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    Sample-specific Reference Spectra Library
    3.
    发明申请
    Sample-specific Reference Spectra Library 有权
    样品专用参考光谱库

    公开(公告)号：US20160245762A1

    公开(公告)日：2016-08-25

    申请号：US14630704

    申请日：2015-02-25

    申请人： FEI Company

    发明人： Michael James Owen ,  Ashley Donaldson ,  Garth Howell ,  Phillip John Christopher Parker

    IPC分类号： G01N23/225 ,  H01J37/244 ,  G01J3/44 ,  H01J37/252

    CPC分类号： G01N23/2252 ,  G01J3/44 ,  H01J37/244 ,  H01J37/252 ,  H01J2237/2807

    摘要： A method and apparatus are provided for identifying a material with a sample-specific reference spectral list or library. A sequential approach to SEM-EDS automated mineralogy classification is carried out by performing two or more material classification analyses. A pre-classification step restricts the processing of spectra deconvolution algorithms to a subset of spectra that pass a dominant mineral criteria resulting in a significantly reduced subset of reference spectra that occur within the measured sample in pure enough form at a given minimum quantity. The following complex classification stages involving deconvolution of multiple constituents within measured spectra is based on this sample relevant subset.

    摘要翻译： 提供了一种用于识别具有样本特定参考光谱列表或库的材料的方法和装置。 通过进行两次或多次材料分类分析来进行SEM-EDS自动矿物学分类的顺序方法。 预分类步骤将光谱反褶积算法的处理限制为通过显性矿物标准的光谱子集，导致在给定最小量下以足够纯净的形式在测量样品内发生的参考光谱的显着减少的子集。 以下复杂分类阶段涉及测量光谱中多个成分的去卷积，基于该样本相关子集。

    Ion source, ion gun, and analysis instrument
    4.
    发明授权
    Ion source, ion gun, and analysis instrument 有权
    离子源，离子枪和分析仪

    公开(公告)号：US09372161B2

    公开(公告)日：2016-06-21

    申请号：US14600338

    申请日：2015-01-20

    申请人： ULVAC-PHI, Inc.

    发明人： Daisuke Sakai ,  Mauo Sogou ,  Kenzo Hiraoka

    IPC分类号： G01N23/02 ,  H01J49/26 ,  H01J37/08 ,  H01J37/252 ,  H01J27/26 ,  H01J49/04 ,  H01J49/16 ,  G01N23/225

    CPC分类号： G01N23/02 ,  G01N23/2258 ,  H01J27/26 ,  H01J37/08 ,  H01J37/252 ,  H01J49/0468 ,  H01J49/165 ,  H01J2237/0812 ,  H01J2237/2527 ,  H01J2237/3174

    摘要： Provided are an ion source, an ion gun, and an analysis instrument, which are capable of performing sputtering without damage to a surface of a sample and improving detection sensitivity in mass spectroscopy. In the ion source, an emission opening to which ionization liquid is supplied is disposed in an electric field formed in vacuum environment by an extracting electrode so that super large droplet cluster ions are generated from the emission opening. When the sample is irradiated with a super large droplet cluster ion beam, the sample surface is subjected to sputtering without damage, so as to remove contamination substances or to expose a new surface of the sample. In mass spectroscopy, detection sensitivity is improved.

    摘要翻译： 提供离子源，离子枪和分析仪器，其能够进行溅射而不损害样品的表面并提高质谱中的检测灵敏度。 在离子源中，在真空环境中由提取电极形成的电场中配置有供给电离液体的发射开口，从而从发射开口产生超大的液滴簇离子。 当用超大液滴簇离子束照射样品时，样品表面经受溅射而不损坏，以便去除污染物质或露出样品的新表面。 在质谱中，检测灵敏度得到改善。

    Mineral Identification Using Sequential Decomposition into Elements from Mineral Definitions
    6.
    发明申请
    Mineral Identification Using Sequential Decomposition into Elements from Mineral Definitions 审中-公开
    矿物鉴定使用从矿物定义的元素顺序分解

    公开(公告)号：US20150338358A1

    公开(公告)日：2015-11-26

    申请号：US14728751

    申请日：2015-06-02

    申请人： FFI Company

    发明人： Michael James Owen ,  Michael Buhot

    IPC分类号： G01N23/225

    CPC分类号： H01J37/252 ,  G01N23/2252 ,  H01J2237/221 ,  H01J2237/24585 ,  H01J2237/2561

    摘要： Mineral definitions each include a list of elements, each of the elements having a corresponding standard spectrum. To determine the composition of an unknown mineral sample, the acquired spectrum of the sample is sequentially decomposed into the standard spectra of the elements from the element list of each of the mineral definitions, and a similarity metric computed for each mineral definition. The unknown mineral is identified as the mineral having the best similarity metric.

