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公开(公告)号:US20230369359A1
公开(公告)日:2023-11-16
申请号:US18225298
申请日:2023-07-24
Inventor: Francois GUYADER , Sara PELLEGRINI , Bruce RAE
IPC: H01L27/146 , H01L31/107 , G01J1/44
CPC classification number: H01L27/1461 , H01L31/107 , H04N25/70 , H01L27/14634 , G01J1/44 , G01J2001/4466
Abstract: An electronic device includes a stack of a first level having a SPAD, a second level having a quench circuit for said SPAD, and a third level having a circuit for processing data generated by said SPAD. A method for making the device includes: a) forming of the first level; b) bonding, on the first level, by molecular bonding, of a stack of layers including a semiconductor layer; and c) forming the quench circuit of the second level in the semiconductor layer.
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公开(公告)号:US20230163057A1
公开(公告)日:2023-05-25
申请号:US18095629
申请日:2023-01-11
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Jean-Pierre CARRERE , Francois GUYADER
IPC: H01L23/498 , H01L21/48 , H01L31/02
CPC classification number: H01L23/49822 , H01L21/4857 , H01L23/49894 , H01L31/02016
Abstract: A first circuit structure of an electronic IC device includes comprises light-sensitive optical circuit components. A second circuit structure of the electronic IC device includes an electronic circuit component and an electrically-conductive layer extending between and at a distance from the optical circuit components and the electronic circuit component. Electrical connections link the optical circuit components and the electronic circuit component. These electrical connections are formed in holes which pass through dielectric layers and the intermediate conductive layer. Electrical insulation rings between the electrical connections and the conductive layer are provided which surround the electrical connections and have a thickness equal to a thickness of the conductive layer.
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公开(公告)号:US20210074618A1
公开(公告)日:2021-03-11
申请号:US17015634
申请日:2020-09-09
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Jean-Pierre CARRERE , Francois GUYADER
IPC: H01L23/498 , H01L21/48 , H01L31/02
Abstract: A first circuit structure of an electronic IC device includes comprises light-sensitive optical circuit components. A second circuit structure of the electronic IC device includes an electronic circuit component and an electrically-conductive layer extending between and at a distance from the optical circuit components and the electronic circuit component. Electrical connections link the optical circuit components and the electronic circuit component. These electrical connections are formed in holes which pass through dielectric layers and the intermediate conductive layer. Electrical insulation rings between the electrical connections and the conductive layer are provided which surround the electrical connections and have a thickness equal to a thickness of the conductive layer.
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公开(公告)号:US20220336520A1
公开(公告)日:2022-10-20
申请号:US17855521
申请日:2022-06-30
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Laurent GAY , Frederic LALANNE , Yann HENRION , Francois GUYADER , Pascal FONTENEAU , Aurelien SEIGNARD
IPC: H01L27/146
Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.
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公开(公告)号:US20190252457A1
公开(公告)日:2019-08-15
申请号:US16270989
申请日:2019-02-08
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Frederic LALANNE , Laurent GAY , Pascal FONTENEAU , Yann HENRION , Francois GUYADER
IPC: H01L27/146
CPC classification number: H01L27/14685 , H01L21/02238 , H01L21/02252 , H01L21/30625 , H01L27/1462 , H01L27/1463 , H01L27/14636 , H01L27/1464 , H01L27/14689
Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.
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公开(公告)号:US20240063235A1
公开(公告)日:2024-02-22
申请号:US18386859
申请日:2023-11-03
Inventor: Francois GUYADER , Sara PELLEGRINI , Bruce RAE
IPC: H01L27/146 , G01J1/44 , H01L31/107 , H04N25/70
CPC classification number: H01L27/1461 , G01J1/44 , H01L27/14634 , H01L31/107 , H04N25/70 , G01J2001/4466
Abstract: An electronic device includes a stack of a first level having a SPAD, a second level having a quench circuit for said SPAD, and a third level having a circuit for processing data generated by said SPAD. A method for making the device includes: a) forming of the first level; b) bonding, on the first level, by molecular bonding, of a stack of layers including a semiconductor layer; and c) forming the quench circuit of the second level in the semiconductor layer.
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公开(公告)号:US20220344385A1
公开(公告)日:2022-10-27
申请号:US17724739
申请日:2022-04-20
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Francois GUYADER
IPC: H01L27/146
Abstract: A semiconductor substrate includes a matrix of photosites. Each photosite is delimited by an isolation trench including polycrystalline silicon. A peripheral zone extends directly around the matrix of photosites. The peripheral zone includes dummy photosites delimited by isolation trenches including polycrystalline silicon. A density of polycrystalline silicon in the peripheral zone is between a density of polycrystalline silicon at an edge of the matrix of photosites and a density of polycrystalline silicon around the peripheral zone.
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公开(公告)号:US20220115419A1
公开(公告)日:2022-04-14
申请号:US17498286
申请日:2021-10-11
Inventor: Francois GUYADER , Sara PELLEGRINI , Bruce RAE
IPC: H01L27/146 , H01L31/107 , H04N5/369 , G01J1/44
Abstract: An electronic device includes a stack of a first level having a SPAD, a second level having a quench circuit for said SPAD, and a third level having a circuit for processing data generated by said SPAD. A method for making the device includes: a) forming of the first level; b) bonding, on the first level, by molecular bonding, of a stack of layers including a semiconductor layer; and c) forming the quench circuit of the second level in the semiconductor layer.
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公开(公告)号:US20210288102A1
公开(公告)日:2021-09-16
申请号:US17327364
申请日:2021-05-21
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Frederic LALANNE , Laurent GAY , Pascal FONTENEAU , Yann HENRION , Francois GUYADER
IPC: H01L27/146
Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.
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公开(公告)号:US20200227451A1
公开(公告)日:2020-07-16
申请号:US16740050
申请日:2020-01-10
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Laurent GAY , Frederic LALANNE , Yann HENRION , Francois GUYADER , Pascal FONTENEAU , Aurelien SEIGNARD
IPC: H01L27/146
Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.
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