公开(公告)号：US20050143849A1

公开(公告)日：2005-06-30

申请号：US11061813

申请日：2005-02-22

申请人： Shunji Hayashi

发明人： Shunji Hayashi

IPC分类号： G01M99/00 ,  G05B19/418 ,  G05B23/02 ,  G06Q10/10 ,  G06Q50/00 ,  G06Q50/04 ,  H01L21/02 ,  G05B21/02

CPC分类号： G06Q10/10 ,  G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32221 ,  Y02P90/14 ,  Y02P90/22

摘要： In a method of controlling a manufacturing process, a Mahalanobis space of plural manufacturing control parameters is generated on the basis of first sampled data. Then, a Mahalanobis distance from the Mahalanobis space and second sampled data is calculated. A manufacturing process is determined to be under a malfunction operating condition by comparing the Mahalanobis distance and a threshold value.

公开(公告)号：US20240210927A1

公开(公告)日：2024-06-27

申请号：US17907181

申请日：2020-10-22

申请人： KABUSHIKI KAISHA TOSHIBA ,  Toshiba Digital Solutions Corporation

发明人： Katsuhisa CHIBA ,  Masanori TAJIMA ,  Shinya WATANABE

IPC分类号： G05B19/418

CPC分类号： G05B19/41875 ,  G05B2219/31472 ,  G05B2219/31477

摘要： [PROBLEM] To visually display the manufacturing statuses of products manufactured through a plurality of manufacturing processes in order and changes of process characteristic factors caused in the manufacturing processes.
[SOLVING MEANS] A visualization system according to an embodiment stores manufacturing log information including start times and end times of manufacturing processes of products grouped in manufacturing units and manufactured through a plurality of manufacturing processes in order, and chronological history information of process characteristic factors corresponding to factors affecting quality characteristics in the manufacturing processes. A time axis for the process characteristic factors in synchronization with the time course of the manufacturing log information is created, and a display object representing a state or a change of each of the process characteristic factors is created based on the chronological history information and placed on the time axis to create a time line object of each of the process characteristic factors. A process characteristic factor timeline screen including the timeline objects of the respective process characteristic factors arranged in parallel is displayed on a display apparatus.

公开(公告)号：US20110046765A1

公开(公告)日：2011-02-24

申请号：US12809749

申请日：2008-12-17

申请人： Munetaka Yamagami

发明人： Munetaka Yamagami

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32187 ,  G05B2219/45031 ,  H01L21/67109 ,  H01L22/20 ,  H01L2924/0002 ,  Y02P90/12 ,  Y02P90/22 ,  H01L2924/00

摘要： An information processing device includes a target value receiving unit receiving one or more types of target values in a predetermined semiconductor manufacturing process; a parameter acquiring unit acquiring values of parameters during the semiconductor manufacturing process; an execution result acquiring unit acquiring one or more types of execution results indicating results of the semiconductor manufacturing process; an accumulation unit associating the execution results, the target values, and the values of parameters with one another and accumulating the same; a correlation acquiring unit acquiring correlation information indicating correlations among the execution results, the target values, and the values of parameters; an assist information acquiring unit acquiring assist information related to parameters with high correlation with respect to the target values received by the target value receiving unit by using the correlation information; and an output unit outputting the assist information acquired by the assist information acquiring unit.

摘要翻译： 信息处理装置包括在预定的半导体制造过程中接收一种或多种类型的目标值的目标值接收单元; 参数获取单元，在半导体制造过程中获取参数值; 执行结果获取单元获取指示半导体制造过程的结果的一种或多种类型的执行结果; 累加单元，将执行结果，目标值和参数值相互关联并累加; 相关获取单元获取指示执行结果，目标值和参数值之间的相关性的相关信息; 辅助信息获取单元通过使用所述相关信息来获取与由所述目标值接收单元接收到的所述目标值具有高相关性的参数相关的辅助信息; 以及输出单元，输出由辅助信息获取单元获取的辅助信息。

