-
1.发明申请公开(公告)号：US20090310255A1
公开(公告)日：2009-12-17
申请号：US12457194
申请日：2009-06-03
IPC分类号： G11B5/127
摘要： A highly reliable magnetic recording medium is provided which has a recording layer formed in a concavo-convex pattern and wherein the recording layer is unlikely to cause a change in magnetic properties. The magnetic recording medium includes a substrate, a recording layer formed in a predetermined concavo-convex pattern over the substrate, convex portions of the concavo-convex pattern serving as recording elements; and a filler portion filling a concave portion between the recording elements. The filler portion comprises a metal-based main filler material and oxygen. Oxygen is unevenly distributed in the filler portion so that the ratio of the number of oxygen atoms to the total of the number of atoms of the main filler material and the number of oxygen atoms is greater in an upper surface portion of the filler portion than in a lower portion of the filler portion.
摘要翻译： 提供了一种高度可靠的磁记录介质，其具有形成为凹凸图案的记录层，并且其中记录层不太可能导致磁性变化。 磁记录介质包括基板，在基板上形成为预定的凹凸图案的记录层，作为记录元件的凹凸图案的凸部; 以及填充部分填充记录元件之间的凹部。 填料部分包括金属基填料和氧气。 氧气在填料部分中不均匀分布，使得填料部分的上表面部分中的氧原子数与主填料材料的原子数和氧原子数的总和的比例大于在 填充部分的下部。
-
公开(公告)号：US20090242508A1
公开(公告)日：2009-10-01
申请号：US12382653
申请日：2009-03-20
IPC分类号： B44C1/22
摘要： A filling material different from a first mask layer (temporary coating material) is deposited over a workpiece to fill concave portions. At least part of excess portions of the filling material is removed by a dry etching method such that at least part of the side surfaces of the first mask layer over recording elements are exposed. Then, the first mask layer is removed by a dry etching method which uses a reactive gas having the property of chemically reacting with and removing both the filling material and the first mask layer as a processing gas and in which an etching rate for the first mask layer is higher than that for the filling material, and the etching rate for the filling material is higher than that for a recording layer (a lower layer that is in contact with a lower surface of the first mask layer over recording elements).
摘要翻译： 不同于第一掩模层（临时涂层材料）的填充材料沉积在工件上以填充凹部。 通过干蚀刻方法去除填充材料的多余部分的至少一部分，使得第一掩模层的超过记录元件的侧表面的至少一部分被暴露。 然后，通过干式蚀刻法除去第一掩模层，该干蚀刻方法使用具有与填充材料和第一掩模层化学反应的特性的反应气体作为处理气体，并且其中第一掩模的蚀刻速率 层高于填充材料的蚀刻速率，并且对于记录层（与记录元件上的第一掩模层的下表面接触的下层）的填充材料的蚀刻速率高。
-
公开(公告)号：US20090101624A1
公开(公告)日：2009-04-23
申请号：US12285935
申请日：2008-10-16
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： A method for efficiently manufacturing a magnetic recording medium by filling concave portions of a concavo-convex patterned recording layer with a filler to provide sufficient surface flatness is provided. A cladding is etched by a dry etching method in which an etch rate of the cladding is equal to or higher than an etch rate of the filler. Then, by dry etching method in which an etch rate of the filler is higher than that of the cladding, the filler is etched so that a top surface of a diaphragm over a recording element (or a top surface of the recording element in absence of the diaphragm) is exposed, and the cladding remains over the concave portion of the concavo-convex pattern of the recording layer.
