Positioning control method and apparatus
    1.
    发明授权
    Positioning control method and apparatus 失效
    定位控制方法及装置

    公开(公告)号:US5262707A

    公开(公告)日:1993-11-16

    申请号:US888119

    申请日:1992-05-26

    CPC分类号: G05B19/39 G05D3/1436

    摘要: A positioning control method and apparatus in which a fine movement mechanism is moved without exceeding a movable area so that positioning of a large amount of displacement can be attained with high accuracy and high-speed positioning from a point to a point with the same control method. A coarse movement mechanism (101) has a large amount of movement and low positioning accuracy and a fine movement mechanism (102) on the coarse movement mechanism has a small amount of movement and high positioning accuracy. A signal E4 based on a error signal C4 of a movement command signal A4 of a signal generator (104) and a displacement signal B4 representative of a displacement of an object to be positioned with respect to a fixed position detected by an absolute position detecting device (105) is supplied to the fine movement mechanism and a coarse movement command signal M4, produced by adding a signal representative of a relative displacement of the fine movement mechanism (102) with respect to the coarse movement mechanism (101) detected by a relative position detecting device (133) to the error signal C4, is supplied to the coarse movement mechanism (101) to thereby control respective movements.

    Manufacturing system for microstructure
    2.
    发明申请
    Manufacturing system for microstructure 审中-公开
    微结构制造系统

    公开(公告)号:US20050229737A1

    公开(公告)日:2005-10-20

    申请号:US11060767

    申请日:2005-02-18

    摘要: A manufacturing system for a microstructure includes a rough motion stage having predetermined positioning accuracy and a large stroke length, a fine motion stage disposed on the rough motion stage and having higher positioning accuracy than the rough motion stage and a small stroke length, and the like collectively as a stage device disposed in a vacuum container, laser length measuring machines for measuring a distance to a mirror disposed on the fine motion stage, a stage control device for driving the fine motion stage by a result of measurement by the laser length measuring machines, and the like collectively as a stage control unit, and a pressing rod 44 for holding a pressure-contacting target member disposed opposite to a pressure-contacted member held by the stage device and pressure-contacting and separating the members, a pressure-contacting drive mechanism for applying a pressure-contacting force to the pressing rod 44, and the like collectively as a pressure-contacting mechanism unit.

    摘要翻译: 用于微结构的制造系统包括具有预定定位精度和大行程长度的粗动作台,设置在粗动台上的精细动作台,具有比粗动作台高的定位精度和较小的行程长度等 统称为设置在真空容器中的舞台装置,用于测量与配置在微动平台上的镜子的距离的激光长度测量机,用于通过激光长度测量机测量结果驱动微动台的舞台控制装置 等等作为台架控制单元,以及按压杆44,用于保持与由台架装置保持的压接构件相对设置的受压接触目标构件,并且对构件进行压力接触和分离,压力接触 驱动机构,用于将压力接触力一体地作为压力接触mec施加到按压杆44等 汉族单位。

    Method of manufacturing microstructure and manufacturing system for the same
    3.
    发明申请
    Method of manufacturing microstructure and manufacturing system for the same 审中-公开
    制造微结构和制造系统的方法

    公开(公告)号:US20050233064A1

    公开(公告)日:2005-10-20

    申请号:US11060788

    申请日:2005-02-18

    CPC分类号: B81C3/008

    摘要: A method of and system for manufacturing a microstructure having high form accuracy and a manufacturing system is disclosed. On a rough motion stage having a predetermined positioning accuracy and a large stroke length, a fine motion stage having a small stroke length and a higher positioning accuracy is placed. First, the rough motion stage is moved to a desired position. By use of a mirror placed on a laser length measuring machine and the fine motion stage, the current position of a thin film member on the fine motion stage is precisely measured. This measurement value is feed-backed to a stage control device, and a difference between the current position and a target position is calculated by an error correcting unit. Thus, an error correcting instruction value is generated to move the fine motion stage to the target position. Thus, an error of the rough motion stage is corrected.

