Method and system for improving wet chemical bath process stability and productivity in semiconductor manufacturing
    21.
    发明授权
    Method and system for improving wet chemical bath process stability and productivity in semiconductor manufacturing 有权
    改善半导体制造中湿化学浴工艺稳定性和生产率的方法和系统

    公开(公告)号:US07910014B2

    公开(公告)日:2011-03-22

    申请号:US11963040

    申请日:2007-12-21

    IPC分类号: C03C15/00 C03C25/68

    CPC分类号: H01L21/67086 H01L21/67253

    摘要: A chemical processing bath and system used in semiconductor manufacturing utilizes a dynamic spiking model that essentially constantly monitors chemical concentration in the processing bath and adds fresh chemical on a regular basis to maintain chemical concentrations at desirable levels. Etch rates and etch selectivities are maintained at desirable levels and contamination from undesirable precipitation is avoided. The system and method automatically compare concentration levels to a plurality of control limits associated with various technologies and identify the technology or technologies that may undergo processing.

    摘要翻译: 用于半导体制造的化学处理浴和系统利用动态加标模型,其基本上不断监测处理槽中的化学浓度,并定期添加新鲜化学品,以将化学浓度维持在所需水平。 蚀刻速率和蚀刻选择性保持在所需的水平,避免了不期望的沉淀的污染。 系统和方法自动将浓度水平与与各种技术相关联的多个控制限制进行比较,并识别可能经历处理的技术或技术。

    Method and device for estimating integer carrier frequency offset
    22.
    发明授权
    Method and device for estimating integer carrier frequency offset 有权
    用于估计整数载波频率偏移的方法和装置

    公开(公告)号:US07894539B2

    公开(公告)日:2011-02-22

    申请号:US11808207

    申请日:2007-06-07

    IPC分类号: H04L7/04

    CPC分类号: H04L27/2675 H04L27/2659

    摘要: The method disclosed in the invention comprises setting a plurality of subcarrier position hypotheses for a received preamble according to a plurality of ideal subcarrier positions and the maximum amount of integer carrier frequency offset (ICFO), generating a plurality of preamble pattern hypotheses by retrieving the received preamble according to the subcarrier position hypotheses, calculating the correlation between the preamble pattern hypotheses and a plurality of specified preamble patterns, determining to which sector the received preamble belongs according to a correct preamble pattern, the specified preamble pattern having the highest correlation with the preamble pattern hypotheses, obtaining a correct subcarrier position according to the sector to which the received preamble belongs; and estimating the ICFO by calculating the offset between the correct subcarrier position and the subcarrier position hypothesis of the preamble pattern hypothesis having the highest correlation with the correct preamble pattern.

    摘要翻译: 本发明公开的方法包括根据多个理想子载波位置和最大量的整数载波频率偏移(ICFO)设置接收到的前同步码的多个子载波位置假设,通过检索所接收的前导码模式假设来生成多个前导码模式假设 根据子载波位置假设的前导码,计算前导码模式假设与多个指定的前导码模式之间的相关性,根据正确的前导码模式确定接收到的前导码属于哪个扇区,与前导码具有最高相关性的指定前导码模式 模式假设,根据所接收的前置码所属的扇区获得正确的副载波位置; 以及通过计算与正确前导码模式具有最高相关性的前导码模式假设的正确子载波位置与子载波位置假设之间的偏移来估计ICFO。

    Shielded insertion and connection structure of flat cable connector
    23.
    发明申请
    Shielded insertion and connection structure of flat cable connector 有权
    扁平电缆连接器的屏蔽插入和连接结构

    公开(公告)号:US20110014811A1

    公开(公告)日:2011-01-20

    申请号:US12588279

    申请日:2009-10-09

    IPC分类号: H01R12/24

    摘要: A shielded insertion and connection structure is provided for a flat cable connector, including a receiving housing and a hold-down member. The receiving housing forms a receiving compartment and two side walls formed at opposite ends of the receiving compartment. The hold-down member has opposite ends that respectively form pivot structures for pivotally coupling the hold-down member to the side walls and rotating between an open position and a holding position. The hold-down member is made of metal and the receiving housing is at least partly made of metal to form a conduction section, which is connected to a grounding terminal. When the hold-down member is at the open position and a circuit flat cable is inserted into the receiving compartment, the hold-down member is operated to depress down and hold the circuit flat cable and the hold-down member is put in electrical connection with the grounding terminal through the conduction section.

