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公开(公告)号：US20130233066A1
公开(公告)日：2013-09-12
申请号：US13885349
申请日：2011-12-13
IPC分类号： G01M17/02
CPC分类号： G01M17/021
摘要： To effectively suppress a shift of a rotating axis of an upper chuck with respect to a rotating axis of a lower chuck due to a separating force. A tire testing device (1) includes: vertical frames (30a, 30b) which are supported by a lower frame (20); a beam (40) which bridges between the vertical frames (30a, 30b) and is movable in the vertical direction; an upper chuck (45) which is attached to the center of the beam (40), the center corresponding to the center of the beam in the longitudinal direction; and a lower chuck (25) which is attached to the lower frame. When viewed from the vertical direction, a rotating axis of an upper rotating member (47) is positioned at the center of a straight line formed by connecting supporting points where each of the vertical frames (30a, 30b) support the beam (40).
摘要翻译： 为了有效地抑制由于分离力，上卡盘的旋转轴线相对于下卡盘的旋转轴线的偏移。 轮胎测试装置（1）包括：由下框架（20）支撑的垂直框架（30a，30b）; 在所述垂直框架（30a，30b）之间桥接并且能够在垂直方向上移动的梁（40）; 附接到梁（40）的中心的上卡盘（45），中心对应于梁的纵向方向的中心; 以及附接到下框架的下卡盘（25）。 当从垂直方向观察时，上部旋转构件（47）的旋转轴线位于通过连接支撑点形成的直线的中心，其中每个垂直框架（30a，30b）支撑梁（40）。
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公开(公告)号：US07513265B2
公开(公告)日：2009-04-07
申请号：US10688889
申请日：2003-10-21
申请人： Tetsuya Yoshikawa , Yoichi Inoue , Katsumi Watanabe , Kaoru Masuda , Katsuyuki Iijima , Tomomi Iwata , Yusuke Muraoka , Kimitsugu Saito , Ikuo Mizobata
发明人： Tetsuya Yoshikawa , Yoichi Inoue , Katsumi Watanabe , Kaoru Masuda , Katsuyuki Iijima , Tomomi Iwata , Yusuke Muraoka , Kimitsugu Saito , Ikuo Mizobata
IPC分类号： B08B6/00
CPC分类号： H01L21/67017 , B08B7/0021
摘要： Disclosed is a high pressure processing method for subjecting a processing object to a high pressure processing using a high pressure fluid. In this method, the high pressure fluid is brought into collision with the surface of the processing object placed in a high pressure processing chamber, and then distributed along the surface of the processing object in an outward direction beyond the processing object.
摘要翻译： 公开了一种用于使处理对象使用高压流体进行高压处理的高压处理方法。 在该方法中，使高压流体与放置在高压处理室中的处理对象的表面碰撞，然后沿着处理对象的表面向外方向分布超过处理对象。
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3.发明授权公开(公告)号：US07335596B2
公开(公告)日：2008-02-26
申请号：US11157862
申请日：2005-06-22
IPC分类号： H01L21/44
CPC分类号： H01L21/2855 , H01L21/76882
摘要： Cu-based interconnections are fabricated in a semiconductor device by depositing a thin film of Cu or Cu alloy on a dielectric film by sputtering, the dielectric film having trenches and/or via holes at least one groove and being arranged on or above a substrate, and carrying out high temperature and high pressure treatment to thereby embed the Cu or Cu alloy into the trenches and/or via holes, in which the sputtering is carried out at a substrate temperature of −20° C. to 0° C. using, as a sputtering gas, a gaseous mixture containing hydrogen gas and an inert gas in a ratio in percentage of 5:95 to 20:80.
摘要翻译： 在半导体器件中通过溅射在电介质膜上沉积Cu或Cu合金薄膜来形成Cu基互连，所述电介质膜具有至少一个沟槽和/或通孔至少一个沟槽并且布置在衬底上或上方， 进行高温高压处理，从而将Cu或Cu合金嵌入沟槽和/或通孔中，在基板温度为-20℃〜0℃下进行溅射， 作为溅射气体，含有比例为5:95至20:80的氢气和惰性气体的气体混合物。
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4.发明申请公开(公告)号：US20060019496A1
公开(公告)日：2006-01-26
申请号：US11157862
申请日：2005-06-22
IPC分类号： H01L21/4763 , H01L21/44
CPC分类号： H01L21/2855 , H01L21/76882
摘要： Cu-based interconnections are fabricated in a semiconductor device by depositing a thin film of Cu or Cu alloy on a dielectric film by sputtering, the dielectric film having trenches and/or via holes at least one groove and being arranged on or above a substrate, and carrying out high temperature and high pressure treatment to thereby embed the Cu or Cu alloy into the trenches and/or via holes, in which the sputtering is carried out at a substrate temperature of −20° C. to 0° C. using, as a sputtering gas, a gaseous mixture containing hydrogen gas and an inert gas in a ratio in percentage of 5:95 to 20:80.
