Method of thin film process control and calibration standard for optical profilometry step height measurement
    1.
    发明授权
    Method of thin film process control and calibration standard for optical profilometry step height measurement 失效
    薄膜过程控制方法和光学轮廓测量步高测量的校准标准

    公开(公告)号:US06490033B1

    公开(公告)日:2002-12-03

    申请号:US09478149

    申请日:2000-01-05

    CPC classification number: G01B11/0675

    Abstract: A method of calibrating an interferometer system and a multilayer thin film used for calibrating the interferometer system. The method including measuring the step height of a gold step with the interferometer system, the multilayer thin film comprising a gold layer that defines the gold step. The multilayer thin film having an optical flat, a first layer on the surface of the optical flat, a second layer on the first layer, a test layer on a part of the second layer, and a gold layer on the test layer and on a part of the second layer uncovered by the test layer. The test layer having a test layer step, and the gold layer having a gold step over the test layer step. Also, a reference standard and a method of making the reference standard for a thin film sample with one or more component thin film layers, the reference standard having a gold layer over the surface of the thin film sample.

    Abstract translation: 校准干涉仪系统和用于校准干涉仪系统的多层薄膜的方法。 该方法包括用干涉仪系统测量金台阶的台阶高度,多层薄膜包括限定金阶的金层。 所述多层薄膜具有光学平面,在光学平面的表面上的第一层,第一层上的第二层,第二层的一部分上的测试层,以及测试层上的金层 由测试层覆盖的第二层的一部分。 所述测试层具有测试层步骤,并且所述金层在所述测试层步骤上具有金阶。 此外,参考标准和制备具有一个或多个组分薄膜层的薄膜样品的参考标准的方法,参考标准在薄膜样品的表面上具有金层。

    Wavelength reference standard using multiple gases
    2.
    发明授权
    Wavelength reference standard using multiple gases 失效
    使用多种气体的波长参考标准

    公开(公告)号:US06249343B1

    公开(公告)日:2001-06-19

    申请号:US09429052

    申请日:1999-10-29

    CPC classification number: G01N21/3504 G01J3/28 G01J2003/2866 G01N21/274

    Abstract: Wavelength reference standard using multiple gasses and calibration methods using same. A wavelength reference using absorption lines of multiple gasses provides stable reference wavelengths over multiple regions of interest of the optical spectrum. The gasses may be in separate cells or combined in one cell. Improved calibration using the reference is achieved by performing calibration measurements at a plurality of known wavelengths and using an average calibration constant derived from the plurality of measurements. In a second embodiment, improved calibration is achieved by performing calibration measurements at a plurality of known wavelengths and calculating a higher order calibration model, such as a least-squares linear fit. Both approached may be extended by segmenting the wavelength range and using calculated calibration values for each segment.

    Abstract translation: 使用多种气体的波长参考标准和使用相同的校准方法。 使用多个气体的吸收线的波长参考在光谱的多个感兴趣区域上提供稳定的参考波长。 气体可以在单独的单元中或在一个单元中组合。 使用参考的改进的校准是通过在多个已知波长下执行校准测量并使用从多个测量得到的平均校准常数来实现的。 在第二实施例中,通过在多个已知波长下执行校准测量并计算诸如最小二乘线性拟合的较高阶校准模型来实现改进的校准。 可以通过分割波长范围并使用每个段的计算校准值来扩展两者。

    Calibration methods for placement machines incorporating on-head linescan sensing
    3.
    发明授权
    Calibration methods for placement machines incorporating on-head linescan sensing 失效
    结合头部线路的贴片机的校准方法可以感测

    公开(公告)号:US06744499B2

    公开(公告)日:2004-06-01

    申请号:US10337644

    申请日:2003-01-07

    Abstract: A method of calibrating a pick and place machine having an on-head linescan sensor is disclosed. The calibration includes obtaining z-axis height information of one or more nozzle tips via focus metric methods, including a Fourier transform method and a normalized correlation method. Additionally, other physical characteristics such as linear detector tilt, horizontal scale factor, and vertical scale factor are measured and compensated for in the process of placing the component. Nozzle runout, another physical characteristic, is also measured by a sinusoidal curve fit method, and the resulting Z-height calibration data is used to later place the component.