    摘要翻译: 为扁平电缆连接器提供屏蔽插入和连接结构,包括接收壳体和压紧构件。 接收壳体形成容纳室,并且形成在接收室的相对端的两个侧壁。 压紧构件具有分别形成用于将压紧构件枢转地联接到侧壁并且在打开位置和保持位置之间旋转的枢转结构的相对端部。 压紧构件由金属制成,并且接收壳体至少部分地由金属制成,以形成连接到接地端子的导电部分。 当压紧构件处于打开位置并且电路扁平电缆插入容纳室中时,压紧构件被操作以按压并保持电路扁平电缆,并且压紧构件被电连接 接地端子通过导电部分。

    ION GATE FOR DUAL ION MOBILITY SPECTROMETER AND METHOD THEREOF
    24.
    发明申请
    ION GATE FOR DUAL ION MOBILITY SPECTROMETER AND METHOD THEREOF 有权
    用于双离子移动光谱仪的离子通道及其方法

    公开(公告)号:US20100102219A1

    公开(公告)日:2010-04-29

    申请号:US12579719

    申请日:2009-10-15

    IPC分类号: H01J49/02 B01D59/44

    摘要: Disclosed is an ion gate for a dual IMS and method. The ion gate includes an ion source, a first gate electrode placed on one side of the ion source, a second gate electrode placed on the other side of the ion source, a third gate electrode placed on the side of the first gate electrode away from the ion source, a fourth gate electrode placed on the side of the second gate electrode away from the ion source, wherein during the ion storage, the potential at the position on the tube axis of the ion gate corresponding to the first gate electrode is different from the potentials at the positions on the tube axis corresponding to the ion source and the third gate electrode, and the potential at the position on the tube axis corresponding to the second gate electrode is different from the potentials at the positions on the tube axis corresponding to the ion source and the fourth gate electrode. According to the present invention, after sample gas enters the ion gates, charge exchange with reaction ions occurs between the first gate electrode and the second electrode, and positive and negative ions are continuously stored into the storage regions for the positive and negative ions. This leads to an improvement of utility rate of ions. Then, the ions are educed in a step-wise manner from the storage regions for the positive and negative ions by a simple control of a combination of the electrodes.

    摘要翻译: 公开了一种用于双重IMS和方法的离子门。 离子浇口包括离子源,位于离子源一侧的第一栅电极,位于离子源另一侧的第二栅电极,位于第一栅电极侧的第三栅电极, 离子源,第四栅极放置在远离离子源的第二栅电极侧,其中在离子存储期间,对应于第一栅电极的离子门的管轴上的位置的电位不同 从对应于离子源和第三栅电极的管轴上的位置的电位和对应于第二栅电极的管轴上的位置的电位与管轴对应的位置的电位不同 到离子源和第四栅电极。 根据本发明,在样品气体进入离子浇口之后,在第一栅电极和第二电极之间产生与反应离子的电荷交换,正离子和负离子被连续地存储在正离子和负离子的存储区中。 这导致了离子的利用率的提高。 然后,通过简单地控制电极的组合,从正离子和负离子的存储区域逐步地排出离子。

    IMAGE CAPTURING DEVICE CAPABLE OF GUIDING USER TO CAPTURE IMAGE COMPRISING HIMSELF AND GUIDING METHOD THEREOF
    25.
    发明申请
    IMAGE CAPTURING DEVICE CAPABLE OF GUIDING USER TO CAPTURE IMAGE COMPRISING HIMSELF AND GUIDING METHOD THEREOF 有权
    用于指导用户捕获包含HIMSELF的图像的图像捕获设备及其指导方法

    公开(公告)号:US20100026872A1

    公开(公告)日:2010-02-04

    申请号:US12331440

    申请日:2008-12-10

    申请人: JIN-LIN JIANG

    发明人: JIN-LIN JIANG

    IPC分类号: H04N5/225 H04N5/222

    CPC分类号: G03B17/38

    摘要: An image capturing device includes a memory, a communication unit, and a processor. The memory stores a guiding system configured for guiding a user to capture an image including himself. The processor is configured for activating the system to: perform a facial recognition function on a current checking image to determine a face portion in the checking image, determine if the face portion is fully within a predetermined region of the checking image, and control the communication unit to instruct the user to adjust position of the image capturing device according to the position of the face portion in relation to the predetermined region upon the condition that the face portion is not fully within the predetermined region.

