公开(公告)号：US06259524B1

公开(公告)日：2001-07-10

申请号：US09403635

申请日：2000-01-10

Applicant: Johannes Willem Hofstraat ,  Godefriedus J. Brakenhoff ,  Rick I. Ghauharali

Inventor： Johannes Willem Hofstraat ,  Godefriedus J. Brakenhoff ,  Rick I. Ghauharali

IPC: G01J110

CPC classification number: G01N21/278 ,  G01N21/6458 ,  G01N21/65 ,  Y10T436/10

Abstract: The invention pertains to a calibration layer comprising an optically transparent polymer containing an amount of photobleachable luminscent material present in such a way that the final polymer film contains less than 10 wt. % of luminophore and has an optical attenuation of less than 0.3 absorption units in the wavelength region of interest. The invention further is concerned with a method of calibration of an optical image device, preferably an optical or Raman microscope, by using the decrease in luminescence as the result of photobleaching between two consecutive images for calibration.

Abstract translation: 本发明涉及一种校准层，其包括光学透明聚合物，其含有一定量的可光漂白的发光材料，以使得最终聚合物膜含有小于10wt。 ％的发光体，并且在感兴趣的波长区域中具有小于0.3个吸收单位的光学衰减。 本发明还涉及通过在两个连续图像之间进行光漂白的结果使用发光减少来校准光学图像装置，优选光学或拉曼显微镜的方法。

公开(公告)号：US06704103B2

公开(公告)日：2004-03-09

申请号：US09939466

申请日：2001-08-23

Applicant: Rui-Fang Shi ,  Carlos A. Duran

Inventor： Rui-Fang Shi ,  Carlos A. Duran

IPC: G01J110

CPC classification number: G01B11/0616

Abstract: The present invention is a method for providing a disk of an optical tester. The disk comprises a transparent substrate that has a first surface and an opposite second surface. The disk also includes a coating on the first surface of the transparent substrate. An identical coating can be applied to the second surface of the transparent substrate. The coating can have multiple layers of thin films. The present invention provides a method to determine the required thickness of the coating to enhance the sensitivity of zero flying height measurement.

Abstract translation: 本发明是提供光学测试仪的盘的方法。 盘包括具有第一表面和相对的第二表面的透明基底。 该盘还包括在透明基底的第一表面上的涂层。 可以将相同的涂层施加到透明基板的第二表面。 该涂层可以具有多层薄膜。 本发明提供一种确定涂层所需厚度以提高零飞行高度测量的灵敏度的方法。

公开(公告)号：US06646736B1

公开(公告)日：2003-11-11

申请号：US09958780

申请日：2001-10-12

Applicant: Göran Åsemyr

Inventor： Göran Åsemyr

IPC: G01J110

CPC classification number: G01N21/93

Abstract: Equipment for detecting impurities in transparent material comprising a light source to illuminate the material, a camera to detect light transmitted through the material and signal-processing apparatus for processing and analysing signals from the camera representing the light transmission through the material. This type of equipment is calibrated by dark areas being displayed on a film of transparent material (22, 24, 26) and the actual sizes (30) of the areas being determined. The sizes of the dark areas are then determined using the detecting equipment (34) and in this way determined sizes are compared with actual sizes (36) for calibration of the detecting equipment (38).

Abstract translation: 用于检测透明材料中的杂质的设备，包括用于照射材料的光源，用于检测通过材料传输的光的照相机和用于处理和分析来自表示通过材料的光透射的来自相机的信号的信号处理装置。 这种类型的设备由在透明材料（22,24,26）的膜上显示的暗区校正，并且确定的区域的实际尺寸（30）。 然后使用检测设备（34）确定暗区域的尺寸，并且以这种方式将确定的尺寸与用于检测设备（38）的校准的实际尺寸（36）进行比较。

公开(公告)号：US06507013B2

公开(公告)日：2003-01-14

申请号：US09751102

申请日：2000-12-28

Applicant: Eberhard Loecklin

Inventor： Eberhard Loecklin

IPC: G01J110

CPC classification number: G01J3/02 ,  G01J2003/2866

Abstract: An optical reference signal with a gas sealed in a space, an optical fiber and a lens collecting the light beam exiting the optical fiber before the front end of the space and a photodetector at the back end of the space, which can be connected with an evaluation device. Such an optical reference element makes it possible to use cost-effective and readily available components to provide a reference signal for calibrating an optical spectrum analyzer, for example. The optical reference element is connected to the output of the optical device.

Abstract translation: 具有密封在空间中的气体的光学参考信号，光纤和在该空间的前端之前收集离开光纤的光束的透镜和在该空间的后端处的光电检测器，其可以与 评估装置。 这样的光学参考元件使得可以使用成本有效且易于获得的部件来提供用于校准光谱分析仪的参考信号。 光学参考元件连接到光学设备的输出端。

公开(公告)号：US06459482B1

公开(公告)日：2002-10-01

申请号：US09729294

申请日：2000-12-04

Applicant: Bhanwar Singh ,  Ramkumar Subramanian ,  Khoi A. Phan ,  Bharath Rangarajan ,  Michael K. Templeton ,  Sanjay K. Yedur ,  Bryan K. Choo

Inventor： Bhanwar Singh ,  Ramkumar Subramanian ,  Khoi A. Phan ,  Bharath Rangarajan ,  Michael K. Templeton ,  Sanjay K. Yedur ,  Bryan K. Choo

IPC: G01J110

CPC classification number: H01J37/28 ,  H01J2237/2826

Abstract: The present invention provides SEM systems, SEM calibration standards, and SEM calibration methods that improved accuracy in critical dimension measurements. The calibration standards have features formed with an amorphous material such as amorphous silicon. Amorphous materials lack the crystal grain structure of materials such as polysilicon and are capable of providing sharper edged features and higher accuracy patterns than grained materials. The amorphous material can be bound to a silicon wafer substrate through an intermediate layer of material, such as silicon dioxide. Where the intermediate layer is insulating material, as is silicon dioxide, the intermediate layer may be patterned with gaps to provide for electrical communication between the amorphous silicon and the silicon wafer. Charges imparted to the amorphous silicon during electron beam scanning may thereby drain to the silicon wafer rather than accumulating to a level where they would distort the electron beam.

