-
11.发明申请公开(公告)号：US20090310255A1
公开(公告)日：2009-12-17
申请号：US12457194
申请日：2009-06-03
IPC分类号： G11B5/127
摘要： A highly reliable magnetic recording medium is provided which has a recording layer formed in a concavo-convex pattern and wherein the recording layer is unlikely to cause a change in magnetic properties. The magnetic recording medium includes a substrate, a recording layer formed in a predetermined concavo-convex pattern over the substrate, convex portions of the concavo-convex pattern serving as recording elements; and a filler portion filling a concave portion between the recording elements. The filler portion comprises a metal-based main filler material and oxygen. Oxygen is unevenly distributed in the filler portion so that the ratio of the number of oxygen atoms to the total of the number of atoms of the main filler material and the number of oxygen atoms is greater in an upper surface portion of the filler portion than in a lower portion of the filler portion.
摘要翻译： 提供了一种高度可靠的磁记录介质，其具有形成为凹凸图案的记录层，并且其中记录层不太可能导致磁性变化。 磁记录介质包括基板，在基板上形成为预定的凹凸图案的记录层，作为记录元件的凹凸图案的凸部; 以及填充部分填充记录元件之间的凹部。 填料部分包括金属基填料和氧气。 氧气在填料部分中不均匀分布，使得填料部分的上表面部分中的氧原子数与主填料材料的原子数和氧原子数的总和的比例大于在 填充部分的下部。
-
公开(公告)号：US20090242508A1
公开(公告)日：2009-10-01
申请号：US12382653
申请日：2009-03-20
IPC分类号： B44C1/22
摘要： A filling material different from a first mask layer (temporary coating material) is deposited over a workpiece to fill concave portions. At least part of excess portions of the filling material is removed by a dry etching method such that at least part of the side surfaces of the first mask layer over recording elements are exposed. Then, the first mask layer is removed by a dry etching method which uses a reactive gas having the property of chemically reacting with and removing both the filling material and the first mask layer as a processing gas and in which an etching rate for the first mask layer is higher than that for the filling material, and the etching rate for the filling material is higher than that for a recording layer (a lower layer that is in contact with a lower surface of the first mask layer over recording elements).
摘要翻译： 不同于第一掩模层（临时涂层材料）的填充材料沉积在工件上以填充凹部。 通过干蚀刻方法去除填充材料的多余部分的至少一部分，使得第一掩模层的超过记录元件的侧表面的至少一部分被暴露。 然后，通过干式蚀刻法除去第一掩模层，该干蚀刻方法使用具有与填充材料和第一掩模层化学反应的特性的反应气体作为处理气体，并且其中第一掩模的蚀刻速率 层高于填充材料的蚀刻速率，并且对于记录层（与记录元件上的第一掩模层的下表面接触的下层）的填充材料的蚀刻速率高。
-
13.发明申请公开(公告)号：US20060063042A1
公开(公告)日：2006-03-23
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： G11B5/706
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译： 提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料， 形成在非磁性材料的凹部的底面的非磁性材料形成的磁性层16形成在凹凸图案的凸部上，凸部和凹部的表面基本平坦化 ，非磁性层16的厚度为1nm以下。
-
14.发明申请Method for processing work piece including magnetic material and method for manufacturing magnetic recording medium 审中-公开用于处理包括磁性材料的工件的方法和用于制造磁记录介质的方法公开(公告)号：US20050060874A1
公开(公告)日：2005-03-24
申请号：US10892373
申请日：2004-07-16
申请人： Mikiharu Hibi , Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa
发明人： Mikiharu Hibi , Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa
CPC分类号： G11B5/84 , G11B5/3163 , H01F41/14 , Y10T29/49043
摘要： A method for processing a work piece including a magnetic material and a method for manufacturing a magnetic recording medium. With the use of these methods, the magnetic recording medium with fine magnetic properties, magnetic recording and reproducing equipment, and the like are efficiently manufactured by processing the work piece including the magnetic material by use of an oxidizing reactive gas and then certainly removing the oxidizing reactive gas. An NH3 gas (a non-oxidized gas including hydrogen elements) is used as a cleaning gas. The cleaning gas is turned into plasma, and then a work piece is dry cleaned by use of the cleaning gas.
摘要翻译： 一种用于处理包括磁性材料的工件的方法和用于制造磁记录介质的方法。 通过使用这些方法，通过使用氧化反应气体处理包括磁性材料的工件，然后确定地除去氧化物，有效地制造具有良好磁性能的磁记录介质，磁记录和再现设备等 反应气体。 使用NH 3气体（包含氢元素的非氧化气体）作为清洁气体。 将清洁气体变成等离子体，然后通过使用清洁气体干燥工件。
-
15.发明授权公开(公告)号：US08124255B2
公开(公告)日：2012-02-28
申请号：US12457194
申请日：2009-06-03
IPC分类号： G11B5/65
摘要： A highly reliable magnetic recording medium is provided which has a recording layer formed in a concavo-convex pattern and wherein the recording layer is unlikely to cause a change in magnetic properties. The magnetic recording medium includes a substrate, a recording layer formed in a predetermined concavo-convex pattern over the substrate, convex portions of the concavo-convex pattern serving as recording elements; and a filler portion filling a concave portion between the recording elements. The filler portion comprises a metal-based main filler material and oxygen. Oxygen is unevenly distributed in the filler portion so that the ratio of the number of oxygen atoms to the total of the number of atoms of the main filler material and the number of oxygen atoms is greater in an upper surface portion of the filler portion than in a lower portion of the filler portion.
