公开(公告)号：US5563415A

公开(公告)日：1996-10-08

申请号：US487926

申请日：1995-06-07

申请人： Albert V. Crewe

发明人： Albert V. Crewe

IPC分类号： G01Q30/02 ,  H01J37/141 ,  H01J37/14

CPC分类号： H01J37/141 ,  H01J2237/1035 ,  H01J2237/142

摘要： A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.

摘要翻译： 一种透镜装置，其中通过磁场将低加速电压的带电粒子束聚焦，透镜位于目标位置之后。 透镜包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。 透镜装置包括用于在低电压扫描电子显微镜中进行高分辨率成像的唯一聚焦透镜。

公开(公告)号：US5003172A

公开(公告)日：1991-03-26

申请号：US344195

申请日：1989-04-27

申请人： Pieter Kruit ,  Arno J. Bleeker ,  John A. Venables

发明人： Pieter Kruit ,  Arno J. Bleeker ,  John A. Venables

IPC分类号： G01N23/225 ,  G01Q30/06 ,  H01J37/09 ,  H01J37/141 ,  H01J37/22 ,  H01J37/244 ,  H01J37/252 ,  H01J37/256

CPC分类号： H01J37/141 ,  H01J37/09 ,  H01J37/256 ,  H01J2237/142

摘要： An objective lens in an electron microscope is adapted to detection of Auger electrons. Using an additional lens field, preferably including the use of a VAIL lens, the electrons to be detected are spiraled to a selection space. Between the lens field and the selection space a preferably displaceable, magnetic diaphragm is arranged for the separation of lens fields.

公开(公告)号：US3659097A

公开(公告)日：1972-04-25

申请号：US3659097D

申请日：1971-02-16

申请人： NAT RES DEV

发明人： BASSETT RICHARD ,  MULVEY THOMAS

IPC分类号： H01J29/66 ,  H01J37/02 ,  H01J37/141 ,  H01J37/252 ,  H01J37/26

CPC分类号： H01J37/02 ,  H01J29/66 ,  H01J37/141 ,  H01J37/252 ,  H01J2237/002 ,  H01J2237/142

摘要： Apparatus having a generator of a beam of charged particles and magnetic focusing means in which a beam of charged particles is brought to a focus between the source and the focusing means so that radiation from a target placed at the focus can be received by a radiation detector within a substantial solid angle, bounded by said magnetic focusing means and the beam of charged particles. Preferably the focusing means is an electrically conducting coil of substantially flat or shallow conical form having a conical half-angle of not less than 75*.

摘要翻译： 具有带电粒子束的发生器和磁聚焦装置的装置，其中带电粒子束被带到源和聚焦装置之间的焦点，使得放置在焦点处的来自靶的辐射可以被辐射检测器 在大致立体角内，由所述磁性聚焦装置和带电粒子束限定。