公开(公告)号：US07247251B2

公开(公告)日：2007-07-24

申请号：US11050769

申请日：2005-02-07

申请人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

发明人： Kazuhiro Hattori ,  Shuichi Okawa ,  Takahiro Suwa ,  Mikiharu Hibi

IPC分类号： H01F1/00

CPC分类号： G11B5/855 ,  H01F41/32

摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.

摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括以凹凸图案形成的记录层的磁记录介质，具有足够平坦的表面，并且提供良好的记录和再现精度。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，从而用非磁性填充凹凸图案的凹部 材料; 以及通过离子束蚀刻去除记录层上方的非磁性材料的剩余部分的平坦化步骤，以使非磁性层和记录层的表面变平。

公开(公告)号：US07225528B2

公开(公告)日：2007-06-05

申请号：US10972325

申请日：2004-10-26

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/127 ,  H01R31/00

CPC分类号： G11B5/855 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.

摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。

公开(公告)号：US20060292400A1

公开(公告)日：2006-12-28

申请号：US11472419

申请日：2006-06-22

申请人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/64 ,  G11B5/65

CPC分类号： G11B5/855

摘要： A magnetic recording medium that includes a recording layer formed in a predetermined concavo-convex pattern in which recording elements are formed as convex portions, has high areal density, cannot cause crash of a magnetic head easily, and has high reliability, and a magnetic recording and reproducing apparatus including that magnetic recording medium are provided. The magnetic recording medium includes: the recording elements formed as the convex portions of the recording layer formed in a predetermined concavo-convex pattern over a substrate; and a filling material with which a concave portion between the recording elements is filled. The surface roughness of a portion of a surface of the medium above the filling material is larger than that of portions of the surface above the recording elements.

摘要翻译： 包括以预定的凹凸图案形成的记录层的磁记录介质，其中记录元件形成为凸部，具有高的面密度，不容易使磁头发生碰撞，并且具有高可靠性，并且磁记录 并且提供包括该磁记录介质的再现装置。 磁记录介质包括：记录元件，形成为在衬底上以预定的凹凸图案形成的记录层的凸部; 以及填充有记录元件之间的凹部的填充材料。 在填充材料之上的介质的表面的一部分的表面粗糙度大于记录元件上方表面的部分的表面粗糙度。

公开(公告)号：US20090101624A1

公开(公告)日：2009-04-23

申请号：US12285935

申请日：2008-10-16

申请人： Takahiro Suwa ,  Narutoshi Fukuzawa ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Narutoshi Fukuzawa ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： B44C1/22

CPC分类号： G11B5/855

摘要： A method for efficiently manufacturing a magnetic recording medium by filling concave portions of a concavo-convex patterned recording layer with a filler to provide sufficient surface flatness is provided. A cladding is etched by a dry etching method in which an etch rate of the cladding is equal to or higher than an etch rate of the filler. Then, by dry etching method in which an etch rate of the filler is higher than that of the cladding, the filler is etched so that a top surface of a diaphragm over a recording element (or a top surface of the recording element in absence of the diaphragm) is exposed, and the cladding remains over the concave portion of the concavo-convex pattern of the recording layer.

摘要翻译： 提供一种通过用填充物填充凹凸图案记录层的凹部来有效地制造磁记录介质以提供足够的表面平坦度的方法。 通过干蚀刻方法蚀刻包层，其中包层的蚀刻速率等于或高于填料的蚀刻速率。 然后，通过干式蚀刻方法，其中填料的蚀刻速率高于包层的蚀刻速率，对填料进行蚀刻，使得隔膜的上表面在记录元件上（或记录元件的顶表面上， 隔膜）暴露，并且包层保留在记录层的凹凸图案的凹部上。

公开(公告)号：US07438982B2

公开(公告)日：2008-10-21

申请号：US11065142

申请日：2005-02-24

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

IPC分类号： G11B5/66 ,  G11B5/72

CPC分类号： G11B5/855 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24488 ,  Y10T428/24537 ,  Y10T428/2457

摘要： A magnetic recording medium includes at least a disk substrate, a magnetic recording layer formed with a predetermined concavo-convex pattern on the disk substrate, and a non-magnetic layer formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer or the non-magnetic layer. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width is made smaller than a width of each convex portion of the magnetic recording layer or a width of each concave portion where the non-magnetic layer 6 is formed.

