Navigation grade micromachined rotation sensor system
    11.
    发明授权
    Navigation grade micromachined rotation sensor system 失效
    导航级微加工旋转传感器系统

    公开(公告)号:US5987986A

    公开(公告)日:1999-11-23

    申请号:US903499

    申请日:1997-07-30

    IPC分类号: G01C19/56 G01P9/04

    摘要: An angular rate sensor provides a digital delta theta output signal. A drive member is formed of a single, silicon wafer having a pair of oppositely-facing planar surfaces. The drive member includes a frame and a drive member central portion connected to the frame and arranged to have rotational compliance between the frame and the central portion about an axis perpendicular to the planar surfaces of the silicon wafer. Drive signals are applied to a plurality of electrodes on the central portion to cause rotational oscillation of the drive member central portion about a drive axis perpendicular to the planar surfaces of the silicon wafer. A silicon sensing member is connected to the drive member. The sensing member has a central support member connected to the drive member central portion such that rotational oscillations of the drive member central portion are transmitted to the sensing member central portion. A sensing portion is connected to the sensing member central support member to allow the sensing portion to oscillate about the drive axis and to allow an input rotation rate about an axis perpendicular to the drive axis to produce out-of-plane oscillations of the sensing portions. Signal processing apparatus is connected to the sensing portion for producing a signal indicative of the input rotational rate as a function of the amplitude of the out-of-plane oscillations of the sensing portion.

    摘要翻译: 角速率传感器提供数字deltaθ输出信号。 驱动构件由具有一对相对的平面的单个硅晶片形成。 驱动构件包括框架和连接到框架的驱动构件中心部分,并且布置成围绕垂直于硅晶片的平面的轴线具有框架和中心部分之间的旋转顺应性。 驱动信号被施加到中心部分上的多个电极,以使得驱动构件中心部分围绕垂直于硅晶片平面的驱动轴的旋转振荡。 硅感测构件连接到驱动构件。 感测构件具有连接到驱动构件中心部分的中心支撑构件,使得驱动构件中心部分的旋转振动被传递到感测构件中心部分。 感测部分连接到感测构件中心支撑构件,以允许感测部分围绕驱动轴线振荡并且允许围绕垂直于驱动轴线的轴的输入旋转速率产生感测部分的平面外振荡 。 信号处理装置连接到感测部分,用于产生表示作为感测部分的平面外振荡幅度的函数的输入转速的信号。

    Signal processing system for inertial sensor
    12.
    发明授权
    Signal processing system for inertial sensor 失效
    惯性传感器信号处理系统

    公开(公告)号:US5983718A

    公开(公告)日:1999-11-16

    申请号:US892252

    申请日:1997-07-14

    CPC分类号: G01C19/5705 G01C19/5776

    摘要: A dithered Coriolis acceleration sensor system has a proof mass that is free of feedback in the accelerometer servo loop at the dither frequency by totally notching out all feedback torque at this frequency. The proof mass relative motion is then a direct measure of the rate because there is no feedback torque to alter the proof mass response to the acceleration. The feedback modulation system according to the invention captures the Coriolis-sensor output such that the phase and gain of the signal generated from the sensor are of no concern in maintaining good scale factor.

    摘要翻译: 抖动的科里奥利加速度传感器系统具有通过在该频率下完全切断所有反馈转矩,以抖动频率在加速度计伺服回路中无反馈的证明质量。 因此,质量相对运动的质量是直接测量速率,因为没有反馈转矩来改变对加速度的质量响应。 根据本发明的反馈调制系统捕获科里奥利传感器输出,使得从传感器产生的信号的相位和增益在保持良好的比例因子方面是不必要的。

    Quadrature compensation technique for vibrating gyroscopes
    13.
    发明授权
    Quadrature compensation technique for vibrating gyroscopes 有权
    振动陀螺仪的正交补偿技术

    公开(公告)号:US06883361B2

    公开(公告)日:2005-04-26

    申请号:US10894539

    申请日:2004-07-20

    申请人: Stanley F. Wyse

    发明人: Stanley F. Wyse

    CPC分类号: G01C19/5719 G01C19/56

    摘要: Quadrature error occurs in vibrating gyroscopes because of manufacturing flaws that permit the sensing element (proof mass) to oscillate about an axis that is not orthogonal to the output axis. This creates an oscillation about the output axis that has a component of the sensing element's vibration acceleration. This output axis oscillation, which is in phase with the driven acceleration of the sensing element, is called quadrature torque since it is ninety degrees out of phase with the angular rate induced acceleration. In order to eliminate this output axis oscillation, the present invention generates sinusoidal forces on the dither mass by applying dc voltages on the dither mass pickoff electrodes. These forces create a counter dither motion about the output axis that cancels the output axis oscillation generated by the non-orthogonal dither axis.

