公开(公告)号：US20120210566A1

公开(公告)日：2012-08-23

申请号：US13440467

申请日：2012-04-05

申请人： Yoshitaka SASAKI ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka SASAKI ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3123 ,  G11B5/313 ,  G11B5/3163 ,  H01L21/67069 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/4906 ,  Y10T29/49066 ,  Y10T428/115

摘要： A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.

摘要翻译： 一种制造磁头的方法包括以下步骤：形成具有极层包围部分的极层包裹层; 以及在极层封装部中形成极层。 极层包括第一层和形成在其上的第二层。 形成极层的步骤包括以下步骤：通过物理气相沉积形成初始第一层; 通过干蚀刻蚀刻初始第一层的表面，使得初始第一层成为第一层; 以及在所述第一层上形成所述第二层。

公开(公告)号：US07924528B2

公开(公告)日：2011-04-12

申请号：US11896705

申请日：2007-09-05

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/31

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49046

摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.

摘要翻译： 磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。 相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。 在第一边缘处采取的倾斜角大于零度。 第二部分在基本上垂直于介质面向表面的方向上延伸。

公开(公告)号：US07916425B2

公开(公告)日：2011-03-29

申请号：US11812757

申请日：2007-06-21

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278

摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.

摘要翻译： 磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。 极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。 非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

公开(公告)号：US07870660B2

公开(公告)日：2011-01-18

申请号：US12379044

申请日：2009-02-11

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic head includes: an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.

摘要翻译： 磁头包括：由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质面对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。

公开(公告)号：US20090277870A1

公开(公告)日：2009-11-12

申请号：US12149987

申请日：2008-05-12

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.

摘要翻译： 磁头包括极层和具有容纳极层的凹槽的封装层。 磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。 非磁性层由Al2O3形成。 在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

公开(公告)号：US07518824B2

公开(公告)日：2009-04-14

申请号：US11213863

申请日：2005-08-30

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

IPC分类号： G11B5/147 ,  G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic head includes an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.

摘要翻译： 磁头包括由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质面对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。

公开(公告)号：US08184398B2

公开(公告)日：2012-05-22

申请号：US12314565

申请日：2008-12-12

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

IPC分类号： G11B5/127 ,  C25F3/02

CPC分类号： G11B5/3106 ,  G11B5/17 ,  G11B5/3136 ,  Y10T428/1171

摘要： A magnetic head includes a coil, a pole layer, and a coil adjacent layer. The coil includes a winding portion having two side surfaces. The coil adjacent layer is adjacent to at least part of the whole of the two side surfaces of the winding portion. The coil adjacent layer is formed of a nonmagnetic material having a linear thermal expansion coefficient of 5×10−6/° C. or smaller at a temperature of 25° C. to 100° C. and having a thermal conductivity of 40 W/m·K or higher at a temperature of 25° C.

摘要翻译： 磁头包括线圈，极层和线圈相邻层。 线圈包括具有两个侧表面的绕组部分。 线圈相邻层与绕组部分的两个侧表面的整体的至少一部分相邻。 线圈相邻层由25℃〜100℃的线性热膨胀系数为5×10 -6 /℃以下的非磁性材料形成，导热率为40W / m·K以上的温度

公开(公告)号：US20080022508A1

公开(公告)日：2008-01-31

申请号：US11857421

申请日：2007-09-18

申请人： Yoshitaka SASAKI ,  Hironori Araki ,  Shigeki Tanemura ,  Takehiro Horinaka

发明人： Yoshitaka SASAKI ,  Hironori Araki ,  Shigeki Tanemura ,  Takehiro Horinaka

IPC分类号： G11B5/127

CPC分类号： G11B5/314 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/4906

摘要： A method of manufacturing a magnetic head for perpendicular magnetic recording that includes a pole layer and a pole-layer-encasing layer. The method includes the steps of: forming a nonmagnetic layer that will be formed into the pole-layer-encasing layer; forming a polishing stopper layer on the top surface of the nonmagnetic layer, the polishing stopping layer being made of a nonmagnetic conductive material and having a penetrating opening with a shape corresponding to the plane geometry of the pole layer; forming a groove in the nonmagnetic layer by selectively etching a portion of the nonmagnetic layer exposed from the opening; forming a magnetic layer to be the pole layer such that the groove is filled; and polishing the magnetic layer until the polishing stopper layer is exposed, so that the magnetic layer is formed into the pole layer.

摘要翻译： 一种制造用于垂直磁记录的磁头的方法，包括极层和极层包层。 该方法包括以下步骤：形成将形成极层包层的非磁性层; 在非磁性层的上表面上形成抛光停止层，抛光停止层由非磁性导电材料制成，具有与极层的平面几何形状对应的形状的贯通孔; 通过选择性地蚀刻从开口暴露的非磁性层的一部分，在非磁性层中形成凹槽; 形成作为极层的磁性层，使得槽被填充; 并研磨该磁性层直到抛光停止层露出，使得该磁性层形成为极性层。

公开(公告)号：US08391109B2

公开(公告)日：2013-03-05

申请号：US13538996

申请日：2012-06-29

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/6088 ,  G11B2005/001 ,  G11B2005/0021 ,  Y10T29/49032

摘要： A manufacturing method for a heat-assisted magnetic recording head includes the step of forming an internal mirror that includes a reflecting film support body and a reflecting film. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the internal mirror includes the step of forming the reflecting film support body and the step of forming the reflecting film. The step of forming the reflecting film support body forms an initial support body, and performs two taper-etching processes on the initial support body so that the initial support body is provided with the first and second inclined surfaces.

摘要翻译： 一种热辅助磁记录头的制造方法，包括形成包括反射膜支撑体和反射膜的内反射镜的步骤。 反射膜支撑体包括第一和第二倾斜表面。 反射膜包括分别位于第一和第二倾斜表面上的第一和第二部分。 形成内反射镜的步骤包括形成反射膜支撑体的步骤和形成反射膜的步骤。 形成反射膜支撑体的步骤形成初始支撑体，并且在初始支撑体上执行两个锥形蚀刻处理，使得初始支撑体设置有第一和第二倾斜表面。

公开(公告)号：US08270110B2

公开(公告)日：2012-09-18

申请号：US12318412

申请日：2008-12-29

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/315 ,  Y10T29/49048

摘要： A magnetic head includes a side shield layer and an encasing layer. The side shield layer has a first end face located in the medium facing surface, a second end face opposite to the first end face, and a first groove accommodating a portion of a pole layer. The first end face includes two portions located on both sides of an end face of the pole layer that are opposite to each other in a track width direction. The encasing layer is formed of a nonmagnetic material and disposed on a side of the side shield layer opposite to a medium facing surface. The encasing layer has a front end face touching the second end face of the side shield layer, and a second groove accommodating another portion of the pole layer. The distance from the medium facing surface to an arbitrary point on the second end face of the side shield layer decreases with decreasing distance from the arbitrary point to the top surface of a substrate.

摘要翻译： 磁头包括侧屏蔽层和封装层。 侧面屏蔽层具有位于介质面对表面中的第一端面，与第一端面相对的第二端面和容纳极层的一部分的第一凹槽。 第一端面包括在磁极层的端面的沿着磁道宽度方向彼此相对的两侧的两个部分。 封装层由非磁性材料形成，并且设置在侧面屏蔽层的与介质相对表面相对的一侧上。 封装层具有接触侧屏蔽层的第二端面的前端面和容纳极层的另一部分的第二槽。 从侧面屏蔽层的第二端面到中间面向任意点的距离随着从任意点到基板顶面的距离的减小而减小。