公开(公告)号：US4344019A

公开(公告)日：1982-08-10

申请号：US205398

申请日：1980-11-10

Applicant: Basil F. Gavin ,  Robert A. MacGill ,  Raymond K. Thatcher

Inventor： Basil F. Gavin ,  Robert A. MacGill ,  Raymond K. Thatcher

IPC: H01J27/04

CPC classification number: H01J27/04

Abstract: An ion source of the Penning discharge type having a self-cleaning aperture is provided by a second dynode (24) with an exit aperture (12) in a position opposite a first dynode 10a, from which the ions are sputtered, two opposing cathodes (14, 16), each with an anode (18, 20) for accelerating electrons emitted from the cathodes into a cylindrical space defined by the first and second dynode. A support gas maintained in this space is ionized by the electrons. While the cathodes are supplied with a negative pulse to emit electrons, the first dynode is supplied with a negative pulse (e.g., -300 V) to attract atoms of the ionized gas (plasma). At the same time, the second dynode may also be supplied with a small voltage that is negative with respect to the plasma (e.g., -5 V) for tuning the position of the plasma miniscus for optimum extraction geometry. When the negative pulse to the first dynode is terminated, the second dynode is driven strongly negative (e.g., -600 V) thereby allowing heavy sputtering to take place for a short period to remove virtually all of the atoms deposited on the second dynode from material sputtered off the first dynode. An extractor (22) immediately outside the exit aperture of the second dynode is maintained at ground potential during this entire period of sputtering while the anode, dynode and cathode reference voltage is driven strongly positive (about +20 kV to +30 kV) so that ions accelerated through the aperture will be at ground potential. In that manner, material from the first dynode deposited on the second dynode will be sputtered, in time, to add to the ion beam. Atoms sputtered from the second dynode which do not become ionized and exit through the slit will be redeposited on the first dynode, and hence recycled for further ion beam generation during subsequent operating cycles.

Abstract translation: 具有自清洁孔径的Penning放电型离子源由具有出口孔（12）的第二倍增电极（24）提供在与第一倍增电极10a相对的位置，离子被溅射出来，两个相对的阴极 每个具有用于将从阴极发射的电子加速到由第一和第二倍增电极限定的圆柱形空间中的阳极（18,20）。 保持在该空间中的支撑气体被电子电离。 当阴极被提供有负脉冲以发射电子时，第一倍增电极被提供有负脉冲（例如，-300V）以吸引电离气体（等离子体）的原子。 同时，也可以向第二倍增电极提供相对于等离子体为负的小电压（例如，-5V），用于调整等离子体液面的位置以获得最佳的提取几何形状。 当第一倍增极的负脉冲终止时，第二倍增电极被强烈地负（例如，-600V），从而允许在很短的时间内发生重的溅射，从而从材料中去除几乎所有沉积在第二倍增极上的原子 溅出第一个dynode。 在整个溅射期间，紧邻第二倍增电极的出口孔外面的提取器（22）保持接地电位，而阳极，倍增极和阴极参考电压被强烈地驱动（约+ 20kV至+ 30kV），使得 通过孔径加速的离子将处于地电位。 以这种方式，沉积在第二倍增电极上的第一倍增电极的材料将被及时地溅射以添加到离子束。 从第二倍增极溅射的不会离子化并通过狭缝出射的原子将重新沉积在第一倍增极上，因此在随后的操作循环期间再循环用于进一步的离子束产生。

公开(公告)号：US3955118A

公开(公告)日：1976-05-04

申请号：US551217

申请日：1975-02-19

Applicant: John Peter Wilfred Flemming

Inventor： John Peter Wilfred Flemming

IPC: H01J27/04 ,  H01J37/08 ,  H01J1/30 ,  H01J3/04 ,  H01J3/40 ,  H01J7/24

CPC classification number: H01J27/04 ,  H01J37/08

Abstract: A cold-cathode ion source includes a specially shaped hollow anode and specially shaped anode-cathode insulators to preclude the buildup of short-circuiting bridges of sputtered cathode material. When used with solid feed material, the source can also include an oven-anode having cavities for vaporizing the solid feed material and passages connecting the cavities to the bore of the anode. The geometry of the oven-anode provides an increasing temperature gradient from the cavities to the bore that minimizes condensation of vaporized feed material that could block the ports.

