公开(公告)号：US20060214130A1

公开(公告)日：2006-09-28

申请号：US10553623

申请日：2004-12-07

申请人： Tsuyoshi Tanikawa ,  Shigeru Itoi ,  Tadayuki Yakushijin

发明人： Tsuyoshi Tanikawa ,  Shigeru Itoi ,  Tadayuki Yakushijin

IPC分类号： F16K1/00 ,  F16K15/00

CPC分类号： F16K7/14

摘要： A fluid controller, wherein the recessed port (25) of a body (22) is formed of larger diameter part (25a) near an opening and a small diameter part (25c) continued to the lower part of the large diameter part (25a) through a step part (25b). A flow passage forming disk (26) is fitted to the recessed portion (25). The fluid passage forming disk (26) comprises a large diameter cylindrical part (31) fitted to the large diameter part (25a) in the recessed portion, a connection part (32) supported by the step part (25b) in the recessed portion, and a small diameter cylindrical part (33) having an outer diameter smaller than the inner diameter of the small diameter part (25c) in the recessed portion and having a lower end supported by the bottom surface of the recessed portion (25). A plurality of through-holes (34) communicating an annular space (S1) on the outside of the small diameter cylindrical part with an annular space (S2) on the inside of the large diameter cylindrical part are formed at the connection part (32) of the flow passage forming disk. The fluid inflow passage (23) is led into the lower end of the small diameter cylindrical part (33) of the flow passage forming disk (26), and a fluid outflow passage (24) is led into the annular space (S1) on the outside of the small diameter cylindrical part.

摘要翻译： 一种流体控制器，其中主体（22）的凹入端口（25）由开口附近的较大直径部分（25a）和连续到大直径部分的下部的小直径部分（25c）形成（ 25a）通过台阶部分（25b）。 流路形成盘（26）装配到凹部（25）。 流体通道形成盘（26）包括在凹部中装配到大直径部分（25a）上的大直径圆柱形部分（31），由凹陷部分中的台阶部分（25b）支撑的连接部分（32） 以及具有小于所述凹部的小径部（25c）的内径的外径的小直径圆筒部（33），并且具有由所述凹部（25）的底面支撑的下端， 。 在小直径圆筒部的外侧的环状空间（S 1）与大径圆筒部的内侧的环状空间（S 2）连通的多个贯通孔（34）形成在连接部 32）。 流体流入通道（23）被引入流路形成盘（26）的小直径圆筒部（33）的下端，流体流出通道（24）被引入环形空间（S1） 在小直径圆柱形部分的外侧。

公开(公告)号：US20060027274A1

公开(公告)日：2006-02-09

申请号：US10910789

申请日：2004-08-04

申请人： Warner Funes ,  Gregory Ochs ,  Shigeru Itoi

发明人： Warner Funes ,  Gregory Ochs ,  Shigeru Itoi

IPC分类号： F17D1/00

CPC分类号： F17D1/04 ,  Y10T137/87885

摘要： Line interconnecting means interconnecting two lines adjacent to each other laterally thereof comprises a lateral projection 64b formed on a two-way connecting block coupling 64 of the first of the lines, a recessed portion 54c formed in a two-way connecting block coupling 64 of the second of the lines for the lateral projection 64b to fit in, a coupling branch channel 82 formed in the block coupling 64 provided with the lateral projection, a first valve body branch channel 90A formed in the body 54a of a shut-off valve 54 of the first line for always causing a main channel 89 in the valve body to communicate with the coupling body upper surface opening 82a of the coupling branch channel 82, and a second valve body branch channel 90B formed in the body 54a of a shut-off valve 54 of the second line for always causing a main channel 89 in the valve body to communicate with a lateral projection upper surface opening of the coupling branch channel 82.

摘要翻译： 将横向相邻的两条线相互连接的线路互连装置包括形成在第一条线路的双向连接块联接器64上的横向突起64b，形成在双向连接块联接器64中的凹部54c 用于横向突起64b的第二线的配合，形成在设置有横向突起的块联接器64中的联接支路82，形成在主体54a中的第一阀体分支通道90A 用于总是使阀体中的主通道89与联接分支通道82的联接体上表面开口82a连通的第一管路的阀54和形成在主体中的第二阀体分支通道90B 54a的第二线的截止阀54总是使得阀体中的主通道89总是与联接分支通道82的侧向突起上表面开口连通。

公开(公告)号：US06779774B2

公开(公告)日：2004-08-24

申请号：US10296150

申请日：2002-11-22

申请人： Shigeru Itoi

发明人： Shigeru Itoi

IPC分类号： F16K31143

CPC分类号： F16K31/1221 ,  F16K1/42 ,  F16K7/14 ,  F16K7/16

摘要： A metal diaphragm valve for use inter alia in semiconductor facilities. This metal diaphragm valve is so designed as to reduce the fluid resistance of the fluid path from the valve chamber to the outflow path of the body and allows a large quantity of fluid to flow in spite of its small size. The metal diaphragm valve of the present invention comprises a body 2 provided with an inflow path 6, a valve chamber 8 and an outflow path 7 and a metal diaphragm 3, driving means 4 and a ring-shaped groove 5, wherein the diameter D of the inflow path 6 is larger than the width W of the ring-shaped groove 5 and the effective cross-sectional area of the regions where the ring-shaped groove 5 and the effective cross-sectional area of the regions where the ring-shaped groove 5 and the outflow path 7 intersect one another is larger than the transverse cross-sectional area of the outflow path 7.

