公开(公告)号：US20170083011A1

公开(公告)日：2017-03-23

申请号：US14859896

申请日：2015-09-21

申请人： Raytheon Company

发明人： David Hughes

IPC分类号： G05B19/418

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32368 ,  Y02P90/14 ,  Y02P90/22 ,  Y02P90/26

摘要： A system and method can identify manufactured parts. A user can select a particular manufactured part, which can be out-of-specification. The system can retrieve test data for the selected part and for other manufactured parts. The system can normalize the retrieved test data against historical means and historical standard deviations to form normalized test data. The system can correlate the normalized test data for the selected part against normalized test data for each of the other manufactured parts to form correlation values. The system can display the correlation values with identifiers corresponding to the manufactured parts. Each correlation value can represent a degree of similarity between the selected part and a respective manufactured part. The manufactured parts with the highest correlation values can have the same failure mechanism as the selected part, which can help diagnose why the selected part can be out-of-specification.

公开(公告)号：US20150347371A1

公开(公告)日：2015-12-03

申请号：US14692394

申请日：2015-04-21

申请人： SURFWAX, INC.

发明人： Thomas D. Holt

IPC分类号： G06F17/24 ,  G06F3/0484

CPC分类号： G06F17/246 ,  G05B2219/31477 ,  G06F3/0484 ,  G06F3/04842 ,  G06F16/288 ,  G06F17/2235 ,  G06F17/241 ,  G06F17/245 ,  G06Q10/067 ,  G16H10/60 ,  G16H15/00

摘要： User interfaces for displaying visual representations of relationships between cells in a grid. In one example embodiment, a user interface includes a grid including rows and columns, a viewport that displays only a portion of the grid, and a plurality of cells each having a specific position in one of the rows and one of the columns of the grid. A first one of the cells is related to a second one of the cells that is positioned in a different one of the rows and a different one of the columns of the grid from the first cell such that the first cell and the second cell are not capable of being displayed in the viewport at the same time. The viewport is configured to display, upon selection of the first cell displayed in the viewport, a completely visible visual representation in the viewport of the relationship between the first cell and the second cell.

摘要翻译： 用于显示网格中单元格之间关系的视觉表示的用户界面。 在一个示例实施例中，用户界面包括包括行和列的网格，仅显示网格的一部分的视口，以及多个单元格，每个单元格具有网格中的一列和一列中的特定位置 。 小区中的第一个与位于不同行中的第二个单元相关联，并且与第一个单元位于网格的不同列之间，使得第一单元和第二单元不是 能够同时在视口中显示。 视口配置为在选择视口中显示的第一单元格时，在第一单元和第二单元之间的关系的视口中显示完全可见的视觉表示。

公开(公告)号：US07640126B2

公开(公告)日：2009-12-29

申请号：US12108153

申请日：2008-04-23

申请人： Toru Fujii

发明人： Toru Fujii

IPC分类号： G06F19/00

CPC分类号： G05B23/024 ,  G05B2219/31477 ,  G05B2219/32221 ,  Y02P90/14 ,  Y02P90/22

摘要： An inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit 104 for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit 105 for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit 106 for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit 107 for outputting the inspecting results.

摘要翻译： 检验方程式存储单元103，用于存储计算一个或多个主成分分数的检验方程，所述检验方程通过对两个或更多个相关测量项目的多个测量对象上的测量数据执行主成分分析而获得，以及 在制造装置处于正常状态时，由可调整条件改变的制造装置处理的测量对象; 检查测量数据接收单元104，用于根据与检查方程中包含的每个项相对应的测量项接受由制造设备处理的测量对象上的检查测量数据; 主成分分数计算单元105，用于使用检查方程用检验的测量数据计算主成分分数; 检查单元106，用于使用所计算的主成分分数来检查制造装置; 以及用于输出检查结果的输出单元107。

公开(公告)号：US07831330B2

公开(公告)日：2010-11-09

申请号：US12458421

申请日：2009-07-10

申请人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

发明人： Junji Sugamoto ,  Yukihiro Ushiku ,  Kazutaka Akiyama ,  Shoichi Harakawa

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32057 ,  G05B2219/32097 ,  G05B2219/45031 ,  Y02P90/12 ,  Y02P90/20 ,  Y02P90/22

摘要： A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution system which prepares a processing recipe describing, as a first setting value in an actual manufacturing process, a value of the control parameter, an apparatus information collection section which collects an objective monitored value of the apparatus information in operation of the actual manufacturing process with the first setting value, a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value based on the correlation, a parameter calculation section which calculates a second setting value in the actual manufacturing process on the basis of the value of the feature quantity, and an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.