    摘要翻译: 由于制造缺陷使得传感元件(检验质量)围绕不与输出轴正交的轴振荡,所以在振动陀螺仪中发生正交误差。 这产生了一个关于输出轴的振荡,其具有感测元件的振动加速度的分量。 与感应元件的驱动加速度相同的输出轴振荡被称为正交转矩,因为它与角速率感应加速度相差90度。 为了消除该输出轴振动,本发明通过在抖动质量传感电极上施加直流电压来产生抖动质量上的正弦力。 这些力产生关于输出轴的反抖动运动,其消除由非正交抖动轴产生的输出轴振动。

    Integrated accelerometer with resilient limit stops
    14.
    发明授权
    Integrated accelerometer with resilient limit stops 失效
    集成加速度计,带弹性极限挡块

    公开(公告)号:US5191794A

    公开(公告)日:1993-03-09

    申请号:US633260

    申请日:1990-12-24

    IPC分类号: G01P15/093 G01P15/13

    CPC分类号: G01P15/093 G01P15/132

    摘要: An integrated accelerometer includes features for minimizing the effects of foreseeable operational stresses. The accelerometer is of a type that includes a planar support base having an internal aperture for accommodating a hinged strut and limit stops for minimizing the travel of the shadow paddle portion of the strut. The limit stops are fabricated of material of suitable spring constant to provide an appropriate degree of "give" without degrading instrument performance or accuracy. Two-piece arrangements sandwich the hinges, thereby limiting flexure to an acceptable range. The predictable mechanical stresses resulting, for example, from thermal coefficient mismatches between the materials of the torquer coil and the strut are minimized by the use of a spacer intermediate the base and the coil. The spacer, fabricated of material whose thermal coefficient closely matches that of the pendulous mass is generally circular, and includes diametrically-opposed prongs on the upper and lower edges thereof, such arrangements of prongs being staggered by ninety degrees.

    摘要翻译: 集成的加速度计包括用于最小化可预见的操作应力的影响的特征。 加速度计是一种类型,其包括具有用于容纳铰接支柱的内孔的平面支撑基座,并且限制止挡件以最小化支柱的阴影桨部分的行进。 极限挡块由合适弹簧常数的材料制成,以提供适当程度的“给”而不降低仪器性能或精度。 两件式布置将铰链夹在中间,从而将弯曲限制在可接受的范围内。 通过使用在基座和线圈之间的间隔件,可以最大限度地减少由例如扭矩线圈和支柱的材料之间的热系数失配导致的可预测的机械应力。 由与其相匹配的材料制成的间隔件通常是圆形的,并且在其上边缘和下边缘上包括直径相对的尖头,这样的插脚布置成90度。

    Piezoelectric vibratory rate sensor
    15.
    发明授权
    Piezoelectric vibratory rate sensor 失效
    压电振动速率传感器

    公开(公告)号:US5056366A

    公开(公告)日:1991-10-15

    申请号:US456532

    申请日:1989-12-26

    IPC分类号: G01C19/5607

    CPC分类号: G01C19/5607

    摘要: A vibrating rotation rate sensor of the type that includes a generally-planar, H-shaped frame of piezoelectric material such as quartz. A first set of drive electrodes is fixed to a pair of upper tines and a second set of pickoff electrodes is fixed to a pair of lower tines. An array of control electrodes is fixed to the upper tine pair adjacent the cross-piece of the H-shaped frame. The control electrodes permit the application of control signals for nulling Coriolis-induced out-of-plane vibration of the upper tines allowing use of a resonant frame.

    Counterbalanced triaxial multisensor with resonant accelerometers
    16.
    发明授权
    Counterbalanced triaxial multisensor with resonant accelerometers 失效
    具有谐振加速度计的平衡三轴多传感器

    公开(公告)号:US5932803A

    公开(公告)日:1999-08-03

    申请号:US904923

    申请日:1997-08-01

    申请人: Stanley F. Wyse

    发明人: Stanley F. Wyse

    CPC分类号: G01C19/5705 G01C19/5783

    摘要: A multisensor of the type that employs counteroscillating rotor-mounted accelerometers to measure both linear and Coriolis accelerations operates open loop to sense linear acceleration and closed loop to sense the Coriolis acceleration from angular rate inputs. Accelerometers mounted to arms of the counteroscillating rotors are designed so that the natural frequency of the proofmass with respect to the accelerometer frame closely approximates the resonant frequency .omega..sub.D of the driven rotor pair. A robust hinge design permits open loop operation for low frequency linear acceleration inputs without saturation. Low voltage closed-loop operation is made possible by the highly compliant nature of the resonant structure in responding to the much higher frequency Coriolis accelerations generated by angular rate inputs.

