公开(公告)号：US06422824B1

公开(公告)日：2002-07-23

申请号：US09396534

申请日：1999-09-15

Applicant: Cheng-Chung Lee ,  Ruey-Feng Jean

Inventor： Cheng-Chung Lee ,  Ruey-Feng Jean

IPC: F04B3702

CPC classification number: H01J7/18 ,  F04B37/02 ,  H01J2329/00

Abstract: A getter assembly for use in a vacuum display panel is described. The novel getter assembly can be provided including both a non-evaporative getter and an evaporative getter which are uniquely positioned juxtaposed to each other such that ions emitted by the evaporative getter upon activation substantially shield the non-evaporative getter so that gases emitted by the non-evaporative getter when activated does not affect the state of vacuum in the vacuum display panel. A preferred embodiment of the present invention novel getter assembly is shown for vacuum display panels that have sufficient thickness in the cavity so that the getter assembly can be installed inside the cavity. An alternate embodiment of the present invention illustrates that when the cavity in the vacuum display panel is too small to accommodate the mounting of the getter assembly, an exterior mounting of the assembly is possible wherein one of the getters may be activated by a radio frequency induced current, instead of by feedthrough electrodes. By utilizing the present invention novel getter assembly which is uniquely positioned to compliment each other's functions, a high and stable vacuum state in a vacuum display panel device can be achieved and maintained, for instance, at between 10−6 and 10−7 Torr.

Abstract translation: 描述了用于真空显示面板的吸气组件。 可以提供新颖的吸气剂组件，包括非蒸发吸气剂和蒸发吸气剂，其独特地相互并置，使得在活化时由蒸发吸气剂发射的离子基本上屏蔽非蒸发吸气剂，使得非蒸发吸气剂 - 蒸发吸气剂在激活时不影响真空显示面板中的真空状态。 本发明的优选实施例示出了真空显示面板的新型吸气剂组件，其在空腔中具有足够的厚度，使得吸气剂组件可以安装在空腔内。 本发明的替代实施例示出了当真空显示面板中的空腔太小而不能容纳吸气剂组件的安装时，组件的外部安装是可能的，其中一个吸气剂可以被射频感应 电流，而不是馈通电极。 通过利用本发明的独特定位以相互补充功能的新型吸气剂组件，可以实现并保持真空显示面板装置中的高且稳定的真空状态，例如在10 -6至10 -7乇之间。

公开(公告)号：US06299746B1

公开(公告)日：2001-10-09

申请号：US09218941

申请日：1998-12-22

Applicant: Andrea Conte ,  Francesco Mazza

Inventor： Andrea Conte ,  Francesco Mazza

IPC: C23C1434

CPC classification number: H01J37/32871 ,  C23C14/564 ,  H01J7/18 ,  H01J2237/182

Abstract: A getter system for purifying the gaseous atmosphere within a confinement volume of a process chamber is disclosed. In a process chamber provided with at least one screen that defines a confinement volume, the getter system includes at least one substantially planar getter device disposed within the confinement volume such that the at least one getter device is substantially parallel to and spaced apart from the at least one screen. The at least one getter device has an inner surface facing the at least one screen and an outer surface facing the confinement volume, with at least the inner surface being formed of getter material. The at least one getter device is spaced apart from the at least one screen such that the inner surface and the at least one screen define an inner space that is in gas flow communication with the confinement volume.

Abstract translation: 公开了一种用于净化处理室的约束体积内的气体气氛的吸气系统。 在设置有限定约束体积的至少一个筛网的处理室中，吸气系统包括设置在约束体积内的至少一个基本上平面的吸气装置，使得至少一个吸气装置基本上平行于并与之隔开 至少一个屏幕。 所述至少一个吸气装置具有面向所述至少一个筛网的内表面和面向所述约束体积的外表面，至少所述内表面由吸气剂材料形成。 所述至少一个吸气装置与所述至少一个筛网间隔开，使得所述内表面和所述至少一个筛网限定与所述约束体积气体连通的内部空间。

公开(公告)号：US6149392A

公开(公告)日：2000-11-21

申请号：US167842

申请日：1998-10-07

Applicant: Andrea Conte

Inventor： Andrea Conte

IPC: F04B37/04 ,  F04B37/02 ,  H01J7/18

CPC classification number: H01J7/18 ,  F04B37/02

Abstract: A getter pump with high gas sorption velocity includes a cylindrical housing that has an open end and a closed end and defines a chamber with a central axis. Three to eight getter structures are disposed within the chamber. The getter structures are symmetrically arranged around the central axis of the chamber and are substantially parallel to the central axis of the chamber. Each of the getter structures includes a plurality of porous disks of getter material disposed on a central shaft. A heater is centrally disposed within the chamber such that the heater is substantially coaxial with the central axis of the chamber.