摘要翻译： 磁记录介质至少包括盘基片，在盘基片上形成有预定的凹凸图案的磁记录层，以及形成在凹凸图案的凹部中的非磁性层。 在磁记录层或非磁性层上形成由非磁性材料制成的凸形。 每个凸形形成为例如其上表面宽度小于磁记录层的每个凸部的宽度或形成非磁性层6的每个凹部的宽度的山形形状 。

公开(公告)号：US20070195459A1

公开(公告)日：2007-08-23

申请号：US11708595

申请日：2007-02-21

申请人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/33 ,  G11B5/66 ,  G11B5/82

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/82

摘要： A method for manufacturing magnetic recording media is provided, by which a magnetic recording medium that has a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and good recording/reproducing properties can be manufactured. The method includes the steps of: depositing a first filling material over a workpiece to cover recording elements formed as convex portions of the concavo-convex pattern, and to fill at least part of a concave portion; depositing a detection material over the first filling material; depositing a second filling material over the detection material; and irradiating a surface of the workpiece with a process gas to flatten the surface. In the flattening step, a component of the detection material removed from and flying off the workpiece is detected to stop the irradiation with the process gas based on a result of detecting the component of the detection material.

摘要翻译： 提供一种制造磁记录介质的方法，通过该方法可以制造具有形成为凹凸图案的记录层，足够平坦的表面和良好的记录/再现特性的磁记录介质。 该方法包括以下步骤：在工件上沉积第一填充材料以覆盖形成为凹凸图案的凸部的记录元件，并填充凹部的至少一部分; 在第一填充材料上沉积检测材料; 在所述检测材料上沉积第二填充材料; 并用工艺气体照射工件的表面以使表面变平。 在平坦化步骤中，基于检测到检测材料的成分的结果，检测出从工件移除并从工件飞离的检测材料的成分，停止用处理气体的照射。

公开(公告)号：US07247343B2

公开(公告)日：2007-07-24

申请号：US10924991

申请日：2004-08-25

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： B05D5/12

CPC分类号： G11B5/855

摘要： A method for manufacturing a magnetic recording medium for efficiently and certainly manufacturing a magnetic recording medium. The magnetic recording medium has a recording layer formed to have predetermined concavo-convex pattern and an adequately flat surface. According to this method, a non-magnetic material is deposited on and filled into a member to be processed 10 by adjusting sputtering conditions in such a manner as to satisfy the following Eq I: 0.1≦V/V0−0.003×(L·d/t)+1.2 Eq I where V represents a deposition rate which is the film thickness per unit of time, V0 represent a deposition rate in a case that the bias power is zero, t represents the film thickness of the deposited non-magnetic material, L represents the width of a recording element, and d represents the depth of a recessed portion between the recording elements.

摘要翻译： 一种用于制造磁记录介质的方法，用于有效且肯定地制造磁记录介质。 磁记录介质具有形成为具有预定凹凸图案和足够平坦表面的记录层。 根据该方法，通过调整溅射条件，使非磁性材料沉积在待加工构件10中，并满足以下等式I：<？in-line-formula description =“In- 线公式“end =”lead“？> 0.1 <= V / V <0> -0.003x（Ld / t）+1.2 Eq I <？in-line-formula description =”In-line Formulas “end =”tail“？>其中V表示作为每单位时间的膜厚度的沉积速率，V 表示在偏置功率为零的情况下的沉积速率，t表示 沉积的非磁性材料的膜厚度L表示记录元件的宽度，d表示记录元件之间的凹部的深度。