摘要翻译： 过程控制系统包括：准备设备信息的参考监视值和特征量之间的相关性的客户端计算机;准备描述作为实际制造过程中的第一设定值的处理配方的制造执行系统， 所述控制参数，设备信息收集部分，其在具有所述第一设定值的实际制造过程的操作中收集所述设备信息的客观监视值;特征量计算部，其计算与所监视的目标对应的特征量的值 基于相关性的值，参数计算部，其基于特征量的值计算实际制造过程中的第二设定值;以及装置控制单元，其将处理配方改变为第二设定值为 设定第二步的值。

公开(公告)号：US07630858B1

公开(公告)日：2009-12-08

申请号：US11904858

申请日：2007-09-28

申请人： Susan Weiher-Telford ,  Stefan Soens

发明人： Susan Weiher-Telford ,  Stefan Soens

IPC分类号： G06F17/18 ,  G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32221 ,  G05B2219/45031 ,  H01L21/67276 ,  H01L21/67288 ,  Y02P90/22

摘要： A plurality of tool identifiers, a plurality of information types, and a plurality of report types are displayed in a first user interface of a tool health reporting system. A user selection of a distinct report type from the plurality of report types, a distinct information type from the plurality of information types, and a distinct tool identifier from the plurality of tool identifiers are received. A report is displayed in a second user interface of the tool health reporting system, the report including data associated with the distinct information type, the distinct report type and the distinct tool identifier, wherein the report correlates equipment based measurement data to product level measurement data.

摘要翻译： 在工具健康报告系统的第一用户界面中显示多个工具标识符，多个信息类型和多个报告类型。 接收来自多个报告类型的不同报告类型的用户选择，来自多个信息类型的不同信息类型以及来自多个工具标识符的不同工具标识符。 报告显示在工具健康报告系统的第二用户界面中，报告包括与不同信息类型相关联的数据，不同报告类型和不同的工具标识符，其中该报告将基于设备的测量数据与产品级测量数据相关联 。

公开(公告)号：US07606681B2

公开(公告)日：2009-10-20

申请号：US11934156

申请日：2007-11-02

申请人： Ali Esmaili ,  Sanjay Mehta ,  Debashis Neogi ,  Carlos A. Valenzuela

发明人： Ali Esmaili ,  Sanjay Mehta ,  Debashis Neogi ,  Carlos A. Valenzuela

IPC分类号： G06F17/40 ,  G06F19/00 ,  G05B15/02 ,  G05B17/02

CPC分类号： G05B23/0254 ,  G05B17/02 ,  G05B2219/31457 ,  G05B2219/31477 ,  G05B2219/31478 ,  G05B2223/06

摘要： Systems and methods are provided that allow a user to monitor, diagnose, and configure a process. A user interface may be presented that displays data received from process monitors, sensors, and multivariate models. The user interface may be interactive, allowing a user to select which composite and multivariate models are displayed. The user interface and multivariate model may be constructed and updated in real time. The user interface may present various data and interfaces, such as a representation of a composite variable in a multivariate model, a representation of the contribution of process variables to the composite variable, and a representation of a subset of the process variables. The user may select a point of the composite variable for analysis, and the interface may indicate the contribution and values of process variables at the selected point. The interface may be transmitted to a remote user.

摘要翻译： 提供了允许用户监视，诊断和配置进程的系统和方法。 可以呈现显示从过程监视器，传感器和多变量模型接收的数据的用户界面。 用户界面可以是交互式的，允许用户选择显示哪些复合和多变量模型。 可以实时构建和更新用户界面和多变量模型。 用户界面可以呈现各种数据和接口，诸如多变量模型中的复合变量的表示，过程变量对复合变量的贡献的表示，以及过程变量的子集的表示。 用户可以选择用于分析的复合变量的点，并且接口可以指示所选点处的过程变量的贡献和值。 该接口可以被发送到远程用户。

公开(公告)号：US06862484B2

公开(公告)日：2005-03-01

申请号：US10125403

申请日：2002-04-19

申请人： Shunji Hayashi

发明人： Shunji Hayashi

IPC分类号： G01M99/00 ,  G05B19/418 ,  G05B23/02 ,  G06Q10/10 ,  G06Q50/00 ,  G06Q50/04 ,  H01L21/02 ,  G05B21/02

CPC分类号： G06Q10/10 ,  G05B19/41875 ,  G05B2219/31477 ,  G05B2219/32221 ,  Y02P90/14 ,  Y02P90/22

摘要： In a method of controlling a manufacturing process, a Mahalanobis space of plural manufacturing control parameters is generated on the basis of first sampled data. Then, a Mahalanobis distance from the Mahalanobis space and second sampled data is calculated. A manufacturing process is determined to be under a malfunction operating condition by comparing the Mahalanobis distance and a threshold value.

