公开(公告)号：US06389877B1

公开(公告)日：2002-05-21

申请号：US09367294

申请日：1999-08-10

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01N1100

CPC分类号： G01G3/16

摘要： There is provided a double-headed mass sensor (25) in which between a first connecting plate (22A) joined to a first diaphragm (21A) at respective sides and a second connecting plate (22B) joined to a second diaphragm (21B) at respective sides, a first sensing plate (41A), on which a main element (44) is provided on at least one plane surface, is bridged, and a resonating portion comprising the diaphragms (21A), (21B), the connecting plates (22A), (22B), the first sensing plate (41A) and the main element (44) is joined to a sensor substrate (27). Change in the mass of each of the diaphragms (21A), (21B) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragms (21A), (21B). The mass sensor of the present invention enables the easy and highly accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

摘要翻译： 提供了一种双头质量传感器（25），其中在与第二隔膜（21B）接合的第一连接板（22A）和与第二隔膜（21B）接合的第二连接板（22B）之间 相互的侧面，在至少一个平面上设置有主要元件（44）的第一传感板（41A）被桥接，并且包括隔膜（21A），（21B），连接板 22A），（22B），第一感测板（41A）和主要元件（44）接合到传感器基板（27）。 （21A），（21B）的质量的变化通过测量伴随着膜片（21A），（21B）的质量变化的共振部分的共振频率的变化来测量每个膜片（21A），（21B）的质量的变化。 本发明的质量传感器能够容易且高度精确地测量包括细菌和病毒等微生物，化学物质以及气相沉积膜的厚度的纳刻级的微小质量。

公开(公告)号：US06326563B1

公开(公告)日：2001-12-04

申请号：US09401625

申请日：1999-09-22

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G314

CPC分类号： G01G3/13

摘要： A mass sensor includes a diaphragm, a sensing plate having a piezoelectric element arranged on at least a part of at least one surface joining respective sides, a connecting plate sandwiched by the diaphragm and the sensing plate, wherein the diaphragm, the sensing plate, the piezoelectric element, and the connecting plate form a resonating portion. The connecting plate is bridged across the side surfaces of a concave portion formed in a sensor substrate, and the sensing plate is joined to at least the bottom portion of the concave portion. Change in the mass of the diaphragm is measured by measuring change in the resonant frequencies of the resonating portion accompanying the change in the mass of the diaphragm. The mass sensor enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, or chemical substances, or the thickness of vapor-deposited films.

摘要翻译： 质量传感器包括隔膜，具有布置在连接相应侧面的至少一个表面的至少一部分上的压电元件的感测板，由隔膜和感测板夹持的连接板，其中隔膜，感测板， 压电元件和连接板形成谐振部分。 连接板跨接在形成在传感器基板中的凹部的侧面，并且感测板至少与凹部的底部接合。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。 质量传感器能够容易且准确地测量包括诸如细菌和病毒等微生物或化学物质的纳刻级的微小质量或气相沉积膜的厚度。

公开(公告)号：US5965970A

公开(公告)日：1999-10-12

申请号：US639609

申请日：1996-04-29

申请人： Yukihisa Takeuchi ,  Keizo Miyata ,  Takao Ohnishi ,  Nobuo Takahashi

发明人： Yukihisa Takeuchi ,  Keizo Miyata ,  Takao Ohnishi ,  Nobuo Takahashi

IPC分类号： G01L7/08 ,  G01L9/00 ,  G01L9/04 ,  H01L41/09 ,  H01L41/08

CPC分类号： H01L41/0973

摘要： A diaphragm structure includes a ceramic substrate having at least one window portion and a thin diaphragm laminated onto the ceramic substrate so as to cover the window portion, wherein only a part of an interface between the ceramic substrate and the thin diaphragm is joined to form a joint of the diaphragm. A diaphragm structure is free from instability caused by a breakage or deformation of a partition wall between window portions upon punching or laminating even if a diaphragm structure employs a design in which dimensions of a diaphragm portion is maintained and simultaneously a distance between diaphragm portions is made narrow to restrain a surface area excluding a diaphragm portion of a diaphragm structure or a design in which a plurality of diaphragm portion having various configurations and dimensions are disposed.

摘要翻译： 膜片结构包括陶瓷基板，其具有至少一个窗口部分和层叠在陶瓷基板上以便覆盖窗口部分的薄隔膜，其中仅陶瓷基板和薄隔膜之间的界面的一部分接合形成 隔膜的关节。 即使膜片结构采用保持隔膜部分的尺寸同时设置隔膜部分之间的距离的设计，隔膜结构也不会因冲孔或层压时窗口部分之间的隔壁的断裂或变形而引起的不稳定性 狭窄以限制除隔膜结构的隔膜部分之外的表面积或其中设置有具有各种构造和尺寸的多个隔膜部分的设计。

公开(公告)号：US06465934B1

公开(公告)日：2002-10-15

申请号：US09214110

申请日：1999-05-05

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： H01L4104

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.

