MASK SET AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING THE SAME
    14.
    发明申请
    MASK SET AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING THE SAME 有权
    使用该方法制造半导体器件的掩模组和方法

    公开(公告)号:US20150348850A1

    公开(公告)日:2015-12-03

    申请号:US14289657

    申请日:2014-05-29

    CPC classification number: H01L21/823842 G03F1/00

    Abstract: A mask set includes a first mask and a second mask. The first mask includes geometric patterns. The second mask includes at least a strip-shaped pattern with a first edge and a second edge opposite to the first edge. The strip-shaped pattern has a centerline along a long axis of the strip-shaped pattern. The first edge includes inwardly displaced segments shifting towards the centerline and each of the inwardly displaced segments overlaps each of the geometric patterns.

    Abstract translation: 掩模组包括第一掩模和第二掩模。 第一个面具包括几何图案。 第二掩模包括至少带状的图案,其具有第一边缘和与第一边缘相对的第二边缘。 带状图案具有沿着带状图案的长轴的中心线。 第一边缘包括朝向中心线移动的向内移位的段,并且每个向内移位的段与每个几何图案重叠。

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