摘要翻译： 在控制制造过程的方法中，基于第一采样数据生成多个制造控制参数的马氏距离空间。 然后，计算马哈拉诺比斯与马哈拉诺比斯空间的距离和第二采样数据。 通过比较马氏距离和阈值，确定制造过程处于故障运行状态。

公开(公告)号：US20080270058A1

公开(公告)日：2008-10-30

申请号：US12108153

申请日：2008-04-23

申请人： Toru FUJII

发明人： Toru FUJII

IPC分类号： G01N37/00

CPC分类号： G05B23/024 ,  G05B2219/31477 ,  G05B2219/32221 ,  Y02P90/14 ,  Y02P90/22

摘要： In order to solve the conventional problem in which the occurrence of abnormal behaviors in a manufacturing apparatus cannot be properly determine in view of the variations in measured data caused by adjustment made to the manufacturing apparatuses, the combine-information processing apparatus comprises: an inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit 104 for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit 105 for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit 106 for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit 107 for outputting the inspecting results.

摘要翻译： 为了解决制造装置中出现异常行为的传统问题，鉴于由对制造装置进行的调整引起的测量数据的变化，无法适当确定，组合信息处理装置包括：检验方程式 存储单元103，用于存储计算一个或多个主成分分数的检验方程，通过对两个或更多个相关测量项目的多个测量对象上的测量数据执行主成分分析获得的检验方程，以及测量对象 在制造装置处于正常状态时由可调节状态改变的制造装置进行加工; 检查测量数据接收单元104，用于根据与检查方程中包含的每个项相对应的测量项接受由制造设备处理的测量对象上的检查测量数据; 主成分分数计算单元105，用于使用检查方程用检验的测量数据计算主成分分数; 检查单元106，用于使用所计算的主成分分数来检查制造装置; 以及用于输出检查结果的输出单元107。

公开(公告)号：US07424395B2

公开(公告)日：2008-09-09

申请号：US11212434

申请日：2005-08-26

申请人： Kenneth F. Emigholz ,  Richard B. McLain ,  Robert K. Wang ,  Stephen S. Woo

发明人： Kenneth F. Emigholz ,  Richard B. McLain ,  Robert K. Wang ,  Stephen S. Woo

IPC分类号： G06F15/00

CPC分类号： C10G11/187 ,  G05B23/0254 ,  G05B2219/31477 ,  G05B2219/31478

摘要： The present invention is a method for detecting an abnormal event for process units of an ethylene processing system. The method compares the operation of the process units to a model developed by principal components analysis of normal operation for these units. If the difference between the operation of a process unit and the normal operation indicates an abnormal condition, then the cause of the abnormal condition is determined and corrected.

摘要翻译： 本发明是用于检测乙烯处理系统的处理单元的异常事件的方法。 该方法将过程单元的操作与通过这些单元的正常操作的主要组件分析开发的模型进行比较。 如果处理单元的操作与正常操作之间的差异指示异常状况，则确定和校正异常状况的原因。

公开(公告)号：US20060074599A1

公开(公告)日：2006-04-06

申请号：US11212434

申请日：2005-08-26

申请人： Kenneth Emigholz ,  Richard McLain ,  Robert Wang ,  Stephen Woo

发明人： Kenneth Emigholz ,  Richard McLain ,  Robert Wang ,  Stephen Woo

IPC分类号： G06F11/30

CPC分类号： C10G11/187 ,  G05B23/0254 ,  G05B2219/31477 ,  G05B2219/31478

摘要： The present invention is a method for detecting an abnormal event for process units of an ethylene processing system. The method compares the operation of the process units to a model developed by principal components analysis of normal operation for these units. If the difference between the operation of a process unit and the normal operation indicates an abnormal condition, then the cause of the abnormal condition is determined and corrected.

摘要翻译： 本发明是用于检测乙烯处理系统的处理单元的异常事件的方法。 该方法将过程单元的操作与通过这些单元的正常操作的主要组件分析开发的模型进行比较。 如果处理单元的操作与正常操作之间的差异指示异常状况，则确定和校正异常状况的原因。