公开(公告)号：US07513265B2

公开(公告)日：2009-04-07

申请号：US10688889

申请日：2003-10-21

申请人： Tetsuya Yoshikawa ,  Yoichi Inoue ,  Katsumi Watanabe ,  Kaoru Masuda ,  Katsuyuki Iijima ,  Tomomi Iwata ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata

发明人： Tetsuya Yoshikawa ,  Yoichi Inoue ,  Katsumi Watanabe ,  Kaoru Masuda ,  Katsuyuki Iijima ,  Tomomi Iwata ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata

IPC分类号： B08B6/00

CPC分类号： H01L21/67017 ,  B08B7/0021

摘要： Disclosed is a high pressure processing method for subjecting a processing object to a high pressure processing using a high pressure fluid. In this method, the high pressure fluid is brought into collision with the surface of the processing object placed in a high pressure processing chamber, and then distributed along the surface of the processing object in an outward direction beyond the processing object.

摘要翻译： 公开了一种用于使处理对象使用高压流体进行高压处理的高压处理方法。 在该方法中，使高压流体与放置在高压处理室中的处理对象的表面碰撞，然后沿着处理对象的表面向外方向分布超过处理对象。

公开(公告)号：US20060032520A1

公开(公告)日：2006-02-16

申请号：US11249444

申请日：2005-10-14

申请人： Yoshihiko Sakashita ,  Katsumi Watanabe ,  Hisanori Oshiba ,  Shogo Sarumaru ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Ryuji Kitakado

发明人： Yoshihiko Sakashita ,  Katsumi Watanabe ,  Hisanori Oshiba ,  Shogo Sarumaru ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Ryuji Kitakado

IPC分类号： B08B3/00

CPC分类号： H01L21/67017 ,  B08B7/0021 ,  H01L21/67126 ,  Y10S134/902

摘要： A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member. The fluid discharging means includes a fluid discharging port formed in a certain position of the communicating channel closer to the processing chamber than the sealing portion to discharge the high-pressure fluid.

摘要翻译： 高压处理装置包括：处理容器，其包括形成在其中的处理室，以对处理室中的物体执行一定的处理; 流体供给装置，其将高压流体供给到处理室中; 从处理室排出高压流体的流体排出装置; 搅拌单元，其布置在处理室中并且可操作以通过相对于处理容器的旋转将高压流体流过物体; 形成在所述处理容器中以在所述处理室内部和外部连通的连通通道; 旋转驱动构件，其经由设置在所述连通通道中的轴部联接到所述搅拌单元; 以及密封部，其设置在所述轴部和所述处理容器之间，以将所述处理室与所述旋转驱动构件断开。 流体排出装置包括形成在与密封部分相比更靠近处理室的连通通道的特定位置中以排出高压流体的流体排放口。

公开(公告)号：US07252719B2

公开(公告)日：2007-08-07

申请号：US11249444

申请日：2005-10-14

申请人： Yoshihiko Sakashita ,  Katsumi Watanabe ,  Hisanori Oshiba ,  Shogo Sarumaru ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Ryuji Kitakado

发明人： Yoshihiko Sakashita ,  Katsumi Watanabe ,  Hisanori Oshiba ,  Shogo Sarumaru ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Ryuji Kitakado

IPC分类号： B08B3/02

CPC分类号： H01L21/67017 ,  B08B7/0021 ,  H01L21/67126 ,  Y10S134/902

摘要： A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member. The fluid discharging means includes a fluid discharging port formed in a certain position of the communicating channel closer to the processing chamber than the sealing portion to discharge the high-pressure fluid.

