Micro movable device and method of making the same using wet etching
    21.
    发明授权
    Micro movable device and method of making the same using wet etching 有权
    微动移动装置及其制造方法

    公开(公告)号:US07851976B2

    公开(公告)日:2010-12-14

    申请号:US12436178

    申请日:2009-05-06

    Abstract: A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.

    Abstract translation: 微型移动装置包括:基底基板,固定在基底基板上的固定部分,具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器 在与基底基板相对的一侧上。 压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构,第一电极膜和第二电极膜之间的第二电极膜和压电膜。 可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。

    MICRO MOVABLE DEVICE AND METHOD OF MAKING THE SAME USING WET ETCHING
    22.
    发明申请
    MICRO MOVABLE DEVICE AND METHOD OF MAKING THE SAME USING WET ETCHING 有权
    微移动装置及其使用湿蚀刻制造相同装置的方法

    公开(公告)号:US20090212664A1

    公开(公告)日:2009-08-27

    申请号:US12436178

    申请日:2009-05-06

    Abstract: A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.

    Abstract translation: 微型移动装置包括:基底基板,固定在基底基板上的固定部分,具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器 在与基底基板相对的一侧上。 压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构,第一电极膜和第二电极膜之间的第二电极膜和压电膜。 可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。

    Microswitching element
    23.
    发明授权
    Microswitching element 有权
    微动开关元件

    公开(公告)号:US07535326B2

    公开(公告)日:2009-05-19

    申请号:US11245007

    申请日:2005-10-07

    CPC classification number: H01H57/00 H01H59/0009 H01H2057/006

    Abstract: A microswitching element includes a base substrate, a fixing portion attached to the base substrate, and a movable portion including a fixed end fixed to the fixing portion. The movable portion is surrounded by the fixing portion via a slit having a pair of closed ends. The movable portion includes a first surface and a second surface. The first surface faces the base substrate, and the second surface is opposite to the first surface. The microswitching element also includes a movable contact portion provided on the second surface of the movable portion, and a pair of fixed contact electrodes each including a contact surface facing the movable contact portion. The fixed contact electrodes are attached to the fixing portion.

    Abstract translation: 微型开关元件包括基底基板,附接到基底基板的固定部分以及固定在固定部分上的固定端部的可动部分。 可移动部分通过具有一对封闭端的狭缝被固定部分包围。 可移动部分包括第一表面和第二表面。 第一表面面向基底,第二表面与第一表面相对。 微动开关元件还包括设置在可动部分的第二表面上的可动接触部分和一对固定接触电极,每个固定接触电极包括面向可动接触部分的接触表面。 固定接触电极附接到固定部分。

    Switch
    24.
    发明授权
    Switch 失效
    开关

    公开(公告)号:US07405639B2

    公开(公告)日:2008-07-29

    申请号:US11544017

    申请日:2006-10-06

    CPC classification number: H01H9/40 H01H1/0036 H01H9/42 H01H2001/0078

    Abstract: A switch includes a first member, one end of which being secured to a substrate, multiple first beam portions respectively having multiple first contact portions, one ends of the multiple beam portions being secured to the first member, multiple contact switch portions connected in parallel, the multiple first contact portions and multiple second contact portions being in a contact state or in a non-contact state in the multiple contact switch portions, and resistors arranged respectively between the multiple contact switch portions and a common connection point to which the multiple contact switch portions are coupled. When at least one of the multiple switch portions is in a contact state, one of the resistors corresponding to the at least one of the multiple switch portions in a contact state has a resistance value greater than another one of the resistors corresponding to at least one of the multiple contact switch portions that is in a non-contact state.

    Abstract translation: 开关包括第一构件,其一端固定到基板,分别具有多个第一接触部分的多个第一梁部分,多个梁部分的一端固定到第一构件,并联连接的多个接触开关部分, 所述多个第一接触部分和多个第二接触部分在所述多个接触开关部分中处于接触状态或非接触状态,以及分别布置在所述多个接触开关部分和所述多个接触开关之间的公共连接点 部分耦合。 当多个开关部分中的至少一个处于接触状态时,与接触状态的多个开关部分中的至少一个相对应的电阻器中的一个具有大于对应于至少一个的电阻器中的另一个的电阻值 处于非接触状态的多个接触开关部分。

    Micro-switching device
    25.
    发明申请
    Micro-switching device 失效
    微动开关装置

    公开(公告)号:US20080142348A1

    公开(公告)日:2008-06-19

    申请号:US11987884

    申请日:2007-12-05

    CPC classification number: H01H47/325 H01H59/0009

    Abstract: A micro-switching device includes a movable electrode provided on a movable support having an end fixed to a fixing member. The switching device also includes first and second stationary electrodes. The movable electrode includes first and second contact portions. The first stationary electrode includes a third contact portion facing the first contact portion of the movable electrode. The second stationary electrode includes a fourth contact portion facing the second contact portion of the movable electrode. The distance between the first and the third contact portions is smaller than the distance between the second and the fourth contact portions. The switching device further includes a driving mechanism having a driving force generation region provided on the movable support. The center of gravity of the driving force generation region is closer to the second contact portion than to the first contact portion.

    Abstract translation: 微型开关装置包括可动电极,其设置在具有固定到固定构件的端部的可动支架上。 开关装置还包括第一和第二固定电极。 可动电极包括第一和第二接触部分。 第一固定电极包括面对可动电极的第一接触部分的第三接触部分。 第二固定电极包括面对可动电极的第二接触部分的第四接触部分。 第一和第三接触部分之间的距离小于第二和第四接触部分之间的距离。 开关装置还包括具有设置在可动支架上的驱动力产生区域的驱动机构。 驱动力产生区域的重心比第一接触部分更靠近第二接触部分。

    Microswitching device and method of manufacturing the same
    26.
    发明申请
    Microswitching device and method of manufacturing the same 有权
    微动开关装置及其制造方法

    公开(公告)号:US20070176717A1

    公开(公告)日:2007-08-02

    申请号:US11699378

    申请日:2007-01-30

    CPC classification number: H01H59/0009

    Abstract: A microswitching device includes a base, a fixed portion joined to the base, a movable portion extending along the base and having a fixed end fixed to the fixed portion, a movable contact electrode film provided on a side of the movable portion opposite the base, a pair of fixed contact electrodes joined to the fixed portion and having a region opposing the movable contact electrode film, a movable driving electrode film provided on a side of the movable portion opposite the base, and a fixed driving electrode having a region opposing the movable driving electrode film. The movable driving electrode film is thinner than the movable contact electrode film. The fixed driving electrode is joined to the fixed portion joined to the base.

    Abstract translation: 一种微动开关装置,包括基座,与基座连接的固定部分,沿着基座延伸并具有固定在固定部分上的固定端的可动部分,设置在与基座相对的可动部分的一侧上的可动接点电极膜, 一对固定接触电极,其连接到固定部分并且具有与可动接触电极膜相对的区域;可动驱动电极膜,设置在与基座相对的可动部分的一侧;以及固定驱动电极,具有与可动接触电极膜相对的区域 驱动电极膜。 可动驱动电极膜比可动接触电极膜薄。 固定驱动电极接合到与基座接合的固定部分。

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