公开(公告)号：US06566640B2

公开(公告)日：2003-05-20

申请号：US09961704

申请日：2001-09-24

Applicant: Yeong-Wei Wu ,  Rongsheng Li

Inventor： Yeong-Wei Wu ,  Rongsheng Li

IPC: G01J120

CPC classification number: B64G1/361 ,  B64G1/288 ,  G01C21/025

Abstract: A method and apparatus for post processing a star tracker measurement to remove a systematic error characterizable at least in part by a pixel phase is disclosed. The method comprises the steps of computing the pixel phase along a first axis from a measured star position and a star tracker characteristic, computing a first axis error correction according to the computed pixel phase, and computing a compensated first axis star tracker measurement according to the measured star position and the first axis error correction.

Abstract translation: 公开了用于后处理星形跟踪器测量以去除至少部分由像素相位表征的系统误差的方法和装置。 该方法包括以下步骤：从测量的星形位置和星形跟踪器特性计算沿着第一轴的像素相位，根据所计算的像素相位计算第一轴误差校正，以及根据所计算的像素相位计算补偿的第一轴星形跟踪器测量 测量星座位置和第一轴误差校正。

公开(公告)号：US06521877B1

公开(公告)日：2003-02-18

申请号：US09721451

申请日：2000-11-22

Applicant: Werner Müller-Rissmann ,  Hubert Holderer ,  Rudolf Von Bünau ,  Christian Wagner ,  Jochen Becker ,  Stefan Xalter ,  Wolfgang Hummel

Inventor： Werner Müller-Rissmann ,  Hubert Holderer ,  Rudolf Von Bünau ,  Christian Wagner ,  Jochen Becker ,  Stefan Xalter ,  Wolfgang Hummel

IPC: G01J120

CPC classification number: G03F7/70891

Abstract: An optical arrangement, in particular a microlithographic projection printing installation, has in particular a slot-shaped image field or rotationally non-symmetrical illumination. A refractive optical element, e.g. a lens (2), is heated by the rotationally non-symmetrical radiated impingement (3) of a light source. At least one electric heating element is coupled to the optical element. Said heating element comprises a resistance heating coating carried by the optical element. In the region of the surface (3) of the optical element acted upon by the radiation of the light source the resistance heating coating is substantially optically transparent. It comprises a plurality of parallel, electrically mutually insulated coating strips (5 to 10). A heating current source (17 to 19) is additionally part of the heating element. By virtue of the combined heating of the optical element by the radiated impingement (3) and the resistance heating, a correction of imaging defects induced by illumination in the optical element is achieved by means of a symmetrical and/or homogeneous temperature and refractive index distribution.

Abstract translation: 光学布置，特别是微光刻投影印刷装置，特别地具有槽形图像场或旋转非对称照明。 折射光学元件，例如 透镜（2）被光源的旋转非对称辐射冲击（3）加热。 至少一个电加热元件耦合到光学元件。 所述加热元件包括由光学元件承载的电阻加热涂层。 在由光源的辐射作用的光学元件的表面（3）的区域中，电阻加热涂层基本上是光学透明的。 它包括多个平行的，电互相绝缘的涂层条（5至10）。 加热电流源（17〜19）是加热元件的另外一部分。 由于通过辐射冲击（3）和电阻加热对光学元件的组合加热，通过对称和/或均匀的温度和折射率分布来实现由光学元件中的照明引起的成像缺陷的校正 。

公开(公告)号：US06452145B1

公开(公告)日：2002-09-17

申请号：US09579786

申请日：2000-05-26

Applicant: J. Elon Graves ,  Malcolm J. Northcott

Inventor： J. Elon Graves ,  Malcolm J. Northcott

IPC: G01J120

CPC classification number: G02B26/06 ,  G01J9/00 ,  G02B26/0825

Abstract: A wavefront sensor for detecting the wavefront produced by light waves from a light source comprises optically refractory or reflective means for receiving the light waves from the light source and producing two defocused pupil images at two different locations along an optical axis. A detector is positioned at a location spaced from the two locations of the two focused pupil images for the detector means to receive and detect two equally and oppositely defocused pupil images. A computer with appropriate software processes the characteristics of the two defocused pupil images from the detector to determine the curvature of the wavefront based on the light intensities with Dirichlet's boundary conditions for the light waves received by the wavefront sensor.

