RESONANT TRANSDUCER
    15.
    发明申请
    RESONANT TRANSDUCER 审中-公开

    公开(公告)号:US20180145656A1

    公开(公告)日:2018-05-24

    申请号:US15814481

    申请日:2017-11-16

    CPC classification number: H03H9/2447 H03H9/02338 H03H2009/02291

    Abstract: A resonant transducer includes a resonant beam which is formed on a semiconductor substrate, a support beam of which one end is connected to a part of the resonant beam at a predetermined angle, a first electrode which is connected to the resonant beam via the support beam, a second electrode which is disposed adjacent to a center of one side surface of the resonant beam, and a conductor which is disposed between the support beam and the second electrode, the conductor being connected to the first electrode.

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