摘要翻译： 在半导体器件中通过溅射在电介质膜上沉积Cu或Cu合金薄膜来形成Cu基互连，所述电介质膜具有至少一个沟槽和/或通孔至少一个沟槽并且布置在衬底上或上方， 进行高温高压处理，从而将Cu或Cu合金嵌入沟槽和/或通孔中，在基板温度为-20℃〜0℃下进行溅射， 作为溅射气体，含有比例为5:95至20:80的氢气和惰性气体的气体混合物。
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公开(公告)号：US20110000292A1
公开(公告)日：2011-01-06
申请号：US12919027
申请日：2009-02-24
IPC分类号： G01M17/02
CPC分类号： G01M17/021
摘要： Provided is a tire testing machine capable of measuring a force generated in a tire with high precision. The tire testing machine includes a spindle shaft (20) for holding a tire (T), a housing (22) for rotatably supporting the spindle shaft (20) through a rolling bearing (25), a running device (10) having a surface rotated by rotational driving and imparting a rotational force to a tire contacting the surface, and a measurement device (4) which is provided in the housing (22) and measures a force and moment generated in the spindle shaft (20) when the tire (T) is running. Furthermore, the tire testing machine includes a torque canceller (5) for preventing the spindle shaft (20) from such an impact that rotational friction torque (My1) generated by rotational friction, which is received by the spindle shaft (20) in the housing when the spindle shaft (20) rotates, is imparted onto the shaft (20). The torque canceller (5) is equipped with a motor (30) for the spindle shaft, which imparts a torque for cancelling the impact of the rotational friction torque (My1) to the spindle shaft (20).
摘要翻译： 提供一种能够高精度地测量轮胎中产生的力的轮胎试验机。 轮胎试验机包括用于保持轮胎（T）的主轴（20），用于通过滚动轴承（25）可旋转地支撑主轴（20）的壳体（22），具有表面 通过旋转驱动旋转并向接触表面的轮胎赋予旋转力;以及测量装置（4），其设置在所述壳体（22）中，并且当所述轮胎（22）被设置在所述壳体（22）中时，测量在所述主轴（20） T）正在运行。 此外，轮胎试验机包括：扭矩消除器（5），用于防止主轴（20）受到旋转摩擦产生的旋转摩擦力（My1）的冲击，所述旋转摩擦力由主轴（20）在壳体 当主轴（20）旋转时，被施加到轴（20）上。 转矩消除器（5）配备有用于主轴的马达（30），该马达用于抵消旋转摩擦转矩（My1）对主轴（20）的冲击的转矩。
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公开(公告)号：US06916735B2
公开(公告)日：2005-07-12
申请号：US10259501
申请日：2002-09-30
申请人： Takao Fujikawa , Tetsuya Yoshikawa
发明人： Takao Fujikawa , Tetsuya Yoshikawa
IPC分类号： H01L23/522 , H01L21/3205 , H01L21/768 , H01L21/4763 , H01L21/76
CPC分类号： H01L21/76882 , H01L21/7682
摘要： A temporary support layer 2 is formed on a semiconductor substrate 1, and the temporary support layer 2 is provided with a hole 4 that reaches the semiconductor substrate 1. The hole 4 is filled in with a conductor material 5, and by pressurizing the conductor material 5, the conductor material 5 and the semiconductor substrate 1 are pressure-bonded. Thereby, an aerial wiring structure whose bonding strength is improved and that has excellent self-sustainability can be obtained.
摘要翻译： 在半导体衬底1上形成临时支撑层2，并且临时支撑层2设置有到达半导体衬底1的孔4.孔4填充有导体材料5，并且通过对导体材料 如图5所示，导体材料5和半导体基板1被压接。 由此，可以获得接合强度提高并且具有优异的自持续性的空中布线结构。
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公开(公告)号：US08136393B2
公开(公告)日：2012-03-20
申请号：US12919027
申请日：2009-02-24
IPC分类号： G01M17/02
CPC分类号： G01M17/021
摘要： Provided is a tire testing machine capable of measuring a force generated in a tire with high precision. The tire testing machine includes a spindle shaft (20) for holding a tire (T), a housing (22) for rotatably supporting the spindle shaft (20) through a rolling bearing (25), a running device (10) having a surface rotated by rotational driving and imparting a rotational force to a tire contacting the surface, and a measurement device (4) which is provided in the housing (22) and measures a force and moment generated in the spindle shaft (20) when the tire (T) is running. Furthermore, the tire testing machine includes a torque canceller (5) for preventing the spindle shaft (20) from such an impact that rotational friction torque (My1) generated by rotational friction, which is received by the spindle shaft (20) in the housing when the spindle shaft (20) rotates, is imparted onto the shaft (20). The torque canceller (5) is equipped with a motor (30) for the spindle shaft, which imparts a torque for cancelling the impact of the rotational friction torque (My1) to the spindle shaft (20).