Abstract translation: 用于检测由光源的光波产生的波前的波前传感器包括用于从光源接收光波的光学耐火或反射装置，并且沿着光轴在两个不同位置产生两个散焦的瞳孔图像。 检测器位于与两个聚焦瞳孔图像的两个位置间隔开的位置处，用于检测器装置，以接收和检测两个相等且相对散焦的瞳孔图像。 具有适当软件的计算机处理来自检测器的两个散焦瞳孔图像的特征，以基于由波前传感器接收的光波的Dirichlet边界条件的光强度来确定波前的曲率。

公开(公告)号：US06376819B1

公开(公告)日：2002-04-23

申请号：US09612222

申请日：2000-07-07

Applicant: Daniel R. Neal ,  Justin D. Mansell

Inventor： Daniel R. Neal ,  Justin D. Mansell

IPC: G01J120

CPC classification number: G01J9/00

Abstract: The spatial resolution of Hartmann-type sensors can be increased by moving a wavefront being sensed relative to the sensor by a non-integral number of apertures. The apertures may have a tilt on at least one side thereof. The lenslets themselves in a lenslet array may serve as the apertures or material may be provided on the lenslet array to create the apertures.

Abstract translation: Hartmann型传感器的空间分辨率可以通过移动相对于传感器感测到的波阵面的非整数倍来增加。 孔可以在其至少一侧具有倾斜。 小透镜阵列中的小透镜本身可以用作孔或材料可以设置在小透镜阵列上以产生孔。

公开(公告)号：US06744031B1

公开(公告)日：2004-06-01

申请号：US09994593

申请日：2001-11-27

Applicant: Haruyuki Suzuki

Inventor： Haruyuki Suzuki

IPC: G01J120

CPC classification number: G11B7/1263 ,  G01J1/32

Abstract: A light intensity control apparatus for use in an information recording and reading system includes a light source driving device for driving a light source so as to generate a light having the first and higher second light intensity levels. A light intensity detection device is provided and includes a first light intensity detection member for detecting a prescribed intensity level of the light when a light modulation speed is relatively low, and a second light intensity detection member for detecting an average of the intensity of the light when it is relatively high. A detection member selection device is provided so as to select one of the first and second light intensity detection members depending upon a selection instruction so as to use one of the detection outputs. A reference level selection device is provided so as to select one of the first and the second reference levels to be compared with the one of the detection results depending upon the selection instruction. A comparison device may be provided so as to compare the one of detection results with a corresponding one of reference levels. A driving current adjustment device is provided in order to adjust the magnitude of a driving current that drives the light source in accordance with the comparison result.

公开(公告)号：US06700108B2

公开(公告)日：2004-03-02

申请号：US10000619

申请日：2001-11-01

Applicant: Peter M. Livingston

Inventor： Peter M. Livingston

IPC: G01J120

CPC classification number: G01J1/02 ,  G01J1/0414 ,  G01J1/26 ,  G01J2001/0285

Abstract: An imaging or viewing system, which automatically compensates for bright spots, which tend to overload or saturate imaging system. The system can be used with imaging type tracking systems, viewers and various types of optical devices which heretofore have been unable to provide satisfactory performance due to saturation or overloading of an imaging device due to bright spots, i.e., laser radiation flares or sunlight. The system in accordance with the invention is configured such that reflected radiation is imaged onto a first image plane without dividing the incoming radiation into two optical paths. A digital mirror device, i.e., is disposed at the first image plane. The radiation level of each pixel in the image plane is compared with a fixed threshold on a pixel by pixel basis and used to generate a mirror drive signal that automatically reduces the reflectivity of the corresponding mirror pixel to compensate for bright spots.

Abstract translation: 成像或观察系统，可自动补偿亮点，这些亮点往往会使成像系统过载或饱和。 该系统可以与成像类型跟踪系统，观看者和各种类型的光学装置一起使用，由于亮点，即激光辐射耀斑或太阳光，由于成像装置的饱和或过载，迄今为止不能提供令人满意的性能。 根据本发明的系统被配置为使得反射的辐射被成像到第一图像平面上，而不将入射的辐射分成两个光路。 数字镜装置，即，设置在第一图像平面处。 将图像平面中的每个像素的辐射水平与逐个像素的固定阈值进行比较，并用于产生自动降低对应的镜像素的反射率以补偿亮点的反射镜驱动信号。

公开(公告)号：US06653611B2

公开(公告)日：2003-11-25

申请号：US09828483

申请日：2001-04-09

Applicant: Dan Eckelkamp-Baker ,  Henry R. Sebesta

Inventor： Dan Eckelkamp-Baker ,  Henry R. Sebesta

IPC: G01J120

CPC classification number: G02B27/646 ,  G01C15/002

Abstract: A system for stabilizing an optical line of sight. An optical system including primary optics and relay optics includes a jitter rejection mirror located within the path of the relay optics. An auto alignment system is provided for maintaining alignment of the jitter rejection mirror in response to a control signal. An auto alignment sensor detects jitter in a reference beam passing through the jitter rejection mirror, and the generated control signal is used to reduce the jitter. The reference beam is supplied by a stabilized source of laser signals which are received by the primary optics, and relayed to the jitter rejection mirror.

