LOW TEMPERATURE POLY-SILICON TFT SUBSTRATE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20170256651A1

    公开(公告)日:2017-09-07

    申请号:US14912610

    申请日:2016-01-29

    Inventor: Gui Chen Qiang Gong

    Abstract: The present invention provides a LTPS TFT substrate and a manufacturing method thereof. The LTPS TFT substrate of the present invention includes a metal layer formed on a channel zone so that the metal layer, a source electrode, and a drain electrode can be used as a mask to form LDD zones in a poly-silicon layer in order to save the mask needed for separately forming the LDD zones; further, due to the addition of the metal layer that is connected to the channel zone of the poly-silicon layer, the electrical resistance of the channel zone can be effectively reduced to increase a TFT on-state current. The LTPS TFT substrate manufacturing method of the present invention forms a metal layer on a channel zone at the same time of forming a source electrode and a drain electrode and uses the metal layer, the source electrode, and the drain electrode as a mask to form LDD zones in a poly-silicon layer so as to save the mask needed for separately forming the LDD zones thereby reducing the manufacturing cost and increasing throughput.

    LOW TEMPERATURE POLY-SILICON TFT SUBSTRATE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20180090625A1

    公开(公告)日:2018-03-29

    申请号:US15829970

    申请日:2017-12-03

    Inventor: Gui Chen Qiang Gong

    Abstract: The present invention provides a LTPS TFT substrate and a manufacturing method thereof. The LIPS TFT substrate of the present invention includes a metal layer formed on a channel zone so that the metal layer, a source electrode, and a drain electrode can be used as a mask to form LDD zones in a poly-silicon layer in order to save the mask needed for separately forming the LDD zones; further, due to the addition of the metal layer that is connected to the channel zone of the poly-silicon layer, the electrical resistance of the channel zone can be effectively reduced to increase a TFT on-state current. The LTPS TFT substrate manufacturing method of the present invention forms a metal layer on a channel zone at the same time of forming a source electrode and a drain electrode and uses the metal layer, the source electrode, and the drain electrode as a mask to form LDD zones in a poly-silicon layer so as to save the mask needed for separately forming the LDD zones thereby reducing the manufacturing cost and increasing throughput.

    Low temperature poly-silicon TFT substrate and manufacturing method thereof

    公开(公告)号:US09876120B2

    公开(公告)日:2018-01-23

    申请号:US14912610

    申请日:2016-01-29

    Inventor: Gui Chen Qiang Gong

    Abstract: The present invention provides a LTPS TFT substrate and a manufacturing method thereof. The LTPS TFT substrate of the present invention includes a metal layer formed on a channel zone so that the metal layer, a source electrode, and a drain electrode can be used as a mask to form LDD zones in a poly-silicon layer in order to save the mask needed for separately forming the LDD zones; further, due to the addition of the metal layer that is connected to the channel zone of the poly-silicon layer, the electrical resistance of the channel zone can be effectively reduced to increase a TFT on-state current. The LTPS TFT substrate manufacturing method of the present invention forms a metal layer on a channel zone at the same time of forming a source electrode and a drain electrode and uses the metal layer, the source electrode, and the drain electrode as a mask to form LDD zones in a poly-silicon layer so as to save the mask needed for separately forming the LDD zones thereby reducing the manufacturing cost and increasing throughput.

    Low temperature poly-silicon TFT substrate and manufacturing method thereof

    公开(公告)号:US10749037B2

    公开(公告)日:2020-08-18

    申请号:US15829970

    申请日:2017-12-03

    Inventor: Gui Chen Qiang Gong

    Abstract: The present invention provides a LTPS TFT substrate and a manufacturing method thereof. The LIPS TFT substrate of the present invention includes a metal layer formed on a channel zone so that the metal layer, a source electrode, and a drain electrode can be used as a mask to form LDD zones in a poly-silicon layer in order to save the mask needed for separately forming the LDD zones; further, due to the addition of the metal layer that is connected to the channel zone of the poly-silicon layer, the electrical resistance of the channel zone can be effectively reduced to increase a TFT on-state current. The LTPS TFT substrate manufacturing method of the present invention forms a metal layer on a channel zone at the same time of forming a source electrode and a drain electrode and uses the metal layer, the source electrode, and the drain electrode as a mask to form LDD zones in a poly-silicon layer so as to save the mask needed for separately forming the LDD zones thereby reducing the manufacturing cost and increasing throughput.

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