公开(公告)号：US07080545B2

公开(公告)日：2006-07-25

申请号：US10273036

申请日：2002-10-17

Applicant: Frank Dimeo, Jr. ,  Philip S. H. Chen ,  Jeffrey W. Neuner ,  James Welch ,  Michele Stawasz ,  Thomas H. Baum ,  Mackenzie E. King ,  Ing-Shin Chen ,  Jeffrey F. Roeder

Inventor： Frank Dimeo, Jr. ,  Philip S. H. Chen ,  Jeffrey W. Neuner ,  James Welch ,  Michele Stawasz ,  Thomas H. Baum ,  Mackenzie E. King ,  Ing-Shin Chen ,  Jeffrey F. Roeder

IPC: G01N9/00

CPC classification number: G01N27/128 ,  H01J37/3244 ,  H01J37/32935 ,  H01J37/32981 ,  Y10T29/49007 ,  Y10T436/17 ,  Y10T436/19

Abstract: A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.

Abstract translation: 用于检测含有其的气体中的含氟物质的气体检测器和方法，例如用HF，NF 3等进行蚀刻清洁的半导体加工工具的流出物。优选的检测器 结构布置采用基于微机电系统（MEMS）的器件结构和/或独立的金属元件，其在需要高温感测时用作感测部件并且可选地作为热源。 独立的金属元件可以直接制造在标准芯片载体/器件封装上，使得封装成为检测器的平台。

公开(公告)号：US20050205424A1

公开(公告)日：2005-09-22

申请号：US11057734

申请日：2005-02-14

Applicant: Frank Dimeo ,  Philip Chen ,  Jeffrey Neuner ,  James Welch ,  Michele Stawasz ,  Thomas Baum ,  MacKenzie King ,  Ing-Shin Chen ,  Jeffrey Roeder

Inventor： Frank Dimeo ,  Philip Chen ,  Jeffrey Neuner ,  James Welch ,  Michele Stawasz ,  Thomas Baum ,  MacKenzie King ,  Ing-Shin Chen ,  Jeffrey Roeder

IPC: G01N33/00 ,  G01N27/26

CPC classification number: G01N27/128 ,  H01J37/3244 ,  H01J37/32935 ,  H01J37/32981 ,  Y10T29/49007 ,  Y10T436/17 ,  Y10T436/19

Abstract: A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.

公开(公告)号：US20050173407A1

公开(公告)日：2005-08-11

申请号：US10775473

申请日：2004-02-09

Applicant: Ing-Shin Chen ,  Jeffrey Neuner

Inventor： Ing-Shin Chen ,  Jeffrey Neuner

IPC: H05B1/02

CPC classification number: H05B1/0288

Abstract: The present invention relates to a system and method for controlling electrical heating of an element to maintain a constant electrical resistance, by adjusting electrical power supplied to such element according to an adaptive feedback control algorithm, in which all the parameters are (1) arbitrarily selected; (2) pre-determined by the physical properties of the controlled element; or (3) measured in real time. Unlike the conventional proportion-integral-derivative (PID) control mechanism, the system and method of the present invention do not require re-tuning of proportionality constants when used in connection with a different controlled element or under different operating conditions, and are therefore adaptive to changes in the controlled element and the operating conditions.

Abstract translation: 本发明涉及通过根据自适应反馈控制算法调整提供给这些元件的电力来控制元件的电加热以维持恒定电阻的系统和方法，其中所有参数是（1）任意选择的 ; （2）由受控元素的物理性质预先确定的; 或（3）实时测量。 与常规比例积分微分（PID）控制机制不同，本发明的系统和方法在与不同的受控元件结合使用时或在不同的操作条件下不需要重新调整比例常数，因此适应性 以控制元件和操作条件的变化。