公开(公告)号：US20070031706A1

公开(公告)日：2007-02-08

申请号：US10555670

申请日：2004-09-09

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Mitsuru Takai

IPC分类号： G11B5/65 ,  B05D5/12

CPC分类号： G11B5/855

摘要： A method for manufacturing a magnetic recording medium, which enables efficient and ensured manufacture of a magnetic recording medium having a recording layer formed in a concavo-convex pattern and a satisfactorily flat surface, and a magnetic recording medium are provided. According to the method for manufacturing a magnetic recording medium, a material whose state is selectable between a flowing state and a cured state is used as a non-magnetic material 36. After the non-magnetic material 36 is formed in a flowing state on a surface of an object to be processed 10 including a recording layer 32 formed in a concavo-convex pattern over a glass substrate 12, then the non-magnetic material 36 is cured.

摘要翻译： 提供了一种制造磁记录介质的方法，其能够有效且确保制造具有形成为凹凸图案和令人满意的平坦表面的记录层的磁记录介质和磁记录介质。 根据制造磁记录介质的方法，将其状态在流动状态和固化状态之间可选择的材料用作非磁性材料36.在非磁性材料36以流动状态形成在 包括在玻璃基板12上形成为凹凸图案的记录层32的待处理物体10的表面，然后使非磁性材料36固化。

公开(公告)号：US20050048198A1

公开(公告)日：2005-03-03

申请号：US10924991

申请日：2004-08-25

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/65 ,  G11B5/84 ,  G11B5/855 ,  B05D5/12

CPC分类号： G11B5/855

摘要： A method for manufacturing a magnetic recording medium for efficiently and certainly manufacturing a magnetic recording medium. The magnetic recording medium has a recording layer formed to have predetermined concavo-convex pattern and an adequately flat surface. According to this method, a non-magnetic material is deposited on and filled into a member to be processed 10 by adjusting sputtering conditions in such a manner as to satisfy the following equation (I): 0.1≦V/V0≦−0.003×(L·d/t)+1.2  (I) where V represents a deposition rate which is the film thickness per unit of time, V0 represent a deposition rate in a case that the bias power is zero, t represents the film thickness of the deposited non-magnetic material, L represents the width of a recording element, and d represents the depth of a recessed portion between the recording elements.

摘要翻译： 一种用于制造磁记录介质的方法，用于有效且肯定地制造磁记录介质。 磁记录介质具有形成为具有预定凹凸图案和足够平坦表面的记录层。 根据该方法，通过以满足下述式（I）的方式调整溅射条件，将非磁性材料沉积并填充到待加工构件10中：0.1 <= V / V0 <= 0.003 x（Ld / t）+1.2（I）其中V表示作为每单位时间的膜厚度的沉积速率，V0表示在偏置功率为零的情况下的沉积速率，t表示沉积的膜厚度 非磁性材料，L表示记录元件的宽度，d表示记录元件之间的凹部的深度。

公开(公告)号：US07682713B2

公开(公告)日：2010-03-23

申请号：US11222761

申请日：2005-09-12

申请人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B7/24 ,  G11B5/82 ,  G11B3/68 ,  G11B3/70

CPC分类号： G11B5/855

摘要： The magnetic recording medium includes: recording elements formed as the convex portions of the recording layer formed in the predetermined concavo-convex pattern over a substrate; and a filling elements with which a concave portions between the recording elements are filled. A surface concave portion is formed in a surface of the magnetic recording medium above the recording element. The surface concave portion has a cross-sectional shape of which a portion corresponding to a center of the recording element lying thereunder in a width direction thereof is recessed deepest toward the substrate, and has a width monotonically increasing with increase of a distance from the substrate.

摘要翻译： 磁记录介质包括：在衬底上形成为以预定凹凸图案形成的记录层的凸部的记录元件; 以及填充元件，通过该填充元件填充记录元件之间的凹部。 表面凹部形成在记录元件上方的磁记录介质的表面上。 表面凹部具有截面形状，其与位于其下方的记录元件的沿其宽度方向的中心相对应的部分最深地朝向衬底凹入，并且随着距离衬底的距离的增加而具有单调增加的宽度 。