公开(公告)号：US06607300B1

公开(公告)日：2003-08-19

申请号：US10251416

申请日：2002-09-20

Applicant: Marcos Y. Kleinerman

Inventor： Marcos Y. Kleinerman

IPC: G01J120

CPC classification number: G01K11/20 ,  G01L1/24 ,  G01L11/02 ,  G01N21/6408 ,  G01N21/6428 ,  Y10T436/207497

Abstract: Method and devices for measuring spot temperatures and surface temperature distributions using a luminophor, and method and devices for determining temperature-corrected oxygen or surface air pressure distributions using the same oxygen-sensitive luminophor. The luminophor is excited sequentially by a first light of wavelengths &lgr;1 and intensity P1 and a second light of wavelengths &lgr;v and intensity PT·, generating a first luminescence light of intensity I1 and a second luminescence light of intensity IT, respectively. The absorption of light of wavelength &lgr;v is substantially temperature-dependent in such a manner that the ratio (IT·P1/I1·PT) increases substantially in a known manner with increasing temperature, substantially independent of any oxygen pressure, and the oxygen pressure can be determined as a function of the luminescence decay time.

Abstract translation: 使用发光体测量点温度和表面温度分布的方法和装置，以及使用相同的氧敏感发光体来确定温度校正的氧气或表面空气压力分布的方法和装置。 发光体由波长lambd1和强度P1的第一光和第二波长lambdv和强度PT的第一光依次激发，分别产生强度为I1的第一发光和强度IT的第二发光。 波长lambdv的光的吸收基本上是温度依赖性的，使得比例（IT.P1 / I1.PT）以已知的方式以增加的温度基本上增加，基本上与任何氧气压力无关，并且氧气压力可以 被确定为发光衰减时间的函数。

公开(公告)号：US06570143B1

公开(公告)日：2003-05-27

申请号：US09787705

申请日：2001-05-21

Applicant: Mark Andrew Aquilla Neil ,  Tony Wilson ,  Martin James Booth

Inventor： Mark Andrew Aquilla Neil ,  Tony Wilson ,  Martin James Booth

IPC: G01J120

CPC classification number: G01J9/00

Abstract: The wavefront sensing device consists of a light source, a binary phase mask (10), a fixed focus lens (11) and at least two finite sized spatially separated detectors (12) positioned in the plane of focus of the wavefront sensing device. The binary phase mask (10) simultaneously applies a positive bias and a negative bias to the wavefront of the incident light such that a pair of spatially separated light points are generated in the plane of focus and detected by the detectors (12). The difference in intensity between the pair of light points is representative of the aberration of the wavefront of the incident light from the ideal.

Abstract translation: 波前感测装置包括光源，二进制相位掩模（10），固定焦距透镜（11）和位于波前感测装置的焦平面中的至少两个有限大小的空间分离的检测器（12）。 二进制相位掩模（10）同时对入射光的波阵面施加正偏压和负偏压，使得在焦平面中产生一对空间分离的光点并由检测器（12）检测。 一对光点之间的强度差表示来自理想的入射光的波前像差。

公开(公告)号：US06552316B1

公开(公告)日：2003-04-22

申请号：US09465894

申请日：1999-12-17

Applicant: Young Dawn Bae

Inventor： Young Dawn Bae

IPC: G01J120

CPC classification number: G01J1/26 ,  A61F9/065 ,  G01J2001/0276 ,  G02C7/101

Abstract: A glare protecting device for protecting a worker's eyes from a light comprising a solar cell for generating a solar voltage when the light is applied thereto; an optical detector for generating a light detecting signal by detecting the light; a non-optical detector for generating an electromagnetic wave detecting signal by detecting an electromagnetic wave; a controller transferring to an operating mode when the light detecting signal is changed, disabling a driving control signal when the driving control signal is enabled, generating a starting signal and enabling the driving control signal in case that the light and/or electromagnetic wave detecting signal is produced when the driving control signal is disabled, and then transferring to a stop mode; a driving means for generating a driving signal by inputting a starting voltage in response to the starting signal and a driving voltage in response to the driving signal; and a glare protecting plate which is driven in response to the driving signal.

Abstract translation: 一种眩光保护装置，用于保护工人的眼睛免受包括太阳能电池在内的光的照射，当太阳能电池被施加到太阳能电池时产生太阳能电压; 光检测器，用于通过检测光产生光检测信号; 用于通过检测电磁波产生电磁波检测信号的非光学检测器; 当光检测信号改变时，控制器转移到操作模式，当驱动控制信号被使能时禁止驱动控制信号，产生启动信号并且在光和/或电磁波检测信号的情况下启动驱动控制信号 当驱动控制信号被禁用时产生，然后转移到停止模式; 驱动装置，用于通过响应于所述驱动信号而响应于所述启动信号和驱动电压输入起动电压来产生驱动信号; 以及响应于驱动信号而驱动的防眩光板。