摘要翻译： 提供一种通过用填充物填充凹凸图案记录层的凹部来有效地制造磁记录介质以提供足够的表面平坦度的方法。 通过干蚀刻方法蚀刻包层，其中包层的蚀刻速率等于或高于填料的蚀刻速率。 然后，通过干式蚀刻方法，其中填料的蚀刻速率高于包层的蚀刻速率，对填料进行蚀刻，使得隔膜的上表面在记录元件上（或记录元件的顶表面上， 隔膜）暴露，并且包层保留在记录层的凹凸图案的凹部上。
-
4.发明授权公开(公告)号：US08124255B2
公开(公告)日：2012-02-28
申请号：US12457194
申请日：2009-06-03
IPC分类号： G11B5/65
摘要： A highly reliable magnetic recording medium is provided which has a recording layer formed in a concavo-convex pattern and wherein the recording layer is unlikely to cause a change in magnetic properties. The magnetic recording medium includes a substrate, a recording layer formed in a predetermined concavo-convex pattern over the substrate, convex portions of the concavo-convex pattern serving as recording elements; and a filler portion filling a concave portion between the recording elements. The filler portion comprises a metal-based main filler material and oxygen. Oxygen is unevenly distributed in the filler portion so that the ratio of the number of oxygen atoms to the total of the number of atoms of the main filler material and the number of oxygen atoms is greater in an upper surface portion of the filler portion than in a lower portion of the filler portion.
摘要翻译： 提供了一种高度可靠的磁记录介质，其具有形成为凹凸图案的记录层，并且其中记录层不太可能导致磁性变化。 磁记录介质包括基板，在基板上形成为预定的凹凸图案的记录层，作为记录元件的凹凸图案的凸部; 以及填充部分填充记录元件之间的凹部。 填料部分包括金属基填料和氧气。 氧气不均匀地分布在填料部分中，使得填料部分的上表面部分中的氧原子数与主填料材料的原子数和氧原子数的总和的比例大于在 填充部分的下部。
-
5.发明申请Magnetic recording medium, magnetic recording and reproducing apparatus, and method for manufacturing magnetic recording medium 审中-公开磁记录介质，磁记录和再现装置以及磁记录介质的制造方法公开(公告)号：US20090168244A1
公开(公告)日：2009-07-02
申请号：US12314996
申请日：2008-12-19
摘要： The magnetic recording medium includes: a substrate; a recording layer formed in a predetermined concavo-convex pattern over the substrate, the concavo-convex pattern including a convex portion that serves as a recording element; and a filling portion that fills a concave portion between the recording elements. The filling portion comprises a metal-based main filling material and nitrogen. Nitrogen is unevenly distributed in the filling portion such that the ratio of the number of nitrogen atoms to the total number of atoms of the main filling material and nitrogen atoms is greater in the upper surface portion of the filling portion than in the lower portion thereof.
摘要翻译： 磁记录介质包括：基板; 在基板上形成为预定的凹凸图案的记录层，所述凹凸图案包括用作记录元件的凸部; 以及填充部分，其填充记录元件之间的凹部。 填充部分包括基于金属的主填充材料和氮气。 氮在填充部分中不均匀地分布，使得填充部分的上表面部分中的氮原子数与主填充材料和氮原子的总原子数之比大于其下部。
-
公开(公告)号：US20110024388A1
公开(公告)日：2011-02-03
申请号：US12842502
申请日：2010-07-23
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A method for manufacturing a magnetic recording medium is provided which can sufficiently reduce variations in surface roughness even in the simultaneous presence of a region of a relatively wide concave and convex portion and a region of a relatively narrow concave and convex portion in the recording layer. The method includes the steps of etching a recording layer based on a (first) mask layer to process it in a concavo-convex pattern, and depositing a filler over the recording layer and the mask layer to fill a concave portion with the filler. In between those steps, provided is the step of removing part of the first mask layer over a recording element (a convex portion of the recording layer) by dry etching in which an etching rate for the mask layer is higher than that for the recording layer so that the mask layer remains over the recording element.