    摘要翻译: 图像捕获装置包括存储器,通信单元和处理器。 存储器存储引导系统,其被配置为引导用户捕获包括其自身的图像。 所述处理器被配置为激活所述系统以在当前检查图像上执行面部识别功能以确定所述检查图像中的面部部分,确定所述面部部分是否完全在所述检查图像的预定区域内,并且控制所述通信 单元,用于指示用户在面部不完全在预定区域内的条件下根据面部相对于预定区域的位置来调整图像捕获装置的位置。

    DOOR-TYPE PASSENGER SECURITY INSPECTION APPARATUS AND METHOD FOR DETECTING CONTRABAND ARTICLES SUCH AS NARCOTIC DRUGS, EXPLOSIVES
    26.
    发明申请
    DOOR-TYPE PASSENGER SECURITY INSPECTION APPARATUS AND METHOD FOR DETECTING CONTRABAND ARTICLES SUCH AS NARCOTIC DRUGS, EXPLOSIVES 审中-公开
    门式乘客安全检查装置和检测诸如NARCOTIC DRUGS,EXPLOSIVES

    公开(公告)号:US20090320620A1

    公开(公告)日:2009-12-31

    申请号:US12483513

    申请日:2009-06-12

    IPC分类号: G01N1/14 G01N1/10

    摘要: The present invention discloses a door-type passenger security inspection apparatus comprising: an air source supplying an air flow; a spraying device for spraying the air flow onto the body and clothes of a passenger being inspected; an air-spray moving device for moving the spraying device; a collecting device for collecting suspicious particles of contraband articles separated from the body and the clothes of the passenger; and a detecting device for detecting the suspicious particles of contraband articles collected by the collecting device. Further, the present invention also provides a method for passenger security inspection on prohibited-articles. With the technical solution of the present inventions contraband articles such as narcotic drugs and explosives may be detected reliably and effectively. Thus, aiming at the requirements of anti terror, the present invention is able to ensure the security of persons and facilities at important occasions, such as airports, stations, national defenses public security, fire protection, anti-terror, customs, environmental protection, scientific research.

    摘要翻译: 本发明公开了一种门式乘客安全检查装置,包括:供给空气流的空气源; 用于将空气流喷射到被检查的乘客的身体和衣服上的喷洒装置; 用于移动喷洒装置的喷气移动装置; 收集装置,用于收集与身体分开的违禁物品和乘客衣服的可疑颗粒; 以及检测装置,用于检测由收集装置收集的违禁物品的可疑颗粒。 此外,本发明还提供了一种用于禁止物品的乘客安全检查的方法。 通过本发明的技术方案,可以可靠,有效地检测诸如麻醉药品和爆炸品等违禁品。 因此,针对反恐要求,本发明能够在机场,车站,国防,公安,消防,反恐,海关,环保等重大场合确保人员和设施的安全, 科学研究。

    Electrode structure for drift tube in ion mobility spectrometer
    27.
    发明申请
    Electrode structure for drift tube in ion mobility spectrometer 有权
    离子迁移谱仪中漂移管的电极结构

    公开(公告)号:US20090309013A1

    公开(公告)日:2009-12-17

    申请号:US12455029

    申请日:2009-05-27

    IPC分类号: H01J49/00

    CPC分类号: G01N27/622

    摘要: Disclosed is an electrode structure for a drift tube in IMS comprising a ring electrode, for each of two surfaces of the ring electrode, at least a part adjacent to the inner radius is formed into a cone, and the angles formed between the cones and the axis of the ring electrode are different from each other. The electrode structure of the present invention can alleviate, even eliminate, the accumulation of space charges in the drift tube. Such structure is particularly suitable when the electric field in the drift tube is low in strength or a great number of ions pass through. Meanwhile, the structure allows a significant decrease in the size of the outer radius of the electrode, while the inner radius remains constant. In this way, it is possible to effectively reduce the outline size of the drift tube and thus make the IMS compact.

    摘要翻译: 公开了一种用于IMS中的漂移管的电极结构,包括环形电极,对于环形电极的两个表面中的每一个,至少与内半径相邻的部分形成为锥体,并且在锥体和 环电极的轴线彼此不同。 本发明的电极结构可以减轻甚至消除漂移管中空间电荷的累积。 当漂移管中的电场强度低或大量离子通过时,这种结构特别合适。 同时,结构允许电极的外半径的大小显着减小,而内半径保持恒定。 以这种方式,可以有效地减小漂移管的轮廓尺寸,从而使得IMS紧凑。

    Detection Method for an Ion Migration Spectrum and an Ion Migration Spectrometer Using the Same Method
    28.
    发明申请
    Detection Method for an Ion Migration Spectrum and an Ion Migration Spectrometer Using the Same Method 审中-公开
    使用相同方法的离子迁移谱和离子迁移光谱仪的检测方法

    公开(公告)号:US20090278039A1

    公开(公告)日:2009-11-12

    申请号:US12437907

    申请日:2009-05-08

    IPC分类号: H01J49/06

    CPC分类号: G01N27/622

    摘要: This invention discloses a detection method for an ion migration spectrum which comprises: acquiring an ion migration spectrum of pure carrier gas and an ion migration spectrum of carrier gas containing a test substance sample; and performing differential process on the ion migration spectrum of said pure carrier gas and the ion migration spectrum of the carrier gas containing the test substance sample to acquire a differential spectrum, wherein the value of a characteristic peak of said differential spectrum represents properties of said sample of substances, said method avoids interferences on the migration spectrum from interference sources of the apparatus itself, thereby improving detection sensitivity and accuracy of the ion migration spectrum; and migration spectrum shift caused by variations in the environmental conditions can be found and corrected through the differential process on the migration spectrum of the pure carrier gas, thereby achieving self-stableness and self-correction of the ion migration spectrometer. This invention further discloses an ion migration spectrum detector and an ion migration spectrometer using said method.