Abstract translation: 本发明提供SEM系统，SEM校准标准和SEM校准方法，提高了临界尺寸测量的精度。 校准标准品具有非晶体材料如非晶硅形成的特征。 无定形材料缺乏诸如多晶硅的材料的晶粒结构，并且能够提供比颗粒材料更尖锐的边缘特征和更高精度的图案。 非晶材料可以通过诸如二氧化硅的材料的中间层与硅晶片衬底结合。 在中间层是绝缘材料的情况下，如二氧化硅那样，中间层可以用间隙图案化以提供非晶硅和硅晶片之间的电连通。 因此，在电子束扫描期间赋予非晶硅的电荷可以从而被排出到硅晶片，而不是积聚到它们会使电子束变形的水平。

公开(公告)号：US06421120B1

公开(公告)日：2002-07-16

申请号：US09430554

申请日：1999-10-29

Applicant: Kenneth R. Wildnauer

Inventor： Kenneth R. Wildnauer

IPC: G01J110

CPC classification number: G01J3/28 ,  G01N21/274

Abstract: Optical wavelength reference apparatus with wide wavelength range. Illuminated by a wideband source, a first reference such as absorption lines in a gas cell is used as a transfer standard, calibrating the response of the secondary reference over the range of the first reference. The performance of the second reference is extrapolated to a wider wavelength range, retaining the stability and accuracy characteristics of the first reference. Suitable secondary devices include etalons such as Fabry-Perot filters and Mach-Zehnder interferometers.

Abstract translation: 具有宽波长范围的光波长参考装置。 通过宽带源照明，使用第一参考例如气室中的吸收线作为转移标准，在第一参考的范围上校准次参考的响应。 将第二参考的性能外推到更宽的波长范围，保持第一参考的稳定性和精度特性。 合适的次级装置包括标准具，例如法布里 - 珀罗滤波器和马赫 - 曾德尔干涉仪。

公开(公告)号：US06333785B1

公开(公告)日：2001-12-25

申请号：US09380329

申请日：1999-11-12

Applicant: Rüdiger Schmolke ,  Dieter Gräf ,  Robert Kerschreiter ,  Hans-Adolf Gerber ,  Anton Luger ,  Monique Suhren

Inventor： Rüdiger Schmolke ,  Dieter Gräf ,  Robert Kerschreiter ,  Hans-Adolf Gerber ,  Anton Luger ,  Monique Suhren

IPC: G01J110

CPC classification number: G01N21/93

Abstract: The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.

Abstract translation: 本发明涉及用于校准和检查用于检查样品的平坦表面的表面检查装置的光场通道的可再现标准，以及用于制造所述标准的方法，由此在所提供的基板的表面上产生微结构 作为标准，其特征在于使微结构平滑化。

公开(公告)号：USRE37197E1

公开(公告)日：2001-05-29

申请号：US09132660

申请日：1998-08-12

Applicant: Toru Iida ,  Michihito Ohashi ,  Yoshihiro Sakai ,  Shin-ichi Kuramoto ,  Shunichi Chiba ,  Yasuo Asahina ,  Junko Tomita

Inventor： Toru Iida ,  Michihito Ohashi ,  Yoshihiro Sakai ,  Shin-ichi Kuramoto ,  Shunichi Chiba ,  Yasuo Asahina ,  Junko Tomita

IPC: G01J110

CPC classification number: B41J29/26 ,  B41M7/0009 ,  G03G21/00

Abstract: The present invention discloses a device for regenerating a sheet-like recording medium comprising a means for feeding a printed sheet-like recording medium, a regenerating treatment means having a step for eliminating image formed on said recording medium, a means for discriminating and separating the recording medium whether the treated recording medium is reusable or not and a means for storing the separated reusable recording medium. Further, the present invention discloses, as Examples, regenerating treatment means treating sheet-like recording media printed with following toners or inks with following degrading agent or a color eliminating agent; (i) a toner comprising biodegradable plastics as a constituent ingredient and an enzyme containing liquid as a degrading agent; (ii) a toner comprising photodegradable plastics as a constituent ingredient and an irradiation of a light containing a short wavelength light; (iii) a toner or an ink using a coloring material comprising an electron-donating color-forming organic compound and its developer and a color-eliminating agent; and (iv) a toner or an ink using a coloring material comprising an electron-accepting color-forming organic compound and its developer and a color-eliminating agent.

Abstract translation: 本发明公开了一种用于再生片状记录介质的装置，包括用于馈送印刷的片状记录介质的装置，具有用于消除在所述记录介质上形成的图像的步骤的再生处理装置，用于区分和分离 记录介质是否可重复使用处理的记录介质以及用于存储分离的可重复使用的记录介质的装置。另外，本发明作为实例公开了再生处理装置，其处理用随后降解的以下调色剂或油墨印刷的片状记录介质 试剂或消色剂;（i）包含可生物降解塑料作为构成成分的调色剂和含有液体的降解剂的调色剂;（ii）包含可光降解塑料作为组成成分的调色剂和包含短纤维的光的照射 波长光;（iii）使用包含电的着色材料的调色剂或油墨 提供成色有机化合物及其显影剂和消色剂; 和（iv）使用包含电子接受成色有机化合物及其显影剂和着色剂的着色材料的调色剂或油墨。