摘要翻译： 高压处理装置包括：处理容器，其包括形成在其中的处理室，以对处理室中的物体执行一定的处理; 流体供给装置，其将高压流体供给到处理室中; 从处理室排出高压流体的流体排出装置; 搅拌单元，其布置在处理室中并且可操作以通过相对于处理容器的旋转将高压流体流过物体; 形成在所述处理容器中以在所述处理室内部和外部连通的连通通道; 旋转驱动构件，其经由设置在所述连通通道中的轴部联接到所述搅拌单元; 以及密封部，其设置在所述轴部和所述处理容器之间，以将所述处理室与所述旋转驱动构件断开。 流体排出装置包括形成在与密封部分相比更靠近处理室的连通通道的特定位置中以排出高压流体的流体排放口。

公开(公告)号：US07000653B2

公开(公告)日：2006-02-21

申请号：US10826309

申请日：2004-04-19

申请人： Yoshihiko Sakashita ,  Katsumi Watanabe ,  Hisanori Oshiba ,  Shogo Sarumaru ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Ryuji Kitakado

发明人： Yoshihiko Sakashita ,  Katsumi Watanabe ,  Hisanori Oshiba ,  Shogo Sarumaru ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Ryuji Kitakado

IPC分类号： B65B1/30

CPC分类号： H01L21/67017 ,  B08B7/0021 ,  H01L21/67126 ,  Y10S134/902

摘要： A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member. The fluid discharging means includes a fluid discharging port formed in a certain position of the communicating channel closer to the processing chamber than the sealing portion to discharge the high-pressure fluid.

公开(公告)号：US06691430B2

公开(公告)日：2004-02-17

申请号：US10382616

申请日：2003-03-04

申请人： Kimitsugu Saito ,  Yusuke Muraoka ,  Ryuji Kitakado ,  Takashi Miyake ,  Tomomi Iwata ,  Ikuo Mizobata

发明人： Kimitsugu Saito ,  Yusuke Muraoka ,  Ryuji Kitakado ,  Takashi Miyake ,  Tomomi Iwata ,  Ikuo Mizobata

IPC分类号： F26B700

CPC分类号： H01L21/67034 ,  Y10S134/902

摘要： Liquid for prevention of substrate drying is supplied into a processing chamber so that a pool of the liquid is created as an anti-drying atmosphere in advance inside a processing chamber, and substrates, as they are dipped in the pool, are kept on stand-by in a substrate board. In this manner, air drying of the substrates which are kept on stand-by is prevented. When the number of the substrates in the substrate board reaches a certain number, the anti-drying atmosphere is removed from the processing chamber, which is followed by introduction of an SCF into the processing chamber and supercritical drying (high pressure drying) of all of the plurality of substrates inside the processing chamber, namely, batch supercritical drying.

摘要翻译： 将用于防止基材干燥的液体供应到处理室中，使得在处理室内预先产生作为防干燥气氛的液体池，并且当浸入池中时，将基板保持在待机状态， 通过在衬底板中。 以这种方式，防止了保持待机的基板的空气干燥。 当基板中的基板数量达到一定数量时，从处理室中除去防干燥气氛，然后将SCF引入处理室，并将超临界干燥（高压干燥）全部 处理室内的多个基板，即分批超临界干燥。

公开(公告)号：US06841031B2

公开(公告)日：2005-01-11

申请号：US10201383

申请日：2002-07-23

申请人： Tomomi Iwata ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Takashi Miyake ,  Ryuji Kitakado

发明人： Tomomi Iwata ,  Yusuke Muraoka ,  Kimitsugu Saito ,  Ikuo Mizobata ,  Takashi Miyake ,  Ryuji Kitakado

IPC分类号： G03F7/30 ,  B65G49/07 ,  C03C15/00 ,  C03C23/00 ,  G03F7/40 ,  H01L21/00 ,  H01L21/027 ,  H01L21/304 ,  H01L21/306

CPC分类号： H01L21/67161 ,  C03C15/00 ,  C03C23/0075 ,  C03C23/0085 ,  H01L21/67173

摘要： With respect to any one of processing units, a main transportation path, a developing unit, a dedicated transportation robot and a high-pressure processing unit are disposed linearly in this order in a direction. Hence, even if a processing fluid adhering to a substrate or an evaporant of the processing fluid moves toward the main transportation path while the high-pressure processing unit transports the substrate wet with the processing fluid, there are the processing units located which the processing fluid or its evaporant must arrive at before reaching the main transportation path.