    摘要翻译: 本发明公开了一种离子迁移谱的检测方法,包括:获取纯载体的离子迁移谱和含有检测物质样品的载气的离子迁移谱; 对所述纯载体的离子迁移谱和含有检测物质样品的载气的离子迁移谱进行微分处理,得到差示光谱,其特征在于,所述差示光谱的特征峰值表示所述样品的特性 所述方法避免了对装置本身的干扰源的迁移谱的干扰,从而提高了离子迁移谱的检测灵敏度和精度; 并且通过对纯载体的迁移谱的差分过程可以发现和校正由环境条件的变化引起的迁移频谱偏移,从而实现离子迁移光谱仪的自稳定和自校正。 本发明还公开了使用所述方法的离子迁移光谱检测器和离子迁移光谱仪。

    CONTROL WAFER RECLAMATION PROCESS
    29.
    发明申请
    CONTROL WAFER RECLAMATION PROCESS 审中-公开
    控制波形恢复过程

    公开(公告)号:US20090233447A1

    公开(公告)日:2009-09-17

    申请号:US12046096

    申请日:2008-03-11

    IPC分类号: H01L21/461

    摘要: A method of recycling a control wafer having a dielectric layer deposited thereon involves removing most of the dielectric layer by plasma etching leaving a residual film of the dielectric and then removing the residual dielectric film by a wet etching process. The combination of the dry and wet etching provides effective removal of the dielectric material without damaging the wafer substrate and any residual wet etching byproduct particulate remaining on the wafer substrate is then removed by APM cleaning and scrubbing.

    摘要翻译: 回收具有沉积在其上的电介质层的控制晶片的方法包括通过等离子体蚀刻去除大部分介电层,留下电介质的残留膜,然后通过湿蚀刻工艺去除残留的电介质膜。 干蚀刻和湿蚀刻的组合提供有效去除电介质材料而不损坏晶片衬底,然后通过APM清洁和擦洗除去留在晶片衬底上的任何残留的湿蚀刻副产物颗粒。

    MULTICHANNEL ANALYZER AND METHOD FOR REAL-TIME CORRECTION OF PEAK SHIFT
    30.
    发明申请
    MULTICHANNEL ANALYZER AND METHOD FOR REAL-TIME CORRECTION OF PEAK SHIFT 有权
    多通道分析仪和实时校正峰值移位的方法

    公开(公告)号:US20090166539A1

    公开(公告)日:2009-07-02

    申请号:US12342592

    申请日:2008-12-23

    IPC分类号: G01T1/20 G01D18/00

    CPC分类号: G01T1/362 G01T1/40

    摘要: The invention provides a multichannel analyzer for use in a multichannel spectrometer, which comprises a standard spectrum calibrator for obtaining energy calibration parameters of said multichannel spectrometer; an environment background spectrum calibrator for obtaining parameters of a current and a previous environment background spectrum; a peak shift detector for analyzing the parameters of the current and previous environment background spectrum to determine whether a peak shift occurs between them and to determine a correction coefficient of the peak shift; and a parameter corrector for correcting the energy calibration parameters of said multichannel spectrometer using said peak shift correction coefficient. The invention also provides a method for correcting a peak shift of a multichannel spectrometer adapted in the multichannel analyzer. The method for correcting and the multichannel analyzer can correct and monitor the peak shift of the multichannel spectrometer in real time.

    摘要翻译: 本发明提供一种用于多通道光谱仪的多通道分析仪,其包括用于获得所述多通道光谱仪的能量校准参数的标准光谱校准器; 环境背景光谱校准器,用于获得当前和先前环境背景光谱的参数; 峰值移位检测器,用于分析当前和以前的环境背景谱的参数,以确定它们之间是否发生峰值偏移,并确定峰值偏移的校正系数; 以及参数校正器,用于使用所述峰值偏移校正系数校正所述多通道光谱仪的能量校准参数。 本发明还提供了一种校正适用于多通道分析仪的多通道光谱仪的峰值偏移的方法。 校正方法和多通道分析仪可以实时校正和监测多通道光谱仪的峰值偏移。