摘要:
A system and method of creating and using a graphical task scheduler. A Graphical User Interface (GUI) allows a user to graphically build a real time flow task scheduler by providing a “click & drag” functional palette which contains graphical flow chart elements. By creating this graphical flow chart, the user is able to associate a plant layout, or any subpart of the entire plant, to its associated mathematical model. With a graphical flow chart, the user can define one or more exit branches for each task. For tasks with more than one exit branch, the user can specify the conditions causing the sequence to use each branch. Once the flow chart is set up, it can be used as a sequence editor or scheduler. The sequence editor defines the sequence of tasks that will be performed by an on-line application, such as optimization, and also allows scheduling of the on-line application at specific times or periodic intervals. The scheduler controls the running of each sequence based on the scheduling information. Once a plant has been optimized by the graphical task scheduler, the optimized data may be used to control plant operations.
摘要:
A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.
摘要:
A transfer schedule SA and a transfer schedule SB for an A lot and a B lot different from each other are generated on a transfer control table, the succeeding transfer schedule SB is moved ahead in the direction of a time axis within a range over which it does not interfere with the transfer schedule SA for the preceding A lot to make the start timing for the succeeding transfer schedule SB become earlier than the end timing for the transfer schedule for the preceding A lot, so that the transfer schedule SA and the transfer schedule SB are executed in parallel, thereby improving the throughput a wafer transfer process.
摘要:
A system and method are provided for manufacturing workpieces, such as metal articles like sputtering target, the system comprising: comparing one or more physical or chemical values of a respective one of a plurality of metal target blanks to one or more comparable values of at least one desired criterion; selecting one of the metal target blanks from a plurality of metal target blanks as a work-in-progress; assigning a serial route for the work-in-progress; processing the work-in-progress by translating the work-in-progress from note to node with an automated transport, after completion of the events at each node; rejecting or accepting the work-in-progress as a metal target by evaluating a result of at least one event of the one or more respective events to be completed at, at least one of the plurality of nodes.
摘要:
A system and method are provided for calculating a plurality of bottleneck delta virtual work in process time (“VWIP”) values. Each of the bottleneck delta VWIP values represents the time until one of n bottleneck workstations begins to risk starvation.
摘要:
A development tool for use in specifying at least a sub-set of information required to generate control tools for an industrial process wherien the process is performed by mechanical resources, the control tools include execution logic, simulation facilitating tools, diagnostic tools, HMI tools and schematic diagrams, the development tool including a plurality of control assembles (CA), a separate CA for each mechanical resource type, which can be instantiated by selection and parameterization via an editor to specify the required information, after instantiation, the CAs compiled to generate the tools.