Abstract translation: 冷阴极离子源包括特殊形状的中空阳极和特殊形状的阳极 - 阴极绝缘体，以排除溅射阴极材料短路桥的积聚。 当与固体进料一起使用时，源还可以包括具有用于蒸发固体进料的空腔的炉阳极和将空腔连接到阳极的孔的通道。 烤箱阳极的几何形状提供了从空腔到孔的增加的温度梯度，其最小化可阻塞端口的汽化进料的冷凝。

公开(公告)号：US3316443A

公开(公告)日：1967-04-25

申请号：US13340761

申请日：1961-08-23

Applicant: ROBERT A CORNOG

Inventor： HANSEN LORIN K

IPC: H01J27/04

CPC classification number: H01J41/20 ,  H01J27/04

公开(公告)号：US3022933A

公开(公告)日：1962-02-27

申请号：US81742659

申请日：1959-06-01

Applicant: ELLIS ROBERT E

Inventor： ELLIS ROBERT E

IPC: H01J27/04 ,  H01J37/14

CPC classification number: H01J37/14 ,  H01J27/04

公开(公告)号：US2831996A

公开(公告)日：1958-04-22

申请号：US61087556

申请日：1956-09-19

Applicant: MARTINA EUGENE F

Inventor： MARTINA EUGENE F

IPC: H01J27/04

CPC classification number: H01J27/04

公开(公告)号：US2499320A

公开(公告)日：1950-02-28

申请号：US75643847

申请日：1947-06-23

Applicant: ROBERT LOEVINGER

Inventor： ROBERT LOEVINGER

IPC: H01J27/04

CPC classification number: H01J27/04

公开(公告)号：US20150168590A1

公开(公告)日：2015-06-18

申请号：US14108234

申请日：2013-12-16

Applicant: SCHLUMBERGER TECHNOLOGY CORPORATION

Inventor： LUKE PERKINS

IPC: G01V5/10 ,  H01J27/04

CPC classification number: H01J27/04 ,  H01J27/024 ,  H05H3/06

Abstract: A radiation generator includes at least three extractor electrodes, with an ion source upstream of the at least three extractor electrodes to emit ions in a downstream direction toward the at least three extractor electrodes. There is a target downstream of the at least three extractor electrodes. The at least three extractor electrodes have independently selectable potentials so as to allow direction of an ion beam, formed from the ions, by the independently selectable potentials, toward different longitudinal and lateral regions of the target.

Abstract translation: 辐射发生器包括至少三个提取器电极，离子源在至少三个提取器电极的上游，以向下游方向朝向至少三个提取器电极发射离子。 在至少三个提取器电极的下游存在靶。 所述至少三个提取器电极具有独立的可选择电位，以便允许由离子形成的离子束通过独立可选择的电位朝向靶的不同纵向和横向区域的方向。

公开(公告)号：US20140070701A1

公开(公告)日：2014-03-13

申请号：US14018028

申请日：2013-09-04

Applicant: Thomas Schenkel ,  Qing Ji ,  Arun Persaud ,  Amy V. Sy

Inventor： Thomas Schenkel ,  Qing Ji ,  Arun Persaud ,  Amy V. Sy

IPC: H01J27/04

CPC classification number: H01J27/04

Abstract: This disclosure provides systems, methods, and apparatus for ion generation. In one aspect, an apparatus includes an anode, a first cathode, a second cathode, and a plurality of cusp magnets. The anode has a first open end and a second open end. The first cathode is associated with the first open end of the anode. The second cathode is associated with the second open end of the anode. The anode, the first cathode, and the second cathode define a chamber. The second cathode has an open region configured for the passage of ions from the chamber. Each cusp magnet of the plurality of cusp magnets is disposed along a length of the anode.