    摘要翻译： 矿物定义各自包括元素列表，每个元素具有相应的标准光谱。 为了确定未知矿物样品的组成，将样品的获取光谱从每个矿物定义的元素列表顺序分解成元素的标准光谱，以及为每种矿物定义计算的相似性度量。 未知矿物被鉴定为具有最佳相似性度量的矿物。

    Mineral identification using sequential decomposition into elements from mineral definitions
    7.
    发明授权
    Mineral identification using sequential decomposition into elements from mineral definitions 有权
    矿物鉴定使用顺序分解成矿物定义的元素

    公开(公告)号：US09048067B2

    公开(公告)日：2015-06-02

    申请号：US13661830

    申请日：2012-10-26

    申请人： FEI Company

    发明人： Michael James Owen

    IPC分类号： H01J40/00 ,  H01J37/252 ,  G01N23/225

    CPC分类号： H01J37/252 ,  G01N23/2252 ,  H01J2237/221 ,  H01J2237/24585 ,  H01J2237/2561

    摘要： Mineral definitions each include a list of elements, each of the elements having a corresponding standard spectrum. To determine the composition of an unknown mineral sample, the acquired spectrum of the sample is sequentially decomposed into the standard spectra of the elements from the element list of each of the mineral definitions, and a similarity metric computed for each mineral definition. The unknown mineral is identified as the mineral having the best similarity metric.

    摘要翻译： 矿物定义各自包括元素列表，每个元素具有对应的标准光谱。 为了确定未知矿物样品的组成，将样品的获取光谱从每个矿物定义的元素列表顺序分解成元素的标准光谱，以及为每种矿物定义计算的相似性度量。 未知矿物被鉴定为具有最佳相似性度量的矿物。

    Method for integrated circuit diagnosis
    8.
    发明授权
    Method for integrated circuit diagnosis 有权
    集成电路诊断方法

    公开(公告)号：US08809074B2

    公开(公告)日：2014-08-19

    申请号：US13935726

    申请日：2013-07-05

    申请人： Micron Technology, Inc.

    发明人： Mark J. Williamson ,  Gurtej S. Sandhu ,  Justin R. Arrington

    IPC分类号： H01L21/66

    CPC分类号： H01L22/14 ,  G01R31/2898 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/24564 ,  H01J2237/24592

    摘要： A method provides a mechanism to examine physical properties and/or diagnose problems at a selected location of an integrated circuit. Such a method can include creating a layer of a reactive material a selected distance above and in proximity with a surface of the integrated circuit so that the reactive material can be evaluated to form chemical radicals above and in proximity to the surface of the integrated circuit. A portion of the reactive material can be excited. A portion of the surface of the integrated circuit can be removed to a selected level to evaluate an exposed electrical structure of the integrated circuit. The exposed electrical structure can be evaluated to determine a potential problem in the integrated circuit.

    摘要翻译： 一种方法提供了在集成电路的选定位置检查物理特性和/或诊断问题的机制。 这种方法可以包括在集成电路的表面上方和附近产生选定距离的反应材料层，使得反应性材料可以被评估以在集成电路的表面上方和附近形成化学自由基。 可以激发一部分反应性材料。 可以将集成电路的表面的一部分去除到选定的电平以评估集成电路的暴露的电结构。 可以评估暴露的电气结构以确定集成电路中的潜在问题。

    Monitoring device of gas introducing device for analyzer
    9.
    发明授权
    Monitoring device of gas introducing device for analyzer 失效
    分析仪气体导入装置监控装置

    公开(公告)号：US08191402B2

    公开(公告)日：2012-06-05

    申请号：US12523370

    申请日：2008-07-11

    申请人： Keisuke Kishita ,  Hisashi Sakai

    发明人： Keisuke Kishita ,  Hisashi Sakai

    IPC分类号： G01N1/22

    CPC分类号： G01N33/0011 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/006 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/304 ,  Y10T137/87619

    摘要： Gas is supplied from positive pressure (105 Pa or more) to an analyzer of high vacuum (10−2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and is decompressed by a decompression pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the decompressed gas is introduced to a gas analyzer through a switching operation using a gas switching valve.

    摘要翻译： 气体从正压（105Pa以上）到高真空分析仪（10-2Pa以下）精确稳定地供给，同时保持条件恒定并复制条件，并在短时间内切换到所需气体 。 根据气体导入装置和方法，在混合室中合成多种气体，将合成气体导入，通过减压泵减压至0.1Pa〜0.1MPa的压力，减压气体 通过使用气体切换阀的切换操作引入气体分析器。