METHOD FOR MANUFACTURING AN ELECTRONIC DEVICE

    公开(公告)号:US20230012522A1

    公开(公告)日:2023-01-19

    申请号:US17935754

    申请日:2022-09-27

    Abstract: A method for manufacturing an electronic device includes locally implanting ionic species into a first region of a silicon nitride layer and into a first region of an electrically insulating layer located under the first region of the silicon nitride layer. A second region of the silicon nitride layer and a region of the electrically insulating layer located under the second region of the silicon nitride layer are protected from the implantation. The electrically insulating layer is disposed between a semi-conducting substrate and the silicon nitride layer. At least one trench is formed extending into the semi-conducting substrate through the silicon nitride layer and the electrically insulating layer. The trench separates the first region from the second region of the electrically insulating layer. The electrically insulating layer is selectively etched, and the etch rate of the electrically insulating layer in the first region is greater than the etch rate in the second region.

    PHOTOSENSITIVE SENSOR AND CORRESPONDING MANUFACTURING METHOD

    公开(公告)号:US20220406837A1

    公开(公告)日:2022-12-22

    申请号:US17840027

    申请日:2022-06-14

    Inventor: Francois ROY

    Abstract: A photosensitive sensor includes a pixel formed by a photosensitive region in a first semiconductor material, a read region in a second semiconductor material, and a transfer gate facing the parts of the first semiconductor material and the second semiconductor material located between the photosensitive region and the read region. The first semiconductor material and the second semiconductor material have different band gaps and are in contact with one another to form a heterojunction facing the transfer gate.

    ELECTRONIC CIRCUIT COMPRISING A RF SWITCHES HAVING REDUCED PARASITIC CAPACITANCES

    公开(公告)号:US20220359435A1

    公开(公告)日:2022-11-10

    申请号:US17733589

    申请日:2022-04-29

    Abstract: The present disclosure relates to an electronic circuit comprising a semiconductor substrate, radiofrequency switches corresponding to MOS transistors comprising doped semiconductor regions in the substrate, at least two metallization levels covering the substrate, each metallization level comprising a stack of insulating layers, conductive pillars topped by metallic tracks, at least two connection elements each connecting one of the doped semiconductor regions and formed by conductive pillars and conductive tracks of each metallization level. The electronic circuit further comprises, between the two connection elements, a trench crossing completely the stack of insulating layers of one metallization level and further crossing partially the stack of insulating layers of the metallization level the closest to the substrate, and a heat dissipation device adapted for dissipating heat out of the trench.

    PHOTOGRAPHIC SENSOR
    247.
    发明申请

    公开(公告)号:US20220344385A1

    公开(公告)日:2022-10-27

    申请号:US17724739

    申请日:2022-04-20

    Inventor: Francois GUYADER

    Abstract: A semiconductor substrate includes a matrix of photosites. Each photosite is delimited by an isolation trench including polycrystalline silicon. A peripheral zone extends directly around the matrix of photosites. The peripheral zone includes dummy photosites delimited by isolation trenches including polycrystalline silicon. A density of polycrystalline silicon in the peripheral zone is between a density of polycrystalline silicon at an edge of the matrix of photosites and a density of polycrystalline silicon around the peripheral zone.

    Image sensor using a global shutter and method for controlling same

    公开(公告)号:US11451730B2

    公开(公告)日:2022-09-20

    申请号:US16890877

    申请日:2020-06-02

    Abstract: An image sensor includes pixels each including: a first transistor and a first switch that are connected in series between a first node configured to receive a first potential and an internal node of the pixel, a gate of the first transistor being coupled with a floating diffusion node of the pixel; a capacitive element, a first terminal of which is connected to the floating diffusion node of the pixel; and several assemblies each including a capacitance connected in series with a second switch coupling the capacitance to the internal node. The sensor also includes a control circuit configured to control, each time a voltage is stored in one of the assemblies of a pixel, an increase of a determined value of a difference in potential between the floating diffusion node and the internal node of the pixel.

    Single photon avalanche gate sensor device

    公开(公告)号:US11387379B2

    公开(公告)日:2022-07-12

    申请号:US16789052

    申请日:2020-02-12

    Inventor: Francois Roy

    Abstract: A semiconductor layer is doped with a first doping type and has an upper surface. A first electrode insulated from the semiconductor layer extending through the semiconductor layer from the upper surface. A second electrode insulated from the semiconductor layer extends through the semiconductor layer from the upper surface. The first and second electrodes are biased by a voltage to produce an electrostatic field within the semiconductor layer causing the formation of a depletion region. The depletion region responds to absorption of a photon with an avalanche multiplication that produces charges that are collected at first and second oppositely doped regions within the semiconductor substrate.

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