公开(公告)号：US06400117B2

公开(公告)日：2002-06-04

申请号：US09749954

申请日：2000-12-29

申请人： Yuichi Okazaki

发明人： Yuichi Okazaki

IPC分类号： G05B106

CPC分类号： G05B19/19 ,  B23Q1/44 ,  B23Q5/34 ,  G05B2219/42011 ,  H02N2/025 ,  H02N2/067

摘要： A slider mechanism includes two parallel guide rails, a first slider and a second slider constituted as separate members that are frictionally retained by and slidable along the guide rails, a first actuator for driving the first slider to change frictional force between it and the guide rails, a second actuator connecting the first and second sliders and adapted to move the second slider in the longitudinal direction of the guide rails, and a driving device for applying to the first actuator and second actuator a drive command that periodically produces a drive operation composed of four sequentially executed drive operation stages each consisting of a linear drive operation. A method of driving the slider mechanism includes a step of applying to the first actuator and second actuator a drive command that periodically produces a drive operation composed of four sequentially executed drive operation stages each consisting of a linear drive operation for operating the first actuator to change frictional force between the slider mechanism and the guide rails and operating the second actuator to move the second slider in the longitudinal direction of the guide rails.

摘要翻译： 滑动机构包括两个平行的导轨，第一滑动件和第二滑动件，构成为沿着导轨摩擦地保持和滑动的分离的构件;第一致动器，用于驱动第一滑块以改变其与导轨之间的摩擦力 ，连接第一滑块和第二滑块并适于在导轨的纵向方向上移动第二滑块的第二致动器，以及用于向第一致动器和第二致动器施加驱动命令的驱动装置，其周期性地产生由 四个顺序执行的驱动操作阶段，每个由线性驱动操作组成。 驱动滑块机构的方法包括向第一致动器和第二致动器施加周期性地产生由四个顺序执行的驱动操作阶段组成的驱动操作的驱动命令的步骤，每个驱动操作阶段包括用于操作第一致动器的线性驱动操作以改变 滑块机构和导轨之间的摩擦力，并操作第二致动器以沿着导轨的纵向方向移动第二滑块。

公开(公告)号：US5997756A

公开(公告)日：1999-12-07

申请号：US233666

申请日：1999-01-19

申请人： Yuichi Okazaki ,  Yoshinori Tomiya

发明人： Yuichi Okazaki ,  Yoshinori Tomiya

IPC分类号： B29D11/00 ,  B44C1/22 ,  G02B27/10

CPC分类号： H01L27/14627

摘要： A resist having a three-dimensional shape of a microlens array and a material layer of the microlens array are simultaneously etched under a condition by which planar patterns transferred from the resist to the material layer are larger than planar patterns of the resist. The spacing between microlenses can be made narrower than the spacing between the planar patterns of the resist. Even when the planar shape of the microlens is an ellipse, the curvatures can be optimized in both the row and column directions by making the heights in these directions different from each other. It is possible to provide a microlens array having a small non-focusing region and a solid-state image pickup device having a high sensitivity and little smear.

公开(公告)号：US5424834A

公开(公告)日：1995-06-13

申请号：US77931

申请日：1993-06-18

申请人： Jun Akedo ,  Yuichi Okazaki

发明人： Jun Akedo ,  Yuichi Okazaki

IPC分类号： G01B11/24 ,  G01B11/02 ,  G01B11/245 ,  G01B11/30 ,  G02B27/28 ,  G02B5/30 ,  G01B11/03

CPC分类号： G02B27/28 ,  G01B11/026 ,  G01B11/30

摘要： An optical displacement sensor that has a light beam polariscope located on the light path of light reflected from a target surface, and means for detecting the focal point position and transverse position of the light beam from the polariscope. The focal point position corresponds to axial displacement at the target surface, and the transverse position corresponds to inclination of the target surface, so the effect of the inclination of the surface can be compensated for by using a transverse position detection signal to adjust the light beam polariscope.

摘要翻译： 具有位于从目标表面反射的光的光路上的光束偏振器的光学位移传感器，以及用于检测来自偏振镜的光束的焦点位置和横向位置的装置。 焦点位置对应于目标表面处的轴向位移，并且横向位置对应于目标表面的倾斜度，因此可以通过使用横向位置检测信号来调整表面的倾斜度的影响来调整光束 偏光镜

公开(公告)号：US5262707A

公开(公告)日：1993-11-16

申请号：US888119

申请日：1992-05-26

申请人： Yuichi Okazaki ,  Shin Asano ,  Takayuki Goto

发明人： Yuichi Okazaki ,  Shin Asano ,  Takayuki Goto

IPC分类号： B23Q15/22 ,  G05B19/39 ,  G05D3/12 ,  G05D3/14 ,  G05B11/18

CPC分类号： G05B19/39 ,  G05D3/1436

摘要： A positioning control method and apparatus in which a fine movement mechanism is moved without exceeding a movable area so that positioning of a large amount of displacement can be attained with high accuracy and high-speed positioning from a point to a point with the same control method. A coarse movement mechanism (101) has a large amount of movement and low positioning accuracy and a fine movement mechanism (102) on the coarse movement mechanism has a small amount of movement and high positioning accuracy. A signal E4 based on a error signal C4 of a movement command signal A4 of a signal generator (104) and a displacement signal B4 representative of a displacement of an object to be positioned with respect to a fixed position detected by an absolute position detecting device (105) is supplied to the fine movement mechanism and a coarse movement command signal M4, produced by adding a signal representative of a relative displacement of the fine movement mechanism (102) with respect to the coarse movement mechanism (101) detected by a relative position detecting device (133) to the error signal C4, is supplied to the coarse movement mechanism (101) to thereby control respective movements.