摘要翻译： 对于处理单元中的任何一个，主传送路径，显影单元，专用传送机器人和高压处理单元在该方向上以该顺序线性地设置。 因此，即使附着在处理液的基板或蒸发剂上的处理流体朝着主输送路径移动，而高压处理单元用处理流体输送基板，则存在处理单元，处理流体 或其蒸发器必须在到达主要运输路径之前到达。

公开(公告)号：US09249287B2

公开(公告)日：2016-02-02

申请号：US14002692

申请日：2013-02-18

申请人： Yusuke Muraoka ,  Dai Kusui ,  Yukitaka Kusumura ,  Hironori Mizuguchi

发明人： Yusuke Muraoka ,  Dai Kusui ,  Yukitaka Kusumura ,  Hironori Mizuguchi

IPC分类号： G06F15/18 ,  C08L23/06 ,  B29C47/00 ,  C08J3/22 ,  G06N3/08 ,  B29C43/24 ,  B29C45/00

CPC分类号： C08L23/06 ,  B29C43/24 ,  B29C45/0013 ,  B29C47/0004 ,  B29C47/0009 ,  B29C47/0019 ,  B29C47/0021 ,  B29C47/0023 ,  B29C47/0038 ,  C08J3/226 ,  G06F17/30707 ,  G06N3/08

摘要： In order to accurately learn a function for evaluating documents, even in the case where sample documents having missing feature values are included as training data, a document evaluation apparatus is provided with a data classification unit (3) that classifies a set of sample documents based on missing patterns of a first feature vector, a first learning unit (4) that uses feature values that are not missing in the first feature vector and evaluation values to learn a first function for calculating a first score which is a weighted evaluation value for each classification, a feature vector generation unit (5) that computes a feature value corresponding to each classification using the first score, and generates a second feature vector having the computed feature values, and a second learning unit (6) that uses the second feature vector and the evaluation values to learn a second function for calculating a second score for evaluating documents targeted for evaluation.

摘要翻译： 为了准确地学习用于评价文档的功能，即使在作为训练数据包含具有缺失特征值的样本文档的情况下，文档评价装置设置有数据分类单元（3），用于对一组样本文档进行分类 在第一特征向量的缺失模式上，使用在第一特征向量中不缺失的特征值的第一学习单元（4）和评估值来学习用于计算作为每个的加权评估值的第一分数的第一函数 分类，使用第一分数计算与每个分类对应的特征值的特征向量生成单元（5），并生成具有计算出的特征量的第二特征向量，以及第二学习单元（6），其使用第二特征向量 以及评估值，以学习用于计算用于评估用于评估的文档的第二分数的第二函数。

公开(公告)号：US20130282727A1

公开(公告)日：2013-10-24

申请号：US13978811

申请日：2012-01-06

申请人： Yusuke Muraoka ,  Dai Kusui ,  Hironori Mizuguchi ,  Yukitaka Kusumura

发明人： Yusuke Muraoka ,  Dai Kusui ,  Hironori Mizuguchi ,  Yukitaka Kusumura

IPC分类号： G06F17/30

CPC分类号： G06F16/285 ,  G06F16/313 ,  G06F17/2785

摘要： The present invention more suitably determines whether a combination of words is an unexpected combination by the use of a smaller corpus. Disclosed is an unexpectedness determination system provided with: category identifying means which identifies a category to which a word belongs; category co-occurrence frequency identifying means which identifies a category co-occurrence frequency between two categories; unexpectedness index calculating means which calculates an index representing a degree of unexpectedness of a combination of two words. The category identifying means identifies a first category, to which an inputted first word belongs, and a second category, to which an inputted second word belongs, the category co-occurrence frequency identifying means identifies the category co-occurrence frequencies between the first category and categories other than the first category, and the unexpectedness index calculating means calculates an index representing the degree of unexpectedness of a combination of the first word and the second word on the basis of the category co-occurrence frequency identified by the category co-occurrence frequency identifying means.

