OZONE GENERATOR AND OZONE GENERATION METHOD
    11.
    发明申请
    OZONE GENERATOR AND OZONE GENERATION METHOD 审中-公开
    臭氧发生器和臭氧发生方法

    公开(公告)号:US20160023900A1

    公开(公告)日:2016-01-28

    申请号:US14442011

    申请日:2013-11-11

    Applicant: WACOM

    Inventor: Masaki KUSUHARA

    Abstract: In order to generate ozone, which is used for ashing and plasma cleaning, plasma generated in a decompressed chamber is conventionally used. But it is difficult to reduce the production cost of an ozone generation, because facility cost and process cost are expensive in a decompressed process. According to the present invention, ozone is generated by atmospheric pressure plasma CVD using dielectric barrier discharge generated by a plasma head where a plurality of plasma head unit members are installed in parallel to generate plasma by applying electric field or magnetic field via a dielectric member. Stable glow discharge plasma is formed even under atmospheric pressure by dielectric barrier discharge. Then, ozone can be generated under atmospheric pressure, and semiconductor device with low cost can be fabricated.

    Abstract translation: 为了产生用于灰化和等离子体清洗的臭氧,通常使用在减压室中产生的等离子体。 但由于设备成本和工艺成本在减压过程中昂贵,所以难以降低臭氧发生的生产成本。 根据本发明,通过使用由等离子体头产生的介质阻挡放电,通过大气压等离子体CVD产生臭氧,其中多个等离子体头单元构件并联安装以通过经由电介质构件施加电场或磁场而产生等离子体。 通过电介质阻挡放电,甚至在大气压下形成稳定的辉光放电等离子体。 然后,可以在大气压下产生臭氧,可以制造低成本的半导体器件。

    OZONE GENERATOR
    12.
    发明申请
    OZONE GENERATOR 有权
    臭氧发生器

    公开(公告)号:US20150274526A1

    公开(公告)日:2015-10-01

    申请号:US14666781

    申请日:2015-03-24

    Abstract: An ozone generator includes a housing having an internal cavity and a plurality of electrode pairs located in the internal cavity. The electrode pairs each contain two electrodes arranged at a distance of a predetermined gap length, and a discharge space is formed between the two electrodes, whereby ozone is produced when a source gas flows at least between the two electrodes and a discharge is generated between the two electrodes. The ozone generator has a non-discharge portion in an arbitrary cross-section having a normal direction parallel to a main flow direction of the source gas in the internal cavity.

    Abstract translation: 臭氧发生器包括具有内腔的壳体和位于内腔中的多个电极对。 电极对各包含布置在预定间隙长度的距离处的两个电极,并且在两个电极之间形成放电空间,从而当源气体至少在两个电极之间流动时产生臭氧,并且在两个电极之间产生放电 两个电极。 臭氧发生器具有在内腔中具有与源气体的主流动方向平行的法线方向的任意截面的非排出部。

    SYSTEMS AND METHODS FOR NON-THERMAL PLASMA OVER LIQUID DIRECT ION INJECTION
    14.
    发明申请
    SYSTEMS AND METHODS FOR NON-THERMAL PLASMA OVER LIQUID DIRECT ION INJECTION 有权
    液体直接注射非热等离子体系统和方法

    公开(公告)号:US20140246364A1

    公开(公告)日:2014-09-04

    申请号:US13782874

    申请日:2013-03-01

    Applicant: EON LABS LLC

    Abstract: A system for performing ozone water treatment comprises a voltage supply circuit and a plasma eductor reactor. The voltage supply circuit includes an H-bridge controller and driver, a transformer, and an output port. The H-bridge controller and driver are configured to switch the electrical polarity of a pair of terminals. A primary of the transformer is connected to the H-bridge driver and controller. A secondary of the transformer connects in parallel with a first capacitor and in series with an inductor and a second capacitor. The output port connects in parallel with the second capacitor. The plasma eductor reactor includes an electric field generator, a flow spreader, and a diffuser. The electric field generator includes a pair of electrodes that generate an electric field. The flow spreader supplies a stream of oxygen. The diffuser supplies a stream of water. The streams of water and oxygen pass through the electric field.

    Abstract translation: 用于进行臭氧水处理的系统包括电压供应电路和等离子体喷射反应器。 电源电路包括H桥控制器和驱动器,变压器和输出端口。 H桥控制器和驱动器配置为切换一对端子的电极性。 变压器的主要连接到H桥驱动器和控制器。 变压器的次级与第一电容器并联连接,并与电感器和第二电容器串联。 输出端口与第二电容器并联连接。 等离子体喷射器反应器包括电场发生器,扩散器和扩散器。 电场发生器包括产生电场的一对电极。 散流器提供氧气流。 扩散器供应一束水。 水和氧气流穿过电场。

    OZONE GENERATION SYSTEM WITH PRECISION CONTROL
    15.
    发明申请
    OZONE GENERATION SYSTEM WITH PRECISION CONTROL 审中-公开
    具有精密控制的臭氧发生系统

    公开(公告)号:US20140042012A1

    公开(公告)日:2014-02-13

    申请号:US13989039

    申请日:2011-11-22

    Abstract: There is described herein a direct current power supply which offers improved control over an output signal. An input signal generated by an alternating current source is received and chopped by a solid state relay. The chopped signal is rectified by a bridge rectifier before being filtered by an “LC” (induction coil-capacitor) or “CLC” (capacitor-induction coil-capacitor) filter. The output signal can then be used as a direct current power supply signal. This power supply may be used in various types of ozone generation systems.

