公开(公告)号：US20220155349A1

公开(公告)日：2022-05-19

申请号：US17591374

申请日：2022-02-02

Applicant: Technoprobe, S.p.A.

Inventor： Flavio MAGGIONI

IPC: G01R1/073 ,  G01R3/00 ,  G01R31/28

Abstract: A probe head adapted to verify the operation of a device to be tested integrated on a semiconductor wafer comprises at least one guide provided with a plurality of guide holes adapted to house a plurality of contact probes. Conveniently, the guide is made of a material suitable for manufacturing integrated circuits and comprises circuit components integrated therein, such guide being an electronically active element of the probe head.

公开(公告)号：US20210270869A1

公开(公告)日：2021-09-02

申请号：US17325783

申请日：2021-05-20

Applicant: TECHNOPROBE S.P.A.

Inventor： Flavio MAGGIONI

IPC: G01R1/073 ,  G01R1/067

Abstract: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer includes a plurality of contact elements, each including a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements. The guide includes a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.

公开(公告)号：US20200271692A1

公开(公告)日：2020-08-27

申请号：US16870794

申请日：2020-05-08

Applicant: Technoprobe S.p.A.

Inventor： Roberto CRIPPA ,  Flavio MAGGIONI ,  Andrea CALAON

IPC: G01R1/073

Abstract: A contact probe for a testing head of an apparatus for testing electronic devices comprises a body extending along a longitudinal axis between a first end portion and a second end portion, the second end portion being adapted to contact pads of a device under test. Suitably, the contact probe comprises a first section, which extends along the longitudinal axis from the first end portion and is made of an electrically non-conductive material, and a second section, which extends along the longitudinal axis from the second end portion up to the first section, the second section being electrically conductive and extending over a distance less than 1000 μm.