Method and systems for a graphical real time flow task scheduler
    11.
    发明授权
    Method and systems for a graphical real time flow task scheduler 有权
    图形实时流任务调度程序的方法和系统

    公开(公告)号:US06323882B1

    公开(公告)日:2001-11-27

    申请号:US09193763

    申请日:1998-11-17

    IPC分类号: G09G500

    摘要: A system and method of creating and using a graphical task scheduler. A Graphical User Interface (GUI) allows a user to graphically build a real time flow task scheduler by providing a “click & drag” functional palette which contains graphical flow chart elements. By creating this graphical flow chart, the user is able to associate a plant layout, or any subpart of the entire plant, to its associated mathematical model. With a graphical flow chart, the user can define one or more exit branches for each task. For tasks with more than one exit branch, the user can specify the conditions causing the sequence to use each branch. Once the flow chart is set up, it can be used as a sequence editor or scheduler. The sequence editor defines the sequence of tasks that will be performed by an on-line application, such as optimization, and also allows scheduling of the on-line application at specific times or periodic intervals. The scheduler controls the running of each sequence based on the scheduling information. Once a plant has been optimized by the graphical task scheduler, the optimized data may be used to control plant operations.

    摘要翻译: 一种创建和使用图形任务调度程序的系统和方法。 图形用户界面(GUI)允许用户通过提供包含图形流程图元素的“点击并拖动”功能调色板来图形地构建实时流任务调度器。 通过创建此图形流程图,用户能够将工厂布局或整个工厂的任何子部分与其关联的数学模型相关联。 使用图形流程图,用户可以为每个任务定义一个或多个退出分支。 对于具有多个退出分支的任务,用户可以指定导致序列使用每个分支的条件。 一旦流程图设置好,它可以用作序列编辑器或调度程序。 序列编辑器定义将由在线应用程序执行的任务的顺序,例如优化,并且还允许在特定时间或周期性时间间隔对在线应用进行调度。 调度器基于调度信息来控制每个序列的运行。 一旦工厂被图形任务调度程序优化,优化的数据可用于控制工厂操作。

    Substrate processing system, and method of control therefor, control program, and storage medium
    13.
    发明授权
    Substrate processing system, and method of control therefor, control program, and storage medium 有权
    基板处理系统及其控制方法,控制程序和存储介质

    公开(公告)号:US07729798B2

    公开(公告)日:2010-06-01

    申请号:US10551225

    申请日:2004-03-26

    IPC分类号: G06F7/00

    摘要: A transfer schedule SA and a transfer schedule SB for an A lot and a B lot different from each other are generated on a transfer control table, the succeeding transfer schedule SB is moved ahead in the direction of a time axis within a range over which it does not interfere with the transfer schedule SA for the preceding A lot to make the start timing for the succeeding transfer schedule SB become earlier than the end timing for the transfer schedule for the preceding A lot, so that the transfer schedule SA and the transfer schedule SB are executed in parallel, thereby improving the throughput a wafer transfer process.

    摘要翻译: 在传送控制表上生成用于A批次和B批次的传送调度SA和传送调度SB,其后续的传送调度SB在时间轴的方向上向前移动,在该范围内, 不干扰前一批次的传输调度SA,以使得后续传送调度SB的开始时间早于前一批次的传送调度的结束定时,从而传输调度SA和传送调度 SB并行执行,从而提高晶片转移处理的吞吐量。

    Data structure for use in enterprise controls
    16.
    发明授权
    Data structure for use in enterprise controls 有权
    用于企业控制的数据结构

    公开(公告)号:US06268853B1

    公开(公告)日:2001-07-31

    申请号:US09409568

    申请日:1999-09-30

    IPC分类号: G06F300

    摘要: A development tool for use in specifying at least a sub-set of information required to generate control tools for an industrial process wherien the process is performed by mechanical resources, the control tools include execution logic, simulation facilitating tools, diagnostic tools, HMI tools and schematic diagrams, the development tool including a plurality of control assembles (CA), a separate CA for each mechanical resource type, which can be instantiated by selection and parameterization via an editor to specify the required information, after instantiation, the CAs compiled to generate the tools.

    摘要翻译: 一种开发工具,用于指定生产用于工业过程的控制工具所需的至少一组信息,该过程由机械资源执行,控制工具包括执行逻辑,仿真便利工具,诊断工具,HMI工具和 示意图,开发工具包括多个控制组件(CA),每个机械资源类型的单独的CA,可以通过编辑器通过选择和参数化来实例化,以便在实例化之后,编译生成的CA 工具。