摘要翻译： 一种压电/电致伸缩器件，包括基片和连接板，所述连接板具有连接到所述基片的第一端和沿第一方向延伸的相对的第二端，以及沿垂直于所述第一方向的第二方向的第一和第二相对侧。 固定板连接到连接板的第二端。 第一隔膜的第一侧接合到连接板的第一侧，并且第一隔膜的相对的第二侧接合到基板。 第二隔膜的第一侧接合到基板，并且第二隔膜的相对的第二侧接合到连接板的第二侧。 压电/电致伸缩元件设置在至少一个隔膜的至少一个平面表面的至少一部分上。

公开(公告)号：US06386053B1

公开(公告)日：2002-05-14

申请号：US09297655

申请日：1999-05-04

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G313

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor (30) in which a connection plate (33) and a diaphragm (31) are joined together at their respective sides; a sensing plate (32) is joined to the connection plate (33) at their respective sides in the direction perpendicular to the direction where the diaphragm (31) is joined to the connection plate (33); a piezoelectric element (35) consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate (32); and a resonating portion consisting of the diaphragm (31), the sensing plate (32), the connection plate (33), and the piezoelectric element (35) is joined to a sensor substrate (34). Change in the mass of the diaphragm (31) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm (31). The mass sensor of the present invention enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

摘要翻译： 其中连接板（33）和隔膜（31）在其各自侧面接合在一起的质量传感器（30） 感测板（32）在与隔膜（31）接合到连接板（33）的方向垂直的方向上的相应侧面处连接到连接板（33）; 在感测板（32）的板表面的至少任一个上安装由压电膜和电极组成的压电元件（35）; 并且由传感器基板（34）接合由隔膜（31），检测板（32），连接板（33）和压电元件（35）组成的谐振部。 通过测量伴随隔膜（31）的质量变化的谐振部分的谐振频率的变化来测量隔膜（31）的质量的变化。 本发明的质量传感器能够容易且精确地测量包括诸如细菌和病毒的微生物，化学物质和气相沉积膜的微量级的纳刻级的微小质量。

公开(公告)号：US06239534B1

公开(公告)日：2001-05-29

申请号：US09242642

申请日：1998-12-28

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： H01L4108

CPC分类号： H01L41/09 ,  H01L41/0933

摘要： A piezoelectric/electrostrictive device is provided in which a connection plate whose one end in the longitudinal direction is held by two diaphragms and whose other end is held by two other diaphragms is spanned between bottoms of faced concave portions formed on a substrate, and piezoelectric elements are arranged on at least a part of at least one-side plane surface of each of the diaphragms, and the diaphragms are connected with the sides of the concave portions in at least the direction for the diaphragms to hold the connection plate, and a fixing plate is connected to the connection plate so that the longitudinal direction of the fixing plate becomes parallel with the direction for the diaphragms to hold the connection plate. A displacement of the fixing plate generated by applying a voltage to the piezoelectric element is utilized or an electromotive force of the piezoelectric element based on a displacement of the fixing plate is utilized. The piezoelectric/electrostrictive device is preferably used as a positioning- or angle-adjustment mechanism of an optical unit or precision unit, a vibrator or resonator for communication or motive power, an oscillator, a discriminator, an ultrasonic sensor, or an acceleration sensor because the device is able to convert electric energy into mechanical energy such as a mechanical displacement, force, or vibration and vice versa.

摘要翻译： 提供一种压电/电致伸缩器件，其中纵向方向上的一端由两个隔膜保持并且另一端由另外两个隔膜保持的连接板横跨在形成在基板上的面对凹部的底部和压电元件 布置在每个隔膜的至少一个侧平面表面的至少一部分上，并且隔膜至少在隔膜的方向上与凹部的侧面连接以保持连接板，并且固定 板连接到连接板，使得固定板的纵向方向平行于用于保持连接板的隔膜的方向。 利用通过向压电元件施加电压而产生的固定板的位移，或者利用基于固定板的位移的压电元件的电动势。 压电/电致伸缩装置优选地用作光学单元或精密单元的定位或角度调节机构，用于通信或动力的振动器或谐振器，振荡器，鉴别器，超声波传感器或加速度传感器，因为 该装置能够将电能转换成机械能，例如机械位移，力或振动，反之亦然。