    Abstract translation: 公开了一种校准具有头部线扫描传感器的拾放机的方法。 校准包括通过焦点度量方法获得一个或多个喷嘴尖端的z轴高度信息,包括傅立叶变换方法和归一化相关方法。 此外,在放置部件的过程中,测量和补偿其他物理特性,例如线性检测器倾斜,水平比例因子和垂直比例因子。 另一种物理特性的喷嘴径流也通过正弦曲线拟合法测量,并且所得到的Z高度校准数据用于稍后放置组件。

    Method and apparatus for the production of thin films
    4.
    发明授权
    Method and apparatus for the production of thin films 失效
    用于生产薄膜的方法和装置

    公开(公告)号:US06594008B1

    公开(公告)日:2003-07-15

    申请号:US09722978

    申请日:2000-11-27

    CPC classification number: B05C11/08 B05D1/005 G11B5/84

    Abstract: Method and apparatus for forming thin films by the application of a film forming liquid to a substrate at rest or rotating a speed up to 500 rpm and then rotating the film forming liquid on the substrate at a speed and for a time sufficient to form the thin film. Such films can be used for analysis by spectrophotometric methods. Apparatus for forming such thin films is also disclosed.

    Abstract translation: 通过将膜形成液体施加到基板上或者将转速高达500转/分转动的方法和装置,然后以一定的速度旋转成膜液体至足以形成薄片 电影。 这种膜可以用于通过分光光度法进行分析。 还公开了用于形成这种薄膜的设备。

    Method and apparatus for detecting and measuring conditions affecting color
    5.
    发明授权
    Method and apparatus for detecting and measuring conditions affecting color 失效
    用于检测和测量影响颜色的条件的方法和装置

    公开(公告)号:US06437863B1

    公开(公告)日:2002-08-20

    申请号:US09544250

    申请日:2000-04-05

    Abstract: A method and apparatus for determining the condition of a test subject based on color uses a color measuring instrument to detect change in a color factor indicative of a condition such as a disease, spoilage, ageing, etc. A medical condition such as bilirubinemia that affects skin color can be detected. One measures color factors such as Hunter b and L in the subjects' skin color. For predetermined ranges of one color factor, in particular L, changes in the other color factor, e.g. Hunter b, above predetermined levels are indicative of the medical condition. In many cases, a single measurement of the color factors can be utilized as a warning of the likelihood of the medical or contaminated condition, if the ordinary range of the color factor is known for healthy individuals with skin coloration like that of the test subject. Even if there has been no baseline measurement and the test subject's color is such that a single reading of one or two color factors will not warn of the possible presence of the medical condition or contamination, sequential readings can indicate the presence or absence of the condition based upon changes in the measured color factor, or lack of changes. The color measuring techniques apply to a wide range of biological test subjects (e.g. hair, teeth, tissue, excretions, foods, soil, animals, plants). Methods and apparatus for determining accurate hair color classifications and appropriate coloring agents to bring about a selected change of color include a table of hair color classifications, a color measuring instrument to arrive at Hunter L, a and b for use in identifying a particular classification from the table and a database that identifies appropriate coloring agents based on a selection of coloring actions from a menu and the classifications of hair color.