摘要翻译： 本发明更合适地通过使用较小的语料库来确定单词的组合是否是意外的组合。 公开了一种意外确定系统，其具有：识别单词所属的类别的类别识别装置; 类别同现频率识别装置，其识别两个类别之间的类别同现频率; 意外指标计算装置，其计算表示两个词组合的意外程度的指标。 类别识别装置识别输入的第一个字所属的第一类别和所输入的第二个字属于的第二类别，类别同现频率识别装置识别第一类和第二类之间的类别同现频率 除了第一类别之外的类别，并且意外指标计算装置基于由类别同现频率识别的类别同现频率来计算表示第一个字和第二个字的组合的意外程度的指标 识别手段。

公开(公告)号：US20130007021A1

公开(公告)日：2013-01-03

申请号：US13583805

申请日：2010-12-28

申请人： Hironori Mizuguchi ,  Yukitaka Kusumura ,  Yusuke Muraoka ,  Dai Kusui

发明人： Hironori Mizuguchi ,  Yukitaka Kusumura ,  Yusuke Muraoka ,  Dai Kusui

IPC分类号： G06F17/30

CPC分类号： G06F17/3061 ,  G06F17/30882

摘要： A linkage information output apparatus includes: a linkage information retrieval unit for acquiring, upon receiving source information, destination information linked with the source information, a frequency of occurrence of the source information, a frequency of occurrence of linked each of the destination information, and a frequency of occurrence of a link of the source information and each of the destination information from a linkage information accumulation unit; a recognition degree calculation unit calculating, based on each acquired frequency of occurrence, a recognition degree of the source information, a recognition degree of each acquired destination information, and a recognition degree of each link; and a high interest information narrowing unit selecting destination information to output from among each destination information based on a combination of two or more among a recognition degree of the source information, a recognition degree of the destination information, and a recognition degree of the link.

摘要翻译： 连动信息输出装置包括：联动信息检索单元，用于在接收到源信息时获取与源信息相关联的目的地信息，源信息的出现频率，链接的每个目的地信息的发生频率，以及 来自链接信息存储单元的源信息和每个目的地信息的链接的出现频率; 识别度计算单元，基于每个获取的出现频率，计算源信息的识别度，每个获取的目的地信息的识别度和每个链接的识别度; 以及高感兴趣度信息缩小单元，基于源信息的识别度，目的地信息的识别度和链接的识别度之间的两个或更多个的组合，从每个目的地信息中选择目的地信息。

公开(公告)号：US20140114930A1

公开(公告)日：2014-04-24

申请号：US14127592

申请日：2012-12-19

申请人： Yusuke Muraoka ,  Dai Kusui ,  Hironori Mizuguchi ,  Yukitaka Kusumura

发明人： Yusuke Muraoka ,  Dai Kusui ,  Hironori Mizuguchi ,  Yukitaka Kusumura

IPC分类号： G06F17/30

CPC分类号： G06F16/93 ,  G06Q50/10

摘要： In order to calculate a reliability that serves as an index of reliableness of an evaluator who evaluated a document, a reliability calculation apparatus (2) is provided with a reliability calculation unit (21) that specifies an evaluation by each evaluator with respect to each author, based on first information specifying respective correspondence relationships between documents targeted for evaluation, evaluators who evaluated the documents and contents of the evaluations, and second information specifying respective correspondence relationships between the documents and authors of the documents, and calculates the reliability of each evaluator, based on the specified evaluation with respect to each author.

摘要翻译： 为了计算作为评价文档的评价者的可靠性的指标的可靠性，可靠性计算装置（2）具有可靠性计算部（21），该可靠性计算部（21）针对各作者指定了各评价者的评价 基于指定评价对象的文档和评价内容的评价者的评价用对象关系的第一信息以及规定文件与作者之间的对应关系的第二信息，并计算各评价者的可靠性， 基于对每位作者的具体评估。