    摘要翻译: 采用反向旋转式转子加速度计测量线性和科里奥利加速度的多传感器操作开环以感测线性加速度和闭环,以从角速率输入中感测科里奥利加速度。 安装在反摆动转子的臂上的加速度计被设计成使得校样件相对于加速度计框架的固有频率紧密地接近从动转子对的谐振频率ωD。 强大的铰链设计允许低饱和度的低频线性加速输入的开环操作。 通过谐振结构的高度兼容性能来响应由角速率输入产生的高得多的科里奥利加速度,可以实现低电压闭环操作。

    Data interface for closed-loop accelerometer
    17.
    发明授权
    Data interface for closed-loop accelerometer 失效
    闭环加速度计数据接口

    公开(公告)号:US5604308A

    公开(公告)日:1997-02-18

    申请号:US589578

    申请日:1996-01-22

    IPC分类号: G01P15/00 G01P15/13

    CPC分类号: G01P15/13

    摘要: A digital circuit for adapting the output of a closed-loop accelerometer to a utilization circuit where the cycle time of the rebalance loop of the accelerometer is unrelated to the cycle time of the utilization circuit. A register receives and stores a digital value representative of measured acceleration and a bank of serially-arranged divide-by-two counters accepts the output of the rebalance loop clock. A gate arrangement makes one-by-one correlations between the states of the register and the outputs of the divide-by-two counters. A trigger circuit receives the gate outputs, providing a pulse when triggered by a downgoing edge of a square wave output of the gate array. A counter receives the pulse stream and is gated, in turn, in accordance with the cycle time of the utilization circuit so that the accelerometer data employed therein is representative of the portion of the acceleration occurring during a cycle of the utilization circuit.

    摘要翻译: 一种用于将闭环加速度计的输出适配到利用电路的数字电路,其中加速度计的重新平衡环路的周期时间与利用电路的周期时间无关。 寄存器接收并存储表示测量加速度的数字值,并且串行排列的二位计数器的存储体接受重新平衡环路时钟的输出。 门阵列在寄存器的状态和分频计数器的输出之间形成一个一个的相关性。 触发电路接收栅极输出,当由栅极阵列的方波输出的下降沿触发时提供脉冲。 计数器接收脉冲流,并且根据利用电路的周期时间进行选通,使得其中使用的加速度计数据代表在利用电路的周期期间发生的加速度的部分。

    Accelerometer using pulse-on-demand control
    18.
    发明授权
    Accelerometer using pulse-on-demand control 失效
    加速度计采用脉冲按需控制

    公开(公告)号:US5473946A

    公开(公告)日:1995-12-12

    申请号:US304090

    申请日:1994-09-09

    IPC分类号: G01P15/125 G01P15/13

    CPC分类号: G01P15/125 G01P15/131

    摘要: A force balanced accelerometer system comprises an accelerometric sensor and a control system. The sensor comprises a conductive pendulum pivotably mounted between first and second electrode plates. The control system establishes a cycle period with three phases. In the first phase, the pendulum is electrically isolated in an electric field established between the electrodes. The pendulum is moved from a null position in response to inertial acceleration, and a pickoff signal indicative of the acceleration-responsive position is generated. The pickoff signal is fed into a sample-and-hold circuit and then into a servo compensation circuit, having proportional and integral control, so as to generate a force-indicative signal indicative of the magnitude and direction of the force required to restore the pendulum to the null position. At the start of the second phase, the electrode required to restore the pendulum to its null position, selected in accordance with the sign of the force-indicative signal, is maintained at a first fixed potential, while the pendulum and the other plate are switched to a second fixed potential. The second phase is maintained for a time period determined by the magnitude of the force-indicative signal, which time period is a measure of the sensed acceleration. At the end of the second phase, the third phase begins with the electrodes and pendulum switched to ground, until the cycle repeats. The cycle period and the timing of the phases are controlled by a microprocessor.