摘要翻译： 提供了一种高度可靠的磁记录介质，其具有形成为凹凸图案的记录层，并且其中记录层不太可能导致磁性变化。 磁记录介质包括基板，在基板上形成为预定的凹凸图案的记录层，作为记录元件的凹凸图案的凸部; 以及填充部分填充记录元件之间的凹部。 填料部分包括金属基填料和氧气。 氧气不均匀地分布在填料部分中，使得填料部分的上表面部分中的氧原子数与主填料材料的原子数和氧原子数的总和的比例大于在 填充部分的下部。
-
公开(公告)号：US07740903B2
公开(公告)日：2010-06-22
申请号：US11708595
申请日：2007-02-21
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
摘要： A method for manufacturing magnetic recording media is provided, by which a magnetic recording medium that has a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and good recording/reproducing properties can be manufactured. The method includes the steps of: depositing a first filling material over a workpiece to cover recording elements formed as convex portions of the concavo-convex pattern, and to fill at least part of a concave portion; depositing a detection material over the first filling material; depositing a second filling material over the detection material; and irradiating a surface of the workpiece with a process gas to flatten the surface. In the flattening step, a component of the detection material removed from and flying off the workpiece is detected to stop the irradiation with the process gas based on a result of detecting the component of the detection material.
摘要翻译： 提供一种制造磁记录介质的方法，通过该方法可以制造具有形成为凹凸图案的记录层，足够平坦的表面和良好的记录/再现特性的磁记录介质。 该方法包括以下步骤：在工件上沉积第一填充材料以覆盖形成为凹凸图案的凸部的记录元件，并填充凹部的至少一部分; 在第一填充材料上沉积检测材料; 在所述检测材料上沉积第二填充材料; 并用工艺气体照射工件的表面以使表面变平。 在平坦化步骤中，基于检测到检测材料的成分的结果，检测出从工件移除并从工件飞离的检测材料的成分，停止用处理气体的照射。
-
17.发明授权公开(公告)号：US07538041B2
公开(公告)日：2009-05-26
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： H01L21/302
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译： 提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，并且非磁性 形成在非磁性材料的凹部的底面的非磁性材料形成的层16形成在凹凸图案的凸部上，同时凸部和凹部的表面基本平坦化， 非磁性层16的厚度为1nm以下。
-
公开(公告)号：US07378029B2
公开(公告)日：2008-05-27
申请号：US11059487
申请日：2005-02-17
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
IPC分类号： G11B3/70
摘要： A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.
摘要翻译： 提供了一种用于制造磁记录介质的方法，通过该方法，有效地制造具有以凹凸图案形成的记录层，足够平坦表面和高记录和再现精度的磁记录介质。 在非磁性材料填充步骤中，非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以用非磁性材料填充凹凸图案的凹部。 在平坦化步骤中，通过干蚀刻除去记录层上方的非磁性材料的过量部分，使记录层和非磁性材料的表面平坦化。 设定处理条件，以便在平坦化步骤中，相对于干蚀刻，记录层的蚀刻速率基本上使非磁性材料的蚀刻速率相等。
-
19.发明授权公开(公告)号：US07300595B2
公开(公告)日：2007-11-27
申请号：US11015670
申请日：2004-12-20
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.
摘要翻译： 用于填充凹凸图案的凹部的方法，通过该凹凸图案填充凹凸图案的凹部以可靠地使表面平坦化的方法，以及制造磁记录介质的方法，通过该方法具有 可以有效地制造具有足够平坦表面的凹凸图案的磁记录层。 用于填充凹部的填充剂沉积在待处理物体的表面上，该物体具有凹凸图案。 在填料上进一步沉积包层。 然后，通过使用对填料具有较低蚀刻速率的干式蚀刻方法，除去填充物的多余部分和物体表面上方的包层以进行平坦化。
-
公开(公告)号：US20050196650A1
公开(公告)日：2005-09-08
申请号：US11065142
申请日：2005-02-24
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
CPC分类号： G11B5/855 , Y10T428/24355 , Y10T428/24479 , Y10T428/24488 , Y10T428/24537 , Y10T428/2457
摘要： A magnetic recording medium includes at least a disk substrate 1, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1, and a non-magnetic layer 6 formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer 5 or the non-magnetic layer 6. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width (W1 or W2) is made smaller than width W5 of each convex portion of the magnetic recording layer 5 or width W6 of each concave portion where the non-magnetic layer 6 is formed.
摘要翻译： 磁记录介质至少包括盘基板1，在盘基板1上形成有预定的凹凸图案的磁记录层5以及形成在凹凸图案的凹部中的非磁性层6。 在磁记录层5或非磁性层6上形成由非磁性材料形成的凸形。每个凸形形成为例如上表面宽度（W 1或W 2）的山形 ）被制成小于磁记录层5的每个凸部的宽度W 5或形成非磁性层6的每个凹部的宽度W 6。
-
-
-
-
-
-
-
-
-
搜索结果
62 条记录 (耗时 0.035 秒)