公开(公告)号：US20090228839A1

公开(公告)日：2009-09-10

申请号：US12381232

申请日：2009-03-10

申请人： Ryotatsu Iga

发明人： Ryotatsu Iga

IPC分类号： G06F3/048

CPC分类号： G05B19/409 ,  G05B19/41875 ,  G05B2219/31467 ,  G05B2219/31472 ,  G05B2219/31477 ,  Y02P90/22

摘要： A plant information display apparatus and a plant information display method are provided. A defining section 11 defines correspondence relationships between all of plant data and softwares displaying the corresponding plant data. A plant data displaying section 12 expands and displays the plant data in a hierarchical manner. A plant data selection accepting section 13 accepts an operation of selecting the plant data on the screen displayed by the plant data displaying section 12. A software selection accepting section 14 displays a selecting screen for selecting one of the softwares, and accepts an operation of selecting the one of the softwares in accordance with an operation of the selecting screen. A extracting section 15 extracts the software or plant data based on the defining section 11.

摘要翻译： 提供植物信息显示装置和植物信息显示方法。 定义部分11定义所有工厂数据和显示相应工厂数据的软件之间的对应关系。 工厂数据显示部分12以分层方式扩展和显示工厂数据。 工厂数据选择接收部分13接受在工厂数据显示部分12所显示的画面上选择工厂数据的操作。软件选择接收部分14显示用于选择一个软件的选择画面，并接受选择操作 根据选择屏幕的操作，该软件中的一个。 提取部分15基于定义部分11提取软件或工厂数据。

公开(公告)号：US07454312B2

公开(公告)日：2008-11-18

申请号：US11375908

申请日：2006-03-15

申请人： Susan Weiher ,  Stefan Soens

发明人： Susan Weiher ,  Stefan Soens

IPC分类号： G06F15/00 ,  G06F17/18 ,  G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32221 ,  G05B2219/45031 ,  H01L21/67276 ,  H01L21/67288 ,  Y02P90/22

摘要： A computer-implemented method, system and computer program device are provided for monitoring production of semiconductor products to detect potential defect excursions. Equipment based data is collected reflecting equipment performance for a plurality of semiconductor manufacturing tools used for processing a plurality of semiconductor products. Also, product level data is collected reflecting product quality for the plurality of semiconductor products processed on the plurality of manufacturing tools. At least a portion of the product level data and at least a portion of the equipment based data are then correlated. At least one report is generated of the correlation of data.

摘要翻译： 提供了一种计算机实现的方法，系统和计算机程序设备，用于监控半导体产品的生产以检测潜在的缺陷偏移。 收集基于设备的数据反映用于处理多个半导体产品的多个半导体制造工具的设备性能。 此外，收集产品级数据，反映在多个制造工具上处理的多个半导体产品的产品质量。 然后将产品级数据和至少一部分基于设备的数据的至少一部分相关联。 生成数据的相关性至少有一个报告。

公开(公告)号：US20060287754A1

公开(公告)日：2006-12-21

申请号：US11471675

申请日：2006-06-21

申请人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

发明人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32057 ,  G05B2219/32097 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/20 ,  Y02P90/22

摘要： A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution system which prepares a processing recipe describing, as a first setting value in an actual manufacturing process, a value of the control parameter, an apparatus information collection section which collects an objective monitored value of the apparatus information in operation of the actual manufacturing process with the first setting value, a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value based on the correlation, a parameter calculation section which calculates a second setting value in the actual manufacturing process on the basis of the value of the feature quantity, and an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.

公开(公告)号：US20160004801A1

公开(公告)日：2016-01-07

申请号：US14771077

申请日：2014-03-07

申请人： NEC CORPORATION

发明人： Masanao Natsumeda

IPC分类号： G06F17/50

CPC分类号： G06F17/5009 ,  G05B23/0254 ,  G05B23/0272 ,  G05B2219/31455 ,  G05B2219/31477 ,  G06F11/323 ,  G06F11/3452

摘要： In invariant relation analysis, a correlation diagram with improved visibility is obtained.A system analysis device (100) includes a correlation model storage unit (112), and the display control unit (105). The correlation model storage unit (112) stores the correlation model expressing correlations between metrics in the system. The display control unit (105) divides a display region into n divided regions such that an area of a divided region i (1≦i≦n) is equal to or larger than an area of a divided region i+1. The display control unit 105 allocates each of the plurality of clusters obtained by tracking correlations contained in the correlation model to the divided region i sequentially selected from i=1, in the decreasing order of the number of metrics contained in each of the clusters, in such a way that the allocated number increases in accordance with increase in i. The display control unit 105 draws the cluster allocated to the respective divided region i in the divided region i.

