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公开(公告)号：US20080174390A1
公开(公告)日：2008-07-24
申请号：US12007630
申请日：2008-01-14
CPC分类号： H01H57/00 , H01H59/0009 , H01H61/04 , H01H2057/006 , H01H2061/006 , Y10T29/49105
摘要： A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In manufacturing the micro-switching device., the first electrode is formed on a substrate, and a sacrifice layer is formed on the substrate to cover the first electrode. Then, a first recess and a shallower second recess are formed in the sacrifice layer at a position corresponding to the first electrode. The second electrode is formed to have a portion opposing the first electrode via the sacrifice layer, and to fill the first recess. The third electrode is formed to have a portion opposing the first electrode via the sacrifice layer; and to fill the second recess. Thereafter the sacrifice layer is removed.
摘要翻译： 微型开关装置包括固定部分，可移动部分，具有第一和第二触点的第一电极，具有接触第一触点的第三触点的第二电极和与第二触点相对的第四触点的第三电极。 在微型开关元件的制造中，第一电极形成在基板上，牺牲层形成在基板上以覆盖第一电极。 然后，在与第一电极对应的位置处，在牺牲层中形成第一凹部和较浅的第二凹部。 第二电极形成为具有经由牺牲层与第一电极相对的部分，并填充第一凹槽。 第三电极通过牺牲层形成为具有与第一电极相对的部分; 并填补第二个休息。 然后除去牺牲层。
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公开(公告)号：US07755460B2
公开(公告)日：2010-07-13
申请号：US11987884
申请日：2007-12-05
IPC分类号： H01H51/22
CPC分类号： H01H47/325 , H01H59/0009
摘要： A micro-switching device includes a movable electrode provided on a movable support having an end fixed to a fixing member. The switching device also includes first and second stationary electrodes. The movable electrode includes first and second contact portions. The first stationary electrode includes a third contact portion facing the first contact portion of the movable electrode. The second stationary electrode includes a fourth contact portion facing the second contact portion of the movable electrode. The distance between the first and the third contact portions is smaller than the distance between the second and the fourth contact portions. The switching device further includes a driving mechanism having a driving force generation region provided on the movable support. The center of gravity of the driving force generation region is closer to the second contact portion than to the first contact portion.
摘要翻译： 微型开关装置包括可动电极，其设置在具有固定到固定构件的端部的可动支架上。 开关装置还包括第一和第二固定电极。 可动电极包括第一和第二接触部分。 第一固定电极包括面对可动电极的第一接触部分的第三接触部分。 第二固定电极包括面对可动电极的第二接触部分的第四接触部分。 第一和第三接触部分之间的距离小于第二和第四接触部分之间的距离。 开关装置还包括具有设置在可动支架上的驱动力产生区域的驱动机构。 驱动力产生区域的重心比第一接触部分更靠近第二接触部分。
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公开(公告)号：US07755459B2
公开(公告)日：2010-07-13
申请号：US12007630
申请日：2008-01-14
CPC分类号： H01H57/00 , H01H59/0009 , H01H61/04 , H01H2057/006 , H01H2061/006 , Y10T29/49105
摘要： A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In manufacturing the micro-switching device., the first electrode is formed on a substrate, and a sacrifice layer is formed on the substrate to cover the first electrode. Then, a first recess and a shallower second recess are formed in the sacrifice layer at a position corresponding to the first electrode. The second electrode is formed to have a portion opposing the first electrode via the sacrifice layer, and to fill the first recess. The third electrode is formed to have a portion opposing the first electrode via the sacrifice layer; and to fill the second recess. Thereafter the sacrifice layer is removed.
摘要翻译： 微型开关装置包括固定部分，可移动部分，具有第一和第二触点的第一电极，具有接触第一触点的第三触点的第二电极和与第二触点相对的第四触点的第三电极。 在微型开关元件的制造中，第一电极形成在基板上，牺牲层形成在基板上以覆盖第一电极。 然后，在与第一电极对应的位置处，在牺牲层中形成第一凹部和较浅的第二凹部。 第二电极形成为具有经由牺牲层与第一电极相对的部分，并填充第一凹部。 第三电极通过牺牲层形成为具有与第一电极相对的部分; 并填补第二个休息。 然后除去牺牲层。
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公开(公告)号：US20080210531A1
公开(公告)日：2008-09-04
申请号：US11987885
申请日：2007-12-05
CPC分类号： H01H59/0009 , H01H2059/0081 , Y10T29/49105
摘要： A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact electrode provided on the movable part and facing away from the substrate, a pair of stationary contact electrodes bonded to the fixing member and including a region facing the movable contact electrode, a movable driver electrode between the movable contact electrode and the stationary end on the movable part at a surface facing away from the substrate, and a stationary driver electrode bonded to the fixing member and including an elevated portion having a region facing the movable driver electrode. The elevated portion is provided with steps facing the movable driver electrode, where the steps are closer to the substrate as they are farther from the movable contact electrode.
