公开(公告)号：US20190056320A1

公开(公告)日：2019-02-21

申请号：US16107580

申请日：2018-08-21

Applicant: Tokyo Electron Limited

Inventor： Ivan MALEEV ,  Mihail MIHAYLOV ,  Hanyou CHU ,  Ching-Ling MENG ,  Qionglin GAO ,  Yan CHEN ,  Xinkang TIAN

IPC: G01N21/41 ,  H01L21/67 ,  H01L21/02

Abstract: An apparatus and a method for in-situ phase determination are provided. The apparatus includes a measurement chamber configured to retain a substance, and an entrance window mounted on a side of the measurement chamber. An exit window is mounted on an opposite side of the measurement chamber, and the exit window is parallel with the entrance window. The apparatus further includes a light source configured to generate an incident light beam. The incident light beam is directed to the entrance window at a non-zero angle of incidence with respect to a normal of the entrance window. The incident light beam passes through the entrance window, the measurement chamber and the exit window to form an output light beam. A detector is positioned under the exit window and configured to collect the output light beam passing through the exit window and generate measurement data.