    Abstract translation: 这里描述了直流电源,其提供对输出信号的改进的控制。 由交流电源产生的输入信号由固态继电器接收和切断。 在通过“LC”(感应线圈电容器)或“CLC”(电容 - 感应线圈 - 电容器)滤波器)滤波之前,由桥式整流器对斩波信号进行整流。 然后可以将输出信号用作直流电源信号。 该电源可用于各种类型的臭氧发生系统。

    SYRINGE, SYSTEM AND METHOD FOR DELIVERING OXYGEN-OZONE
    16.
    发明申请
    SYRINGE, SYSTEM AND METHOD FOR DELIVERING OXYGEN-OZONE 有权
    用于输送氧气的SYRINGE,系统和方法

    公开(公告)号:US20130142705A1

    公开(公告)日:2013-06-06

    申请号:US13312333

    申请日:2011-12-06

    CPC classification number: C01B13/11 C01B2201/22 C01B2201/64

    Abstract: In accordance with at least one exemplary embodiment, a syringe, method and system for delivering a therapeutic amount of ozone are disclosed. An exemplary syringe can have a gas chamber and one or more electrodes. A portion of at least one electrode can be within the gas chamber. Alternatively, singularly or in conjunction, one or both electrodes can be attached to the outside of an exemplary syringe. One or more electrical contact points can be outside the gas chamber. Each electrical contact point can be connected to an electrode. Oxygen gas can provided within the gas chamber of the exemplary syringe. A medical ozone generator can be connected to the syringe via the electrical contact points. Corona discharge can be effectuated via the electrodes, which can result in an amount of ozone gas can being produced from the oxygen gas.

    Abstract translation: 根据至少一个示例性实施例,公开了一种用于递送治疗量的臭氧的注射器,方法和系统。 示例性的注射器可以具有气体室和一个或多个电极。 至少一个电极的一部分可以在气体室内。 或者,单独地或联合地,一个或两个电极可以附接到示例性注射器的外部。 一个或多个电接触点可以在气室外部。 每个电接触点可以连接到电极。 氧气可以设置在示例性注射器的气室内。 医用臭氧发生器可以通过电接点与注射器连接。 可以通过电极实现电晕放电,这可以导致从氧气产生臭氧气体的量。

    INTEGRATED OZONE GENERATOR SYSTEM WITH REMOVABLE CONTACT PLATE AND METHOD FOR INDIVIDUALLY REPLACING ELECTRODE ASSEMBLIES OF SUCH SYSTEM
    17.
    发明申请
    INTEGRATED OZONE GENERATOR SYSTEM WITH REMOVABLE CONTACT PLATE AND METHOD FOR INDIVIDUALLY REPLACING ELECTRODE ASSEMBLIES OF SUCH SYSTEM 审中-公开
    具有可拆卸接触板的集成臭氧发生器系统和用于个别更换这种系统的电极组件的方法

    公开(公告)号:US20130058828A1

    公开(公告)日:2013-03-07

    申请号:US13667635

    申请日:2012-11-02

    Applicant: Wayne Wolf

    Inventor: Wayne Wolf

    Abstract: An ozone generating apparatus includes a base container for holder water and a head assembly connected to the upper edge of the base container, the head assembly containing ozone generating cells, each having a dielectric tube and an electrode assembly coaxially disposed with the associated dielectric tube. The dielectric tubes and electrode assemblies are disposed and connected such that the tube and/or electrode assembly of each ozone generating cell can be accessed and replaced independently of all other ozone generating cells, and such that the possibility of cascade failure of all remaining ozone generating cells upon failure of a single cell is substantially eliminated.