Abstract translation: 具有高气体吸附速度的吸气泵包括具有开口端和封闭端并限定具有中心轴线的腔室的圆柱形壳体。 在室内设置三到八个吸气结构。 吸气剂结构围绕室的中心轴线对称地设置并且基本上平行于室的中心轴线。 吸气剂结构中的每一个包括设置在中心轴上的吸气剂材料的多个多孔盘。 加热器居中地设置在室内，使得加热器基本上与室的中心轴线同轴。

公开(公告)号：US5835991A

公开(公告)日：1998-11-10

申请号：US730174

申请日：1996-10-15

Applicant: Takahiro Niiyama ,  Shigeo Itoh ,  Teruo Watanabe

Inventor： Takahiro Niiyama ,  Shigeo Itoh ,  Teruo Watanabe

IPC: H01J7/18 ,  H01J29/94 ,  H01J1/02

CPC classification number: H01J29/94 ,  H01J7/18 ,  H01J2201/30403 ,  H01J2329/00

Abstract: A getter device capable of being re-activated as required and arranged in a narrow space in an envelope. The getter is arranged in a layer-like manner in an envelope of an electronic element to provide, in the envelope, a film-like getter for keeping an interior of the envelope at a vacuum. Electrons emitted from an electron feed section are impinged on the getter to activate it. The getter activated adsorbs thereon gas in an envelope of an image display device.

Abstract translation: 一种吸气装置，其能够根据需要重新启动并布置在信封的狭窄空间中。 吸气剂以层状的方式布置在电子元件的外壳中，以在外壳中提供用于将真空保持在外壳内部的膜状吸气剂。 从电子馈送部分发射的电子撞击吸气剂以激活它。 吸气剂在图像显示装置的外壳中吸附气体。

公开(公告)号：US5360572A

公开(公告)日：1994-11-01

申请号：US196929

申请日：1994-02-15

Applicant: Steven P. Hotaling ,  Deidra A. Dykeman

Inventor： Steven P. Hotaling ,  Deidra A. Dykeman

IPC: B01D39/20 ,  B01D45/08 ,  B01D46/10 ,  F24F3/16 ,  H01J7/18 ,  H01J17/18 ,  A61L9/00 ,  B01D49/00 ,  B01D53/02 ,  G03G21/00 ,  H01L21/306

CPC classification number: B01D39/2051 ,  B01D45/08 ,  B01D46/10 ,  F24F3/1603 ,  H01J7/18 ,  Y10S438/909

Abstract: A porous light-weight getter which collects particulate and molecular contaminates that is believed a significant improvement over the prior art is provided in which a metal mesh matrix is coated with a low-density porous aerogel. In the prior art bare metal mesh matrices have been employed as getters, which are subject to ablation from high-velocity contaminant particles. In the composite getter of the present invention, the low-density aerogel coating protects the enclosed metal matrix from ablation and also can attract and hold the incoming high-velocity particle. On its part, the metal mesh provides reinforcing support to the aerogel covering and also good thermal conductivity therein so that such covering can be cooled to the low temperatures that attract such contaminants. The invention further provides method for manufacture of the composite getters of the invention. Such composite getters are useful in decontamination in semiconductor manufacturing processes and storage thereof and in decontaminating optical systems including a space-based telescope.In other embodiments, the getter of the invention can be mounted in air ducts to serve as a filter therefor, can be mounted in a photocopier for capture of toner fog, can be mounted in areas of semiconductor manufacturing for collecting contaminates proximate thereto, can be mounted in operating rooms, cleanrooms, in storage areas for surgical instruments, in spacecraft and the like for decontamination thereof.

公开(公告)号：US5308533A

公开(公告)日：1994-05-03

申请号：US981923

申请日：1992-11-12

Applicant: Steven P. Hotaling ,  Deidra A. Dykeman

Inventor： Steven P. Hotaling ,  Deidra A. Dykeman

IPC: B01D39/20 ,  B01D45/08 ,  B01D46/10 ,  F24F3/16 ,  H01J7/18 ,  H01J17/18

CPC classification number: F24F3/1603 ,  B01D39/2051 ,  B01D45/08 ,  B01D46/10 ,  H01J7/18

Abstract: A porous light-weight getter which collects particulate and molecular contaminates that is believed a significant improvement over the prior art is provided in which a metal mesh matrix is coated with a low-density porous aerogel. In the prior art bare metal mesh matrices have been employed as getters, which are subject to ablation from high-velocity contaminant particles. In the composite getter of the present invention, the low-density aerogel coating protects the enclosed metal matrix from ablation and also can attract and hold the incoming high-velocity particle. On its part, the metal mesh provides reinforcing support to the aerogel covering and also good thermal conductivity therein so that such covering can be cooled to the low temperatures that attract such contaminants. The invention further provides method for manufacture of the composite getters of the invention. Such composite getters are useful in decontamination in semiconductor manufacturing processes and storage thereof and in decontaminating optical systems including a space-based telescope. In other embodiments, the getter of the invention can be mounted in air ducts to serve as a filter therefor, can be mounted in a photocopier for capture of toner fog, can be mounted in areas of semiconductor manufacturing for collecting contaminates proximate thereto, can be mounted in operating rooms, cleanrooms, in storage areas for surgical instruments, in spacecraft and the like for decontamination thereof.