    Abstract translation: 用于基于颜色确定测试对象的状况的方法和装置使用颜色测量仪器来检测指示疾病,腐败,衰老等状况的颜色因子的变化。影响如胆红素血症的医学病症 可检测肤色。 一种可以测量受试者皮肤颜色中的Hunter b和L等颜色因素。 对于一个颜色因子,特别是L的预定范围,另一个颜色因子的变化,例如, 超过预定水平的猎人b表示医疗状况。 在许多情况下,如果颜色因子的普通范围对于具有类似于受检对象的皮肤着色的健康个体是已知的,则颜色因子的单次测量可以用作对医疗或污染状况的可能性的警告。 即使没有基线测量,并且测试对象的颜色使得一个或两个颜色因子的单次读数不会警告可能存在的医疗状况或污染,顺序读数可以指示条件的存在或不存在 基于测量的颜色因子的变化或缺乏变化。 颜色测量技术适用于广泛的生物测试对象(例如,头发,牙齿,组织,排泄物,食物,土壤,动物,植物)。 用于确定准确的毛发颜色分类的方法和装置以及适当的着色剂以引起选择的颜色变化,包括头发颜色分类表,到达猎人L的颜色测量仪器,用于识别特定分类的颜色测量仪器 该表和一个数据库,其基于来自菜单的选择着色动作和毛发颜色的分类来识别适合的着色剂。

    Spatial reference system
    6.
    发明授权

    公开(公告)号:US06836323B2

    公开(公告)日:2004-12-28

    申请号:US10675788

    申请日:2003-09-30

    CPC classification number: G01B21/042

    Abstract: The present invention overcomes the disadvantages of the related art by providing a spatial reference system that includes at least one artifact assembly. The artifact assembly has a measuring bar assembly including an inner member with a proximate end and a distal end, an outer member with a proximate end and a distal end, and a compensating member with a proximate end and a distal end operatively disposed between said inner and said outer members. The distal end of the outer member is fixedly mounted to the distal end of the compensating member. The proximate end of the compensating member is fixedly mounted to the proximate end of the inner member. The inner and the outer members each have a predetermined length and a predetermined coefficient of thermal expansion and the compensating member has a predetermined length and a predetermined coefficient of thermal expansion, such that the thermal expansion of the inner and the outer members is substantially eliminated by the expansion of the compensating member.

    Test slide for microscopes and method for the production of such a slide
    7.
    发明授权
    Test slide for microscopes and method for the production of such a slide 失效
    用于显微镜的测试滑块和用于生产这种滑块的方法

    公开(公告)号:US06381013B1

    公开(公告)日:2002-04-30

    申请号:US08882491

    申请日:1997-06-25

    CPC classification number: H01J37/20 G01N2001/2893 G02B21/34

    Abstract: A test slide for the calibration, characterization, standardization, use and study of photon and electron microscopes. The slide is created by forming patterns with specific types of geometries on suitable substrates and these slides provide a standard for comparison of image forming capability of any type of microscope imaging system including, without limitation, light, UV, and X-ray photon microscopical imaging systems operating in transmission or reflection modes, and other microscope techniques. Microscopists can employ one of these slides to compare images of the slide which have been produced by the microscope system under consideration with a known, accurate, image of the slide to better understand the fidelity and accuracy of the microscope system under consideration. The test patterns can also comprise reference images which can be images created by a graphic artist or the like or which can be actual images of samples, these images being either two dimensional or three dimensional.

    Abstract translation: 用于光子和电子显微镜的校准,表征,标准化,使用和研究的测试幻灯片。 通过在合适的基底上形成具有特定类型几何形状的图案来创建幻灯片,并且这些幻灯片提供用于比较任何类型的显微镜成像系统的图像形成能力的标准,包括但不限于光,UV和X射线光子显微镜成像 以透射或反射模式运行的系统,以及其他显微镜技术。 显微镜学家可以使用这些幻灯片之一来比较由考虑的显微镜系统产生的幻灯片的图像与幻灯片的已知准确的图像,以更好地理解所考虑的显微镜系统的保真度和准确度。 测试图案还可以包括参考图像,其可以是由图形艺术家等创建的图像,或者可以是样本的实际图像,这些图像是二维或三维的。

    Apparatus and method for calibrating downward viewing image acquisition systems
    8.
    发明授权
    Apparatus and method for calibrating downward viewing image acquisition systems 失效
    用于校准向下观看图像采集系统的装置和方法