    摘要翻译: 公开了一种用于制造具有高成形精度的微结构和制造系统的方法和系统。 在具有预定定位精度和大行程长度的粗略运动台上,放置行程长度小且定位精度较高的微动平台。 首先,粗动作阶段移动到期望的位置。 通过使用放置在激光长度测量机和精细运动台上的反射镜,精细测量薄膜部件在微动台上的当前位置。 该测量值被馈送到载物台控制装置,并且通过误差校正单元计算当前位置与目标位置之间的差。 因此,产生误差校正指令值以将微动台移动到目标位置。 因此,校正粗略运动阶段的误差。

    METHOD OF MANUFACTURING MICROSTRUCTURE AND MANUFACTURING SYSTEM FOR THE SAME
    4.
    发明申请
    METHOD OF MANUFACTURING MICROSTRUCTURE AND MANUFACTURING SYSTEM FOR THE SAME 审中-公开
    制造微结构和制造系统的方法

    公开(公告)号:US20070256774A1

    公开(公告)日:2007-11-08

    申请号:US11779805

    申请日:2007-07-18

    IPC分类号: B32B38/00

    CPC分类号: B81C3/008

    摘要: A method of and system for manufacturing a microstructure having high form accuracy and a manufacturing system is disclosed. On a rough motion stage having a predetermined positioning accuracy and a large stroke length, a fine motion stage having a small stroke length and a higher positioning accuracy is placed. First, the rough motion stage is moved to a desired position. By use of a mirror placed on a laser length measuring machine and the fine motion stage, the current position of a thin film member on the fine motion stage is precisely measured. This measurement value is feed-backed to a stage control device, and a difference between the current position and a target position is calculated by an error correcting unit. Thus, an error correcting instruction value is generated to move the fine motion stage to the target position. Thus, an error of the rough motion stage is corrected.

    摘要翻译: 公开了一种用于制造具有高成形精度的微结构和制造系统的方法和系统。 在具有预定定位精度和大行程长度的粗略运动台上,放置行程长度小且定位精度较高的微动平台。 首先,粗动作阶段移动到期望的位置。 通过使用放置在激光长度测量机和精细运动台上的反射镜,精细测量薄膜部件在微动台上的当前位置。 该测量值被馈送到载物台控制装置,并且通过误差校正单元计算当前位置与目标位置之间的差。 因此,产生误差校正指令值以将微动台移动到目标位置。 因此,校正粗略运动阶段的误差。

    Workpiece measuring device, collision preventing device, and machine tool
    5.
    发明授权
    Workpiece measuring device, collision preventing device, and machine tool 有权
    工件测量装置,防撞装置和机床

    公开(公告)号:US08805570B2

    公开(公告)日:2014-08-12

    申请号:US13376803

    申请日:2009-11-10

    摘要: A workpiece measuring device, a collision preventing device, and a machine tool acquires 3D data of the shape of a workpiece used to prevent a collision between the workpiece and part of the machine tool. A measuring section measures the distance to the workpiece through scanning in a non-contact manner; and a shape recognition section generates a 3D mesh structure. The coordinates of a measurement point on the workpiece based on distance information about the measured distance to the workpiece, and that generates a measurement geometry map such that, when the ratio of the number of times the calculated measurement point is included in one unit of the 3D mesh structure to the number of times a position of the workpiece corresponding to the one unit is scanned is equal to or larger than a predetermined threshold, the one unit is regarded as part of the workpiece are included.

    摘要翻译: 工件测量装置,防撞装置和机床获取用于防止工件与机床的一部分之间的碰撞的工件的形状的3D数据。 测量部通过非接触式扫描测量与工件的距离; 并且形状识别部分生成3D网格结构。 基于距离关于被测距离到工件的距离信息的工件上的测量点的坐标,并且产生测量几何图,使得当计算出的测量点的次数包括在一个单位中时 3D网格结构与扫描与一个单元对应的工件的位置的次数等于或大于预定阈值,将该单位视为工件的一部分。

    VERTICAL MILL
    6.
    发明申请
    VERTICAL MILL 审中-公开
    立式铣刀

    公开(公告)号:US20140197260A1

    公开(公告)日:2014-07-17

    申请号:US14236019

    申请日:2012-09-06

    IPC分类号: B02C15/04

    CPC分类号: B02C15/04 B02C2015/008

    摘要: In a vertical mill, a mill table is supported in a housing by a support shaft center, which is along a vertical direction, in such a manner as to be driven and rotated, and above the mill table, a mill roller is rotatably supported by a first support shaft, and the mill roller is capable of rotating the mill table in such a manner that an external peripheral surface of the mill roller comes into contact with an upper surface of the mill table, and a support arm configured to support the first support shaft is swingably supported on the housing by a second support shaft, in such a manner that the mill roller can come close to or move away from the mill table, and a reaction force load giving device is provided that has a dumper filled with a magnetorheological fluid and magnetizes the magnetorheological fluid.