摘要翻译： 在不变关系分析中，获得了可见度提高的相关图。 系统分析装置（100）包括相关模型存储单元（112）和显示控制单元（105）。 相关模型存储单元（112）存储表示系统中度量之间的相关性的相关模型。 显示控制单元（105）将显示区域划分为n个划分区域，使得分割区域i（1＆lt; nE; i＆nlE; n）的面积等于或大于分割区域i + 1的面积。 显示控制单元105按照包含在每个簇中的度量数目的递减顺序，将通过跟踪相关模型中包含的相关性获得的多个群集中的每一个分配到从i = 1顺序选择的分割区域i， 这样一种方式，分配的数量随着i的增加而增加。 显示控制单元105绘制分配给分割区域i中的相应分割区域i的簇。

公开(公告)号：US09043722B1

公开(公告)日：2015-05-26

申请号：US13739792

申请日：2013-01-11

申请人： SURFWAX, INC.

发明人： Thomas D. Holt

IPC分类号： G06F17/24 ,  G06F3/0484 ,  G06F17/30

CPC分类号： G06F17/246 ,  G05B2219/31477 ,  G06F3/0484 ,  G06F3/04842 ,  G06F17/2235 ,  G06F17/241 ,  G06F17/245 ,  G06F17/30604 ,  G06Q10/067 ,  G16H10/60 ,  G16H15/00

摘要： User interfaces for displaying relationships between cells in a grid. In one example embodiment, a user interface includes a grid including rows and columns and a plurality of cells each having a specific position in the grid. A first one of the cells is related to a second one of the cells. The grid is configured to display, upon selection of the first cell or second cell, a visual representation of the relationship between the first cell and the second cell.

摘要翻译： 用于显示网格中单元格之间的关系的用户界面。 在一个示例实施例中，用户界面包括包括行和列的网格以及每个在网格中具有特定位置的多个单元格。 第一个单元格与第二个单元有关。 网格被配置为在选择第一小区或第二小区时显示第一小区和第二小区之间的关系的可视表示。

公开(公告)号：US20090276078A1

公开(公告)日：2009-11-05

申请号：US12458421

申请日：2009-07-10

申请人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

发明人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32057 ,  G05B2219/32097 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/20 ,  Y02P90/22

摘要： A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution system which prepares a processing recipe describing, as a first setting value in an actual manufacturing process, a value of the control parameter, an apparatus information collection section which collects an objective monitored value of the apparatus information in operation of the actual manufacturing process with the first setting value, a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value based on the correlation, a parameter calculation section which calculates a second setting value in the actual manufacturing process on the basis of the value of the feature quantity, and an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.

公开(公告)号：US07596421B2

公开(公告)日：2009-09-29

申请号：US11471675

申请日：2006-06-21

申请人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

发明人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32057 ,  G05B2219/32097 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/20 ,  Y02P90/22

摘要： A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution system which prepares a processing recipe describing, as a first setting value in an actual manufacturing process, a value of the control parameter, an apparatus information collection section which collects an objective monitored value of the apparatus information in operation of the actual manufacturing process with the first setting value, a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value based on the correlation, a parameter calculation section which calculates a second setting value in the actual manufacturing process on the basis of the value of the feature quantity, and an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.

摘要翻译： 过程控制系统包括：准备设备信息的参考监视值和特征量之间的相关性的客户端计算机;准备描述作为实际制造过程中的第一设定值的处理配方的制造执行系统， 所述控制参数，设备信息收集部分，其在具有所述第一设定值的实际制造过程的操作中收集所述设备信息的客观监视值;特征量计算部，其计算与所监视的目标对应的特征量的值 基于相关性的值，参数计算部，其基于特征量的值计算实际制造过程中的第二设定值;以及装置控制单元，其将处理配方改变为第二设定值为 设定第二步的值。