    Abstract translation: 臭氧发生装置包括用于保持水的基底容器和连接到基底容器的上边缘的头部组件,头部组件包含臭氧发生单元,每个具有电介质管和与相关联的介电管同轴地布置的电极组件。 电介质管和电极组件被布置和连接,使得每个臭氧发生电池的管和/或电极组件可独立于所有其它臭氧发生电池被访问和替代,并且使得所有剩余的臭氧发生的级联故障的可能性 基本上消除了单个电池故障时的电池。

    Apparatus for generating ozone and/or O1 using a high energy plasma discharge
    18.
    发明授权
    Apparatus for generating ozone and/or O1 using a high energy plasma discharge 有权
    使用高能等离子体放电产生臭氧和/或O1的装置

    公开(公告)号:US07943098B2

    公开(公告)日:2011-05-17

    申请号:US10589148

    申请日:2005-03-03

    Abstract: An electro chemical conversion cell that can break down certain gasses to provide ozone and monovalent oxygen from a supplied volume of a suitable 02-containing gas. The conversion cell is provided with at least one metal mesh electrode within a generator reaction chamber, and a power supply which is adapted to supply a high alternating electric current voltage to at least partially break-down O2 in the input gas to yield ozone. A fluid flow passage extends through the reaction chamber as a generally elongated passage through the reaction cavity. The fluid flow passage extends from an upstream end, where the O2-containing gas is initially supplied into the housing, to a downstream end where treated gas either flows outwardly therefrom under pressure or is evacuated from the housing. In a simplified construction, the fluid flow passage is delineated by a series of electrically insulating plates and/or spacers which are used to partition the reaction cavity.

    Abstract translation: 一种电化学转化电池,其可以从供应体积的合适的含氧气体中分解某些气体以提供臭氧和一价氧。 转换单元在发电机反应室内设置有至少一个金属网状电极,以及适于提供高交流电压至少部分地分解输入气体中的氧气以产生臭氧的电源。 流体流动通道作为通过反应腔的大致细长通道延伸穿过反应室。 流体流动通道从上游端延伸,其中含O2的气体最初被供应到壳体中,到下游端,其中处理气体在压力下从其向外流动或者从壳体排出。 在简化的结构中,流体流动通道被用于分隔反应腔的一系列电绝缘板和/或间隔物所描绘。

    Ozone generating apparatus
    19.
    发明授权
    Ozone generating apparatus 有权
    臭氧发生装置

    公开(公告)号:US07713495B2

    公开(公告)日:2010-05-11

    申请号:US11097336

    申请日:2005-04-04

    Abstract: An ozone generating apparatus is provided which includes a pair of electrodes for producing a discharge by the application of an ac voltage therebetween, and at least one dielectric provided between the pair of electrodes. A source gas containing oxygen is provided into a discharge space in which the discharge is produced to generate ozone by the action of the discharge. A surface lying between at least one of the pair of electrodes and the discharge space and in contact with the discharge has a surface resistivity of 104 Ω to 1011 Ω. The source gas provided into the discharge space includes ultrapure oxygen having a purity of not less than 99.9%.

    Abstract translation: 提供一种臭氧发生装置,其包括一对用于通过施加交流电压产生放电的电极和设置在所述一对电极之间的至少一个电介质。 含有氧的源气体被提供到放电空间中,在放电空间中产生放电,以通过放电的作用产生臭氧。 位于一对电极中的至少一个与放电空间之间并与放电接触的表面具有104和OHgr的表面电阻率; 至1011&OHgr。 设置在放电空间中的源气体包括纯度不低于99.9%的超纯氧。

    OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR
    20.
    发明申请
    OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR 审中-公开
    其使用的臭氧和臭氧设备的操作方法

    公开(公告)号:US20100084259A1

    公开(公告)日:2010-04-08

    申请号:US12573156

    申请日:2009-10-05

    Abstract: The present invention offers an operation method of an ozonizer and an ozonizer apparatus to improve ozone gas purity and to achieve long and safety electrolysis operation in such manner that, during normal operation of the ozonizer, ozone gas is generated at the anode in the anode compartment and hydrogen gas is generated at the cathode in the cathode compartment; and only when the ozonizer is stopped and operation is switched to protective current operation during which minute electric current is supplied to protect said anode, oxygen-containing gas is supplied to said cathode compartment after electrolyte and hydrogen gas in said cathode compartment are all drained out, so that said cathode is made function as a gas electrode for oxygen reduction reaction, using said cathode as a reversible electrode with two functions as a gas generation electrode and a gas electrode, thereby during normal operation, ozone is generated efficiently, and during the protective current operation, when safety is a key issue, hydrogen gas is not generated at the cathode and mingling of hydrogen gas into ozone gas generated at the anode is prevented.

    Abstract translation: 本发明提供一种臭氧发生器和臭氧发生装置的操作方法,以改善臭氧气体的纯度并实现长时间和安全的电解操作,使得在臭氧发生器的正常操作期间,在阳极室的阳极处产生臭氧气体 在阴极室的阴极产生氢气; 并且只有当臭氧发生器停止并且操作切换到保护电流操作时,在该保护电流操作期间供应微小的电流以保护所述阳极,则在所述阴极室中的电解液和氢气全部被排出之后,含氧气体被供应到所述阴极室 使得所述阴极被用作用于氧还原反应的气体电极,使用所述阴极作为具有两个功能的可逆电极作为气体发生电极和气体电极,从而在正常操作期间有效地产生臭氧,并且在 保护电流操作,当安全是关键问题时,在阴极处不产生氢气,并且防止氢气混入阳极产生的臭氧气体中。

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