摘要翻译： 提供了一种用于制造磁记录介质的方法，即使在相对较宽的凹凸部分的区域和记录层中相对窄的凹凸部分的区域同时存在的情况下，也可以充分减小表面粗糙度的变化。 该方法包括以下步骤：基于（第一）掩模层蚀刻记录层，以凹凸图案处理该记录层;以及在记录层和掩模层上沉积填料以填充填料的凹部。 在这些步骤之间，提供了通过干蚀刻在记录元件（记录层的凸部）上去除部分第一掩模层的步骤，其中掩模层的蚀刻速率高于记录层的蚀刻速率 使得掩模层保留在记录元件上。
-
公开(公告)号：US07247251B2
公开(公告)日：2007-07-24
申请号：US11050769
申请日：2005-02-07
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
IPC分类号： H01F1/00
摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.
摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括以凹凸图案形成的记录层的磁记录介质，具有足够平坦的表面，并且提供良好的记录和再现精度。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，从而用非磁性填充凹凸图案的凹部 材料; 以及通过离子束蚀刻去除记录层上方的非磁性材料的剩余部分的平坦化步骤，以使非磁性层和记录层的表面变平。
-
公开(公告)号：US07225528B2
公开(公告)日：2007-06-05
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。
-
9.发明申请Magnetic recording medium, magnetic recording and reproducing apparatus, and method for manufacturing magnetic recording medium 审中-公开磁记录介质，磁记录和再现装置以及磁记录介质的制造方法公开(公告)号：US20060292400A1
公开(公告)日：2006-12-28
申请号：US11472419
申请日：2006-06-22
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
CPC分类号： G11B5/855
摘要： A magnetic recording medium that includes a recording layer formed in a predetermined concavo-convex pattern in which recording elements are formed as convex portions, has high areal density, cannot cause crash of a magnetic head easily, and has high reliability, and a magnetic recording and reproducing apparatus including that magnetic recording medium are provided. The magnetic recording medium includes: the recording elements formed as the convex portions of the recording layer formed in a predetermined concavo-convex pattern over a substrate; and a filling material with which a concave portion between the recording elements is filled. The surface roughness of a portion of a surface of the medium above the filling material is larger than that of portions of the surface above the recording elements.
摘要翻译： 包括以预定的凹凸图案形成的记录层的磁记录介质，其中记录元件形成为凸部，具有高的面密度，不容易使磁头发生碰撞，并且具有高可靠性，并且磁记录 并且提供包括该磁记录介质的再现装置。 磁记录介质包括：记录元件，形成为在衬底上以预定的凹凸图案形成的记录层的凸部; 以及填充有记录元件之间的凹部的填充材料。 在填充材料之上的介质的表面的一部分的表面粗糙度大于记录元件上方表面的部分的表面粗糙度。
-
10.发明授权Magnetic recording medium including disk substrate, magnetic layer, and non-magnetic layer 失效包括磁盘基片，磁性层和非磁性层的磁记录介质公开(公告)号：US07438982B2
公开(公告)日：2008-10-21
申请号：US11065142
申请日：2005-02-24
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
CPC分类号： G11B5/855 , Y10T428/24355 , Y10T428/24479 , Y10T428/24488 , Y10T428/24537 , Y10T428/2457
摘要： A magnetic recording medium includes at least a disk substrate, a magnetic recording layer formed with a predetermined concavo-convex pattern on the disk substrate, and a non-magnetic layer formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer or the non-magnetic layer. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width is made smaller than a width of each convex portion of the magnetic recording layer or a width of each concave portion where the non-magnetic layer 6 is formed.
摘要翻译： 磁记录介质至少包括盘基片，在盘基片上形成有预定的凹凸图案的磁记录层，以及形成在凹凸图案的凹部中的非磁性层。 在磁记录层或非磁性层上形成由非磁性材料制成的凸形。 每个凸形形成为例如其上表面宽度小于磁记录层的每个凸部的宽度或形成非磁性层6的每个凹部的宽度的山形形状 。
-
-
-
-
-
-
-
-
-
搜索结果
62 条记录 (耗时 0.022 秒)
