a second angular rate value. A combiner coupled to the circuitry receives the first and second angular rate values, and generates a resulting angular rate value based on both the first and second angular rate values wherein common bias errors are canceled. The common bias errors cancel because the pickoff sensing axis is coincident with the forcing axis when the same electrode is used for both the forcing and for the pickoff.
摘要:
A dithered Coriolis acceleration sensor system has a proof mass that is free of feedback in the accelerometer servo loop at the dither frequency by totally notching out all feedback torque at this frequency. The proof mass relative motion is then a direct measure of the rate because there is no feedback torque to alter the proof mass response to the acceleration. The feedback modulation system according to the invention captures the Coriolis-sensor output such that the phase and gain of the signal generated from the sensor are of no concern in maintaining good scale factor.