摘要翻译： 提供一种能够高精度地测量轮胎中产生的力的轮胎试验机。 轮胎试验机包括用于保持轮胎（T）的主轴（20），用于通过滚动轴承（25）可旋转地支撑主轴（20）的壳体（22），具有表面 通过旋转驱动旋转并向接触表面的轮胎赋予旋转力;以及测量装置（4），其设置在所述壳体（22）中，并且当所述轮胎（22）被设置在所述壳体（22）中时，测量在所述主轴（20） T）正在运行。 此外，轮胎试验机包括：扭矩消除器（5），用于防止主轴（20）受到旋转摩擦产生的旋转摩擦力（My1）的冲击，所述旋转摩擦力由主轴（20）在壳体 当主轴（20）旋转时，被施加到轴（20）上。 转矩消除器（5）配备有用于主轴的马达（30），该马达用于抵消旋转摩擦转矩（My1）对主轴（20）的冲击的转矩。
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公开(公告)号：US5103766A
公开(公告)日：1992-04-14
申请号：US540124
申请日：1990-06-19
申请人： Tetsuya Yoshikawa , Hakumi Hasegawa
发明人： Tetsuya Yoshikawa , Hakumi Hasegawa
CPC分类号： H01J37/32055 , C23C14/325
摘要： A vacuum arc deposition device having electrode switching means comprising two or more electrodes consisting of vacuum arc vapor evaporation source materials and a substrate to which films are formed by means of vacuum arc vapor deposition, each of the electrodes and the substrate being contained in a vacuum chamber capable of introducing a reactive gas, wherein the electrodes are connected to arc discharging DC power supplies by way of polarity switching means so that each of the electrodes functions as a cathode and an anode alternately. Films, in particular, of insulative property can stably be vapor deposited on a substrate for a long period of time continuously.
摘要翻译： 一种具有电极切换装置的真空电弧沉积装置，包括由真空电弧蒸发源材料组成的两个或更多个电极和通过真空电弧气相沉积形成膜的基板，每个电极和基板被包含在真空中 能够引入反应性气体的室，其中电极通过极性切换装置与电弧放电直流电源连接，使得每个电极交替地用作阴极和阳极。 特别是具有绝缘性的膜可以稳定地长时间连续地蒸镀在基板上。
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公开(公告)号：US09046444B2
公开(公告)日：2015-06-02
申请号：US13885349
申请日：2011-12-13
CPC分类号： G01M17/021
摘要： To effectively suppress a shift of a rotating axis of an upper chuck with respect to a rotating axis of a lower chuck due to a separating force. A tire testing device (1) includes: vertical frames (30a, 30b) which are supported by a lower frame (20); a beam (40) which bridges between the vertical frames (30a, 30b) and is movable in the vertical direction; an upper chuck (45) which is attached to the center of the beam (40), the center corresponding to the center of the beam in the longitudinal direction; and a lower chuck (25) which is attached to the lower frame. When viewed from the vertical direction, a rotating axis of an upper rotating member (47) is positioned at the center of a straight line formed by connecting supporting points where each of the vertical frames (30a, 30b) support the beam (40).
摘要翻译： 为了有效地抑制由于分离力，上卡盘的旋转轴线相对于下卡盘的旋转轴线的偏移。 轮胎测试装置（1）包括：由下框架（20）支撑的垂直框架（30a，30b）; 在所述垂直框架（30a，30b）之间桥接并且能够在垂直方向上移动的梁（40）; 附接到梁（40）的中心的上卡盘（45），中心对应于梁的纵向方向的中心; 以及附接到下框架的下卡盘（25）。 当从垂直方向观察时，上部旋转构件（47）的旋转轴线位于通过连接支撑点形成的直线的中心，其中每个垂直框架（30a，30b）支撑梁（40）。
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公开(公告)号：US08342020B2
公开(公告)日：2013-01-01
申请号：US12433283
申请日：2009-04-30
IPC分类号： G01M1/16
CPC分类号： G01M17/022 , G01M1/045
摘要： A tire testing machine according to the present invention, which can measure both uniformity and dynamic balance of a tire T, comprises a spindle for driving the tire T to rotate about a vertical axis, a spindle housing which supports the spindle rotatably, and a rotating drum rotatable about an axis parallel to an axis of the spindle and movable toward and away from the tire T. The spindle housing is fixed to a base through a piezoelectric sensor so that it can bear a pressing force provided from the rotating drum. The piezoelectric sensor is disposed within a plane including the axis of the spindle and perpendicular to the pressing force. With this structure, dynamic balance of the tire can be measured accurately and easily.
摘要翻译： 根据本发明的能够测量轮胎T的均匀性和动平衡的轮胎试验机包括用于驱动轮胎T绕轴线旋转的心轴，可旋转地支撑主轴的主轴壳体和旋转 滚筒围绕平行于心轴的轴线的轴线旋转并且可以朝向和远离轮胎T移动。主轴壳体通过压电传感器固定到基座，使得其能够承受从旋转滚筒提供的按压力。 压电传感器设置在包括主轴的轴线并垂直于按压力的平面内。 通过这种结构，可以准确，容易地测量轮胎的动平衡。
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