公开(公告)号：US6065339A

公开(公告)日：2000-05-23

申请号：US952596

申请日：1997-11-21

申请人： Yukihisa Takeuchi ,  Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Takao Ohnishi

发明人： Yukihisa Takeuchi ,  Masahiko Namerikawa ,  Kazuyoshi Shibata ,  Takao Ohnishi

IPC分类号： G01C19/56 ,  G01P15/09 ,  G01P15/097 ,  G01P15/10 ,  G01C19/00

CPC分类号： G01P15/097 ,  G01C19/5628 ,  G01P15/0922 ,  G01P2015/0817 ,  Y10T29/42

摘要： A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method. Further, a thin-walled second plate-shaped section 8, which is provided for decreasing rigidity in the direction of vibration and facilitating the vibration for the vibrator 2, is formed in an integrated manner so that its principal surface extends in the direction perpendicular to the direction of vibration. Accordingly, it is possible to obtain the vibration gyro sensor made of ceramics having excellent sensitivity, in which the characteristics of the vibrator are scarcely affected by an ambient magnetic field, processing or machining can be easily performed, and the electric characteristics can be advantageously adjusted.

摘要翻译： PCT No.PCT / JP97 / 01094 Sec。 371日期：1997年11月21日 102（e）日期1997年11月21日PCT 1997年3月28日PCT公布。 出版物WO97 / 37195 日期1997年9月10日振动陀螺传感器的构造如下。 也就是说，检测压电/电致伸缩元件12，其在振动器旋转时检测在垂直于振动器2的振动方向的方向上产生的位移。 检测部由与振动器2一起的陶瓷一体化的烧制品和支撑基座4构成。检测部由比振动器2更薄的第一板状部6构成， 其主表面在振动方向上延伸。 压电/电致伸缩元件12根据成膜方法以一体的方式形成在第一板状部分6上。 此外，为了降低振动方向的刚度而减少振动器2的振动而设置的薄壁的第二板状部分8以一体的方式形成，使得其主表面沿垂直于 振动的方向。 因此，可以获得振动器的特性几乎不受环境磁场的影响，易于进行加工或加工的具有优异的灵敏度的陶瓷制的振动陀螺仪传感器，并且可以有利地调整电特性 。

公开(公告)号：US07089813B2

公开(公告)日：2006-08-15

申请号：US11060988

申请日：2005-02-18

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G9/00

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.

摘要翻译： 质量传感器，其中连接板和隔膜在其各自的侧面接合在一起; 感测板在垂直于隔膜接合方向的连接板的相应侧面处连接到连接板; 由压电膜和电极构成的压电元件安装在感测板的板表面的至少任一个上; 并且由隔膜，感测板，连接板和压电元件组成的谐振部分接合到传感器基板。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。

公开(公告)号：US06724127B2

公开(公告)日：2004-04-20

申请号：US10231737

申请日：2002-08-30

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： H01L4104

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.

摘要翻译： 一种压电/电致伸缩器件，包括基片和连接板，所述连接板具有连接到所述基片的第一端和沿第一方向延伸的相对的第二端，以及沿垂直于所述第一方向的第二方向的第一和第二相对侧。 固定板连接到连接板的第二端。 第一隔膜的第一侧接合到连接板的第一侧，并且第一隔膜的相对的第二侧接合到基板。 第二隔膜的第一侧接合到基板，并且第二隔膜的相对的第二侧接合到连接板的第二侧。 压电/电致伸缩元件设置在至少一个隔膜的至少一个平面表面的至少一部分上。

公开(公告)号：US06612190B2

公开(公告)日：2003-09-02

申请号：US10071019

申请日：2002-02-08

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01P1510

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor (30) in which a connection plate (33) and a diaphragm (31) are joined together at their respective sides; a sensing plate (32) is joined to the connection plate (33) at their respective sides in the direction perpendicular to the direction where the diaphragm (31) is joined to the connection plate (33); a piezoelectric element (35) consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate (32); and a resonating portion consisting of the diaphragm (31), the sensing plate (32), the connection plate (33), and the piezoelectric element (35) is joined to a sensor substrate (34). Change in the mass of the diaphragm (31) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm (31).

摘要翻译： 其中连接板（33）和隔膜（31）在其各自侧面接合在一起的质量传感器（30） 感测板（32）在与隔膜（31）接合到连接板（33）的方向垂直的方向上的相应侧面处连接到连接板（33）; 在感测板（32）的板表面的至少任一个上安装由压电膜和电极组成的压电元件（35）; 并且由传感器基板（34）接合由隔膜（31），检测板（32），连接板（33）和压电元件（35）组成的谐振部。 通过测量伴随隔膜（31）的质量变化的谐振部分的谐振频率的变化来测量隔膜（31）的质量的变化。