    摘要翻译: 力平衡加速度计系统包括加速度传感器和控制系统。 传感器包括可枢转地安装在第一和第二电极板之间的导电摆。 控制系统建立了三个循环周期。 在第一阶段中,摆锤在电极之间建立的电场中被电隔离。 响应于惯性加速度,摆动从空位移动,并且产生指示加速度响应位置的检测信号。 拾取信号被馈送到采样保持电路中,然后被馈送到具有比例和积分控制的伺服补偿电路中,以便产生指示恢复摆锤所需力的大小和方向的力指示信号 到零位置。 在第二阶段开始时,根据力指示信号的符号将摆动恢复到其零位所需的电极保持在第一固定电位,而摆和另一个板被切换 达到第二固定电位。 第二阶段被维持在由力指示信号的大小确定的时间段内,该时间周期是感测加速度的量度。 在第二阶段结束时,第三阶段开始于电极和摆锤切换到地面,直到循环重复。 循环周期和相位的定时由微处理器控制。

    Vibrating mass gyroscope and method for minimizing bias errors therein
    19.
    发明授权
    Vibrating mass gyroscope and method for minimizing bias errors therein 有权
    振动质量陀螺仪及其中偏差误差最小化的方法

    公开(公告)号:US07188523B2

    公开(公告)日:2007-03-13

    申请号:US11364318

    申请日:2006-02-28

    IPC分类号: G01C19/00 G01P21/00

    CPC分类号: G01C19/5719

    摘要: An exemplary vibrating mass gyroscope uses a mass disposed for movement along an x-axis and y-axis. First and second electrodes are disposed adjacent surfaces of the mass along an x-axis and y-axis. Circuitry, coupled to the first and second electrodes, provides during a first mode a dither driving voltage on one of the first and second electrodes causing vibrating displacement of the mass along the one of the x-axis and y-axis. The measurement voltage is sensed on the other of the first and second electrodes where the measurement voltage represents a first angular rate value. During a second mode, the circuitry provides a dither driving voltage on the other of the first and second electrodes causing vibrating displacement of the mass along the other of the x-axis and y-axis and measurement voltage is sensed on the one of the first and second electrodes where the measurement voltage represents a second angular rate value. A combiner coupled to the circuitry receives the first and second angular rate values, and generates a resulting angular rate value based on both the first and second angular rate values wherein common bias errors are canceled. The common bias errors cancel because the pickoff sensing axis is coincident with the forcing axis when the same electrode is used for both the forcing and for the pickoff.

    摘要翻译: 示例性振动质量陀螺仪使用设置为沿着x轴和y轴移动的质量。 第一和第二电极沿着x轴和y轴设置在质量块的相邻表面。 耦合到第一和第二电极的电路在第一模式期间提供在第一和第二电极之一上的抖动驱动电压,引起质量沿x轴和y轴中的一个的振动位移。 在测量电压表示第一角速度值的第一和第二电极中的另一个电极上检测测量电压。 在第二模式期间,电路在第一和第二电极的另一个上提供抖动驱动电压,引起质量沿x轴和y轴的另一个的振动位移,并且在第一和第二电极之一上检测测量电压 以及测量电压表示第二角速度值的第二电极。 耦合到电路的组合器接收第一和第二角速度值,并且基于消除常见偏差误差的第一和第二角速度值产生所得到的角速率值。 当相同的电极用于强制和拾取时,传感偏差误差取消,因为传感轴与强制轴一致。

    Signal processing system for inertial sensor
    20.
    发明授权
    Signal processing system for inertial sensor 有权
    惯性传感器信号处理系统

    公开(公告)号:US06324909B1

    公开(公告)日:2001-12-04

    申请号:US09431311

    申请日:1999-11-02

    IPC分类号: G01P904

    CPC分类号: G01C19/5705 G01C19/5776

    摘要: A dithered Coriolis acceleration sensor system has a proof mass that is free of feedback in the accelerometer servo loop at the dither frequency by totally notching out all feedback torque at this frequency. The proof mass relative motion is then a direct measure of the rate because there is no feedback torque to alter the proof mass response to the acceleration. The feedback modulation system according to the invention captures the Coriolis-sensor output such that the phase and gain of the signal generated from the sensor are of no concern in maintaining good scale factor.

    摘要翻译: 抖动的科里奥利加速度传感器系统具有通过在该频率下完全切断所有反馈转矩,以抖动频率在加速度计伺服回路中无反馈的证明质量。 因此,质量相对运动的质量是直接测量速率,因为没有反馈转矩来改变对加速度的质量响应。 根据本发明的反馈调制系统捕获科里奥利传感器输出,使得从传感器产生的信号的相位和增益在保持良好的比例因子方面是不必要的。