Abstract translation: 提供了一种聚集微粒和分子污染物的多孔轻质吸气剂，其被认为比现有技术显着改进，其中金属网孔基体涂覆有低密度多孔气凝胶。 在现有技术中，已经使用裸金属网格矩阵作为吸收剂，其被高速污染物颗粒消融。 在本发明的复合吸气剂中，低密度气凝胶涂层保护封闭的金属基体不被烧蚀，并且还可以吸引和保持进入的高速颗粒。 就其而言，金属网为气凝胶覆盖物提供增强支撑，并且在其中具有良好的导热性，使得这种覆盖物可以被冷却到吸引这种污染物的低温。 本发明还提供了制造本发明的复合吸气剂的方法。 这种复合吸气剂在半导体制造过程中的去污和其存储以及在包括天基望远镜的光学系统的净化中是有用的。 在其他实施方案中，本发明的吸气剂可以安装在空气管道中以用作过滤器，可以安装在复印机中以捕获调色剂雾，可以安装在用于收集邻近污染物的半导体制造区域中，可以是 安装在手术室，洁净室，手术器械存储区域，航天器等中，以进行净化。

公开(公告)号：US4668203A

公开(公告)日：1987-05-26

申请号：US804597

申请日：1985-12-04

Applicant: Giuliano Giudici

Inventor： Giuliano Giudici

IPC: H01J7/18 ,  H01J9/39 ,  H01J9/42 ,  H01J9/44

CPC classification number: H01J9/42 ,  H01J7/18

Abstract: A method for checking the evaporation of a pellet of getter material such as barium on the walls of the envelope of a cathode-ray tube during manufacture. The pressure within the cathode-ray tube is measured during the operation involving stabilization of the cathode material by measuring the positive-ion charge within the tube.

Abstract translation: 一种用于在制造期间检查阴极射线管的外壳壁上的吸气剂材料如钡的颗粒的蒸发的方法。 在操作过程中测量阴极射线管内的压力，包括通过测量管内的正离子电荷来稳定阴极材料。

公开(公告)号：US4534708A

公开(公告)日：1985-08-13

申请号：US638496

申请日：1984-08-07

Applicant: Heinz Maegdefessel

Inventor： Heinz Maegdefessel

IPC: F04B37/02 ,  H01J7/18 ,  F04B37/04

CPC classification number: H01J7/18 ,  F04B37/02

Abstract: A getter sorption pump has at least one getter member of non-evaporating getter material and a corresponding heating element. The specific performance of the getter pump is increased along with a simultaneous reduction of necessary heating capacity, and it is stabilized over a long time period by use of a heat accumulator having an extremely high heat storing capability. For this purpose, the heating element is attached to a sintered ceramic body, and an insulating tube onto which the getter member is sintered, in situated thereabove. The getter pump is employed in high-vacuum and gas discharge systems.

Abstract translation: 吸气剂吸附泵具有至少一个非蒸发吸气剂吸气剂构件和相应的加热元件。 吸气泵的具体性能随着必要的加热能力的同时减少而增加，并且通过使用具有非常高的蓄热能力的蓄热器在长时间内稳定。 为此，将加热元件安装在烧结陶瓷体上，并且将位于其上方的绝缘管附接到吸气部件上。 吸气泵用于高真空和气体放电系统。

公开(公告)号：US3926832B1

公开(公告)日：1984-12-18

申请号：US38367773

申请日：1973-07-30

IPC: H01J61/26 ,  H01J7/18 ,  H01J9/39 ,  H01K1/56 ,  H05B3/00

CPC classification number: H01K1/56 ,  H01J7/18 ,  H05B3/00

公开(公告)号：USRE31388E

公开(公告)日：1983-09-20

申请号：US190392

申请日：1980-09-24

Applicant: Stephen J. Hellier ,  Anselmo G. Passoni

Inventor： Stephen J. Hellier ,  Anselmo G. Passoni

IPC: F04B37/04 ,  H01J7/18 ,  H01J29/94

CPC classification number: F04B37/04 ,  H01J29/94 ,  H01J7/18

Abstract: A getter device with an organosilane coating.