Abstract translation: 本公开提供了用于离子产生的系统，方法和装置。 一方面，一种装置包括阳极，第一阴极，第二阴极和多个尖点磁体。 阳极具有第一开口端和第二开口端。 第一阴极与阳极的第一开口端相关联。 第二阴极与阳极的第二开口端相关联。 阳极，第一阴极和第二阴极限定室。 第二阴极具有用于离开室的通道的开放区域。 多个尖部磁体的每个尖头磁体沿着阳极的长度设置。

公开(公告)号：US07442941B2

公开(公告)日：2008-10-28

申请号：US11460610

申请日：2006-07-27

Applicant: Li Qian ,  Jing Qi ,  Jie Tang ,  Liang Liu ,  Zhao-Fu Hu ,  Pi-Jin Chen ,  Shou-Shan Fan

Inventor： Li Qian ,  Jing Qi ,  Jie Tang ,  Liang Liu ,  Zhao-Fu Hu ,  Pi-Jin Chen ,  Shou-Shan Fan

IPC: H01J27/02 ,  H01J37/08 ,  G21K1/02

CPC classification number: H01J27/04

Abstract: An ion generator (10) generally includes: a shielding shell (11), a cathode device (16), and an annular anode (14). The shielding shell has a first end (113), an opposite second end (115) and a main body (111) therebetween. The first end has an electron-input hole (13). The second end has an ion-output hole (15). The main body has a gas inlet (170) for introducing an ionizable gas (170). The cathode device faces the electron-input hole for emitting electrons to enter the shielding shell so as to ionize the ionizable gas thereby generating ions. The cathode device includes a conductive base (160) and at least one field emitter (161) thereon. The annular anode is arranged in the shielding shell. The anode is aligned with the ion-output hole.

Abstract translation: 离子发生器（10）通常包括：屏蔽壳（11），阴极装置（16）和环形阳极（14）。 屏蔽壳具有第一端（113），相对的第二端（115）和它们之间的主体（111）。 第一端具有电子输入孔（13）。 第二端具有离子输出孔（15）。 主体具有用于引入可电离气体（170）的气体入口（170）。 阴极器件面向用于发射电子的电子输入孔进入屏蔽壳，从而电离可电离气体，从而产生离子。 阴极器件包括导电基底（160）和至少一个场致发射体（161）。 环形阳极布置在屏蔽壳体中。 阳极与离子输出孔对准。

公开(公告)号：US07223984B2

公开(公告)日：2007-05-29

申请号：US10115466

申请日：2002-04-03

Applicant: Jaime M. Reyes ,  Charles Prillaman

Inventor： Jaime M. Reyes ,  Charles Prillaman

IPC: H01J27/08

CPC classification number: H01J27/04 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01J2237/31701 ,  H01L21/26506 ,  H01L21/2658

Abstract: The invention provides methods and apparatus for generating helium ions. The methods involve providing a mixture of helium gas with a second gas in an ion source. The second gas has a lower ionization potential and larger molecules than that of helium. The helium gas is ionized by generating an arc discharge within the ion source. The presence of the second gas enhances the ionization of the helium gas. The increased helium ionization enables formation of helium ion beams having a high beam currents suitable for implantation.

Abstract translation: 本发明提供了用于产生氦离子的方法和装置。 该方法包括在离子源中提供氦气与第二气体的混合物。 第二气体具有比氦气更低的电离电位和更大的分子。 通过在离子源内产生电弧放电来使氦气离子化。 第二气体的存在增强了氦气的电离。 增加的氦离子化能够形成具有适合于植入的高束流的氦离子束。