摘要翻译： 微型开关装置包括基底基板，基板上的固定部件，具有固定在固定部件上并沿着基板延伸的端部的可动部件，设置在可动部件上并且背离基板的可动接触电极， 一对固定接触电极，其固定在所述固定部件上并且包括与所述可动接触电极相对的区域，所述可动接触电极与所述可动部分之间的位于所述可移动部分的背离所述基板的表面的可动驱动电极， 驱动电极结合到所述固定构件并且包括具有面向所述可移动驱动电极的区域的升高部分。 升高部分设置有面向可移动驱动电极的台阶，其中台阶比离开可动接触电极更靠近基板。
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公开(公告)号：US20070172988A1
公开(公告)日：2007-07-26
申请号：US11656390
申请日：2007-01-23
IPC分类号： H01L21/00
CPC分类号： B81C1/00944
摘要： A microstructure, suitable for avoiding sticking phenomena, includes a base, a first structural portion joined to the base, and a second structural portion opposed to the base and having a fixed end fixed to the first structural portion. Such a microstructure is made by a method including the step of processing a material substrate having a stacked structure made of a first layer, a second layer, and an intermediate layer between the first and second layers. By this method, the first layer is formed with the first structural portion, the second structural portion having the fixed end fixed to the first structural portion, and a support beam bridging the first and second structural portions. Thereafter, wet etching is performed to remove a region of the intermediate layer between the second layer and the second structural portion, followed by a drying step, and a cutting step with respect to the support beam.
摘要翻译： 适于避免粘附现象的微细结构包括基部，与基部接合的第一结构部分和与基部相对的第二结构部分，并且具有固定到第一结构部分的固定端部。 这种微观结构通过包括在第一和第二层之间处理具有由第一层，第二层和中间层制成的层叠结构的材料基板的步骤的方法制成。 通过该方法，第一层形成有第一结构部分，第二结构部分具有固定到第一结构部分的固定端，以及支撑梁桥接第一和第二结构部分。 此后，进行湿式蚀刻以去除第二层和第二结构部分之间的中间层的区域，随后进行干燥步骤和相对于支撑梁的切割步骤。
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公开(公告)号：US07965159B2
公开(公告)日：2011-06-21
申请号：US11987885
申请日：2007-12-05
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2059/0081 , Y10T29/49105
摘要： A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact electrode provided on the movable part and facing away from the substrate, a pair of stationary contact electrodes bonded to the fixing member and including a region facing the movable contact electrode, a movable driver electrode between the movable contact electrode and the stationary end on the movable part at a surface facing away from the substrate, and a stationary driver electrode bonded to the fixing member and including an elevated portion having a region facing the movable driver electrode. The elevated portion is provided with steps facing the movable driver electrode, where the steps are closer to the substrate as they are farther from the movable contact electrode.
摘要翻译： 微型开关装置包括基底基板，基板上的固定部件，具有固定在固定部件上并沿着基板延伸的端部的可动部件，设置在可动部件上并且背离基板的可动接触电极， 一对固定接触电极，其固定在所述固定部件上并且包括与所述可动接触电极相对的区域，所述可动接触电极与所述可动部分之间的位于所述可移动部分的背离所述基板的表面的可动驱动电极， 驱动电极结合到所述固定构件并且包括具有面向所述可移动驱动电极的区域的升高部分。 升高部分设置有面向可移动驱动电极的台阶，其中台阶比离开可动接触电极更靠近基板。
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公开(公告)号：US07405639B2
公开(公告)日：2008-07-29
申请号：US11544017
申请日：2006-10-06
IPC分类号： H01P1/10
CPC分类号： H01H9/40 , H01H1/0036 , H01H9/42 , H01H2001/0078
摘要： A switch includes a first member, one end of which being secured to a substrate, multiple first beam portions respectively having multiple first contact portions, one ends of the multiple beam portions being secured to the first member, multiple contact switch portions connected in parallel, the multiple first contact portions and multiple second contact portions being in a contact state or in a non-contact state in the multiple contact switch portions, and resistors arranged respectively between the multiple contact switch portions and a common connection point to which the multiple contact switch portions are coupled. When at least one of the multiple switch portions is in a contact state, one of the resistors corresponding to the at least one of the multiple switch portions in a contact state has a resistance value greater than another one of the resistors corresponding to at least one of the multiple contact switch portions that is in a non-contact state.
