公开(公告)号：US20020187662A1

公开(公告)日：2002-12-12

申请号：US10152360

申请日：2002-05-20

Applicant: Xerox Corporation

Inventor： David K. Biegelsen ,  Christopher L. Chua ,  David K. Fork

IPC: H01R012/00

CPC classification number: H01F17/0006 ,  H01F17/0033 ,  H01F41/041 ,  H01F2027/2814 ,  H01G5/18 ,  H01G5/38 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/05624 ,  H01L2224/11 ,  H01L2224/48091 ,  H01L2924/014 ,  H01L2924/19042 ,  H05K3/4092 ,  H01L2924/00014

Abstract: An out-of-plane micro-structure which can be used for on-chip integration of high-Q inductors and transformers places the magnetic field direction parallel to the substrate plane without requiring high aspect ratio processing. The photolithographically patterned coil structure includes an elastic member having an intrinsic stress profile. The intrinsic stress profile biases a free portion away from the substrate forming a loop winding. An anchor portion remains fixed to the substrate. The free portion end becomes a second anchor portion which may be connected to the substrate via soldering or plating. Alternately, the loop winding can be formed of two elastic members in which the free ends are joined in mid-air. A series of individual coil structures can be joined via their anchor portions to form inductors and transformers.

Abstract translation: 可以用于高Q电感和变压器的片上集成的平面外微结构使得磁场方向平行于衬底平面而不需要高纵横比处理。 光刻图案的线圈结构包括具有固有应力分布的弹性构件。 固有的应力分布使形成环绕的基板远离基板偏移。 锚固部分​​保持固定到基底上。 自由部分端部成为可以通过焊接或电镀而连接到基板的第二锚固部分。 或者，环绕组可由两个弹性构件形成，其中自由端在中空连接。 一系列单独的线圈结构可以通过它们的锚定部分接合以形成电感器和变压器。

公开(公告)号：US20020110761A1

公开(公告)日：2002-08-15

申请号：US09780185

申请日：2001-02-09

Applicant: Xerox Corporation

Inventor： David K. Fork ,  Christopher L. Chua ,  Koenraad F. Van Schuylenbergh ,  Noble M. Johnson ,  David K. Biegelsen

IPC: H01F005/00 ,  G03F007/00 ,  H01F027/28

CPC classification number: H01L27/08 ,  H01F17/0033 ,  H01F41/041 ,  H01L21/4853 ,  H05K3/4092

Abstract: Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils are described. In one method the elastic members have graded perforations for controlling rate of release. In another method and structure, a layout enables the contact landing area to be increased. The high yield structures may be used in numerous electronic applications such as filter circuits.

Abstract translation: 描述了用于提高包括弹簧和线圈在内的平面外微结构结构的产量的几种方法和结构。 在一种方法中，弹性构件具有用于控制释放速率的渐变穿孔。 在另一种方法和结构中，布局使得能够增加接触着陆区域。 高产量结构可用于许多电子应用中，例如滤波电路。

公开(公告)号：US20020003231A1

公开(公告)日：2002-01-10

申请号：US09924840

申请日：2001-08-08

Applicant: XEROX CORPORATION

Inventor： Decai Sun ,  Eric Peeters ,  Christopher L. Chua ,  Francesco Lemmi ,  Patrick Y. Maeda ,  Scott Solberg

IPC: H01L029/04

CPC classification number: H01L31/1055 ,  B41J2/45 ,  H01L25/0753 ,  H01L31/1016 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01S5/02 ,  H01S5/0262 ,  H01S5/4025 ,  H01L2924/00

Abstract: A light-producing device integrated with a power monitoring system include a light-producing device from which light is emitted in wavelengths that can range from approximately 700 nm to approximately 3 microns. A semi-transparent sensor is located such that at least a portion of the light emitted passes through the semi-transparent sensor and at least a portion of light is absorbed by the semi-transparent sensor. The semi-transparent sensor is configured to be semi-transparent at wavelengths that can range from 700 nm to 3 microns. The semi-transparent sensor may also be used with an external light source, for example with fiber-optic cables.

Abstract translation: 与功率监测系统集成的发光装置包括发光装置，光发射装置可以在约700nm至约3微米的范围内发射波长。 半透明传感器被定位成使得所发射的光的至少一部分通过半透明传感器，并且至少一部分光被半透明传感器吸收。 半透明传感器被配置为在700nm至3微米范围内的波长处是半透明的。 半透明传感器也可以与外部光源一起使用，例如使用光纤电缆。