    公开(公告)号:US06191851B1

    公开(公告)日:2001-02-20

    申请号:US09301650

    申请日:1999-04-28

    CPC classification number: G01N21/278 G01J3/52 G01J3/524

    Abstract: The present invention is an apparatus and method for calibrating a downward viewing image acquisition system. The apparatus comprises a calibration panel with calibrative material of known reflectivity. The calibrative material coats the panel surface or is pulled across its surface or pulled across its frame so as to maintain a consistent reflectivity and/or emissivity. A housing is provided which protects the calibration panel from the deteriorative effects of natural elements. The housing alternately exposes the calibration panel to the downward viewing image acquisition system as a calibration exposure and covers the calibration panel after the calibration exposure.

    Abstract translation: 本发明是用于校准向下观看图像采集系统的装置和方法。 该装置包括具有已知反射率的校准材料的校准面板。 校准材料涂覆面板表面或拉过其表面或拉过其框架,以保持一致的反射率和/或发射率。 提供了一种保护校准面板免受自然元素恶化影响的外壳。 外壳将校准面板交替地暴露于向下观察图像采集系统作为校准曝光,并在校准曝光后覆盖校准面板。

    Light measuring apparatus and light measuring method
    9.
    发明授权
    Light measuring apparatus and light measuring method 有权
    光测量装置和光测量方法

    公开(公告)号:US06567160B1

    公开(公告)日:2003-05-20

    申请号:US09447266

    申请日:1999-11-23

    CPC classification number: G01J1/42

    Abstract: A light measuring apparatus is provided with a photoelectric conversion element for converting a light energy to an electrical signal, a calculation circuit for calculating a measurement value based on the electrical signal, a memory for storing a correction value, a corrector for correcting the measurement value using the correction value, and a controller for allowing calculation of a recent correction value when the timer measures elapse of a predetermined time, and permitting the memory to renewably store the recent correction value.

    Abstract translation: 光测量装置设置有用于将光能转换为电信号的光电转换元件,用于基于电信号计算测量值的计算电路,用于存储校正值的存储器,用于校正测量值的校正器 使用校正值,以及控制器,用于当定时器测量经过预定时间时允许计算最近的校正值,并且允许存储器可再生地存储最近的校正值。

    Solid state fluorescence and absorption spectroscopy
    10.
    发明授权
    Solid state fluorescence and absorption spectroscopy 失效
    固态荧光和吸收光谱

    公开(公告)号:US06348965B1

    公开(公告)日:2002-02-19

    申请号:US09404968

    申请日:1999-09-24

    Abstract: Solid state devise for the calibration of microplate fluorescence and absorption readers and spectrometers is described. When present in a single moiety, the disclosed device can tell if the lamp photomultiplier tube and optical alignment of the microplate reader or spectrometer deviates from its true value. When present as graded calibration pieces, the disclosed device can be used to calibrate a fluorescence or absorption reader. Calibration pieces are shaped, polished and coated with color absorbing or fluorescent standard to fit in microplate holding trays or spectrometers which are commercially available. Solid state devices are stable and durable and very inert to manipulations and thus are more reliable and unfaltering than solutions for absorption and fluorescence microplate readers or spectrometers.

    Abstract translation: 描述了用于校准微板荧光和吸收读数器和光谱仪的固态设计。 当存在于单个部分时,所公开的装置可以判断灯光电倍增管和酶标仪或光谱仪的光学校准是否偏离其真实值。 当作为分级校准件存在时,所公开的装置可用于校准荧光或吸收读数器。 校准件被成形,抛光并涂覆有吸光或荧光标准,以适合市售的微孔板保持盘或光谱仪。 固态器件是稳定和耐用的,对于操作非常惰性,因此比用于吸收和荧光微孔板读数器或光谱仪的溶液更可靠和不可靠。

Patent Agency Ranking