摘要翻译： 开关包括第一构件，其一端固定到基板，分别具有多个第一接触部分的多个第一梁部分，多个梁部分的一端固定到第一构件，并联连接的多个接触开关部分， 所述多个第一接触部分和多个第二接触部分在所述多个接触开关部分中处于接触状态或非接触状态，以及分别布置在所述多个接触开关部分和所述多个接触开关之间的公共连接点 部分耦合。 当多个开关部分中的至少一个处于接触状态时，与接触状态的多个开关部分中的至少一个相对应的电阻器中的一个具有大于对应于至少一个的电阻器中的另一个的电阻值 处于非接触状态的多个接触开关部分。
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公开(公告)号：US20080142348A1
公开(公告)日：2008-06-19
申请号：US11987884
申请日：2007-12-05
IPC分类号： H01H1/06
CPC分类号： H01H47/325 , H01H59/0009
摘要： A micro-switching device includes a movable electrode provided on a movable support having an end fixed to a fixing member. The switching device also includes first and second stationary electrodes. The movable electrode includes first and second contact portions. The first stationary electrode includes a third contact portion facing the first contact portion of the movable electrode. The second stationary electrode includes a fourth contact portion facing the second contact portion of the movable electrode. The distance between the first and the third contact portions is smaller than the distance between the second and the fourth contact portions. The switching device further includes a driving mechanism having a driving force generation region provided on the movable support. The center of gravity of the driving force generation region is closer to the second contact portion than to the first contact portion.
摘要翻译： 微型开关装置包括可动电极，其设置在具有固定到固定构件的端部的可动支架上。 开关装置还包括第一和第二固定电极。 可动电极包括第一和第二接触部分。 第一固定电极包括面对可动电极的第一接触部分的第三接触部分。 第二固定电极包括面对可动电极的第二接触部分的第四接触部分。 第一和第三接触部分之间的距离小于第二和第四接触部分之间的距离。 开关装置还包括具有设置在可动支架上的驱动力产生区域的驱动机构。 驱动力产生区域的重心比第一接触部分更靠近第二接触部分。
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公开(公告)号：US07786830B2
公开(公告)日：2010-08-31
申请号：US11878210
申请日：2007-07-23
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/06 , H01P1/127
摘要： A switch includes a movable portion, a first electrode and a second electrode. The movable portion is provided on a substrate and moves with respect to the substrate. The first electrode is provided on the movable portion. The second electrode is able to contact with the first electrode and is fixed to the substrate. f×Ro×C≦1.6×10−4 when an operation frequency is represented as “f” (Hz), a transmission impedance is represented as “Ro” (Ω), and a capacitance in “OFF” state between the first electrode and the second electrode is represented as “C” (F).
摘要翻译： 开关包括可动部分，第一电极和第二电极。 可移动部分设置在基板上并相对于基板移动。 第一电极设置在可动部上。 第二电极能够与第一电极接触并固定到基板。 f×Ro×C＆nlE; 1.6×10-4，当操作频率表示为“f”（Hz）时，传输阻抗表示为“Ro”（＆OHgr），第一 电极和第二电极表示为“C”（F）。
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公开(公告)号：US20080173524A1
公开(公告)日：2008-07-24
申请号：US11878210
申请日：2007-07-23
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H1/06 , H01P1/127
摘要： A switch includes a movable portion, a first electrode and a second electrode. The movable portion is provided on a substrate and moves with respect to the substrate. The first electrode is provided on the movable portion. The second electrode is able to contact with the first electrode and is fixed to the substrate. f×Ro×C≦1.6×10−4 when an operation frequency is represented as “f” (Hz), a transmission impedance is represented as “Ro” (Ω), and a capacitance in “OFF” state between the first electrode and the second electrode is represented as “C” (F).
摘要翻译： 开关包括可动部分，第一电极和第二电极。 可移动部分设置在基板上并相对于基板移动。 第一电极设置在可动部上。 第二电极能够与第一电极接触并固定到基板。 当操作频率被表示为“f”（Hz）时，fxRoxC <= 1.6×10 -4 - ，传输阻抗被表示为“Ro”（Ω），并且在“OFF” 第一电极和第二电极被表示为“C”（F）。
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