    摘要翻译: 在立式磨机中,磨床由支承轴中心沿着垂直方向支撑在壳体中,以便被驱动和旋转,并且在轧机台的上方,轧辊被可旋转地支撑在 第一支撑轴,并且所述轧辊能够以使所述轧辊的外周面与所述轧机台的上表面接触的方式旋转所述轧机台;以及支撑臂,其被构造成支撑所述第一 支撑轴通过第二支撑轴可摆动地支撑在壳体上,使得轧辊可以靠近或离开轧机台,并且提供反作用力装载给装置,其具有填充有 磁流变流体并磁化流体流体。

    WORKPIECE MEASURING DEVICE, COLLISION PREVENTING DEVICE, AND MACHINE TOOL
    8.
    发明申请
    WORKPIECE MEASURING DEVICE, COLLISION PREVENTING DEVICE, AND MACHINE TOOL 有权
    工件测量装置,防碰撞装置和机器工具

    公开(公告)号:US20120089247A1

    公开(公告)日:2012-04-12

    申请号:US13376803

    申请日:2009-11-10

    摘要: A workpiece measuring device, a collision preventing device, and a machine tool acquires 3D data of the shape of a workpiece used to prevent a collision between the workpiece and part of the machine tool. A measuring section measures the distance to the workpiece through scanning in a non-contact manner; and a shape recognition section generates a 3D mesh structure. The coordinates of a measurement point on the workpiece based on distance information about the measured distance to the workpiece, and that generates a measurement geometry map such that, when the ratio of the number of times the calculated measurement point is included in one unit of the 3D mesh structure to the number of times a position of the workpiece corresponding to the one unit is scanned is equal to or larger than a predetermined threshold, the one unit is regarded as part of the workpiece are included.

    摘要翻译: 工件测量装置,防撞装置和机床获取用于防止工件与机床的一部分之间的碰撞的工件的形状的3D数据。 测量部通过非接触式扫描测量与工件的距离; 并且形状识别部分生成3D网格结构。 基于距离关于被测距离到工件的距离信息的工件上的测量点的坐标,并且产生测量几何图,使得当计算出的测量点的次数包括在一个单位中时 3D网格结构与扫描与一个单元对应的工件的位置的次数等于或大于预定阈值,将该单位视为工件的一部分。

    Method of purifying bishydroxyalkyl terephthalate
    9.
    发明授权
    Method of purifying bishydroxyalkyl terephthalate 有权
    对苯二甲酸双羟基烷基酯的纯化方法

    公开(公告)号:US06642350B1

    公开(公告)日:2003-11-04

    申请号:US10111785

    申请日:2002-04-26

    IPC分类号: C08F600

    CPC分类号: C07C67/56 C07C69/82

    摘要: A container made of, e.g., polyethylene terephthalate is pulverized and decomposed in the presence of a catalyst by the use of a solvent such as an alcohol or glycol to obtain crude bishydroxyalkyl terephthalate. This crude bishydroxyalkyl terephthalate is then purified by filtration, a treatment with activated carbon, and a treatment with ion-exchange resins. The bishydroxyalkyl terephthalate thus obtained is condensed to produce a container or the like made of polyethylene terephthalate.

    摘要翻译: 将由例如聚对苯二甲酸乙二醇酯制成的容器在催化剂存在下,通过使用醇或二醇等溶剂进行粉碎分解,得到对苯二甲酸双双羟基烷基酯。 然后通过过滤纯化对苯二甲酸粗双羟基烷基酯,用活性炭处理和用离子交换树脂处理。 将由此得到的双羟基烷基对苯二甲酸酯缩合制成由聚对苯二甲酸乙二醇酯制成的容器等。