摘要翻译： 一种用于半导体设施的金属隔膜阀。 该金属隔膜阀的设计是为了减小流体路径从阀室流到主体的流出路径的流体阻力，并允许大量的流体流动，尽管其尺寸小。金属隔膜阀 本发明包括具有流入路径6，阀室8和流出路径7以及金属隔膜3，驱动装置4和环形槽5的主体2，其中流入路径6的直径D较大 比环状槽5的宽度W和环状槽5的区域的有效截面积和环状槽5和流出路径7的区域的有效截面积 彼此相交大于流出路径7的横截面积。

公开(公告)号：US06453707B2

公开(公告)日：2002-09-24

申请号：US09750690

申请日：2001-01-02

申请人： Ryutaro Nishimura ,  Shigeru Itoi

发明人： Ryutaro Nishimura ,  Shigeru Itoi

IPC分类号： F16K3500

CPC分类号： F16K35/10 ,  Y10T70/5615 ,  Y10T70/5637 ,  Y10T70/5739 ,  Y10T137/7256

摘要： A locking device comprises a stopper support fixed to the body of a fluid controller, and a stopper nonrotatably mounted on the stopper support and engageable with a channel opening-closing handle for preventing the rotation of the handle. The stopper mounted on the support is movable upward and downward between a locking position wherein the stopper engages with the handle and an unlocking position wherein the stopper is out of engagement with the handle. The stopper support is formed with an opening for fitting the controller body therein and an aperture for fitting the stopper therein. The stopper has a vertical portion slidably fitted in the aperture and formed with a lock attaching bore.

摘要翻译： 锁定装置包括固定到流体控制器的主体上的止动器支撑件，以及不可旋转地安装在止动器支撑件上的止动件，并与通道开闭手柄接合以阻止手柄旋转。 安装在支撑件上的止动件可在其中止动器与手柄接合的锁定位置和止动器与手柄脱离啮合的解锁位置之间上下移动。 止动器支撑件形成有用于将控制器主体装配在其中的开口和用于将止动件装配在其中的孔。 止动器具有可滑动地装配在孔中的垂直部分并且形成有锁附接孔。

公开(公告)号：US6039360A

公开(公告)日：2000-03-21

申请号：US73387

申请日：1998-05-06

申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Tsutomu Shinohara ,  Shigeru Itoi ,  Keiji Hirao ,  Yuji Kawano ,  Shigeaki Tanaka ,  Kosuke Yokoyama ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Tsutomu Shinohara ,  Shigeru Itoi ,  Keiji Hirao ,  Yuji Kawano ,  Shigeaki Tanaka ,  Kosuke Yokoyama ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

IPC分类号： F16L15/00 ,  F16K27/00 ,  F16L39/00 ,  F16L41/02 ,  F17D1/02 ,  F16L3/26

CPC分类号： F16K27/003 ,  F16L39/00

摘要： A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection communicating with the inner channel of the body and having an upper end inserted in a through bore in the upper wall of the holding member to communicate with a downward channel of the fluid controller, and a tubular lateral projection communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange, and the through bore of the upper wall of the holding member has an inward flange for supporting the flange.

摘要翻译： 联轴器包括具有U形横截面的保持构件和由保持构件保持的通道构件。 保持构件具有形成有用于将保持构件附接到流体控制器的螺钉孔的上壁。 通道构件包括具有内通道并配合在保持构件的上壁和其下壁之间的空间中的主体，与主体的内部通道连通的管状向上突出部，并且具有插入通孔 位于保持构件的上壁中，以与流体控制器的向下通道连通，以及与主体的内部通道连通并且横向延伸的管状横向突出部。 通道构件的上端具有向外的凸缘，并且保持构件的上壁的通孔具有用于支撑凸缘的向内凸缘。

公开(公告)号：US5771919A

公开(公告)日：1998-06-30

申请号：US682366

申请日：1996-07-17

申请人： Shigeru Itoi ,  Michio Yamaji ,  Tetsuya Kojima

发明人： Shigeru Itoi ,  Michio Yamaji ,  Tetsuya Kojima

IPC分类号： F16K27/00 ,  F16K25/00

CPC分类号： F16K27/003 ,  Y10T137/7668 ,  Y10T137/87885

摘要： A fluid controller 2 comprises a controller main body 6 formed with an inlet channel 42 and an outlet channel 43 each having a downwardly open end, an operating portion 7 provided on the main body 6 and integral therewith for opening and closing the outlet channel 43, and a connector 11 provided beneath the main body 6. The connector 11 has an inlet channel 41 for causing an inlet channel 40 of an inlet pipe joint member 1 to communicate with the inlet channel 42 of the main body 6, and a leftwardly open outlet channel 44 communicating with the outlet channel 43 of the main body 6. The controller main body 6 is fastened to the connector 11 with screws 17. The operating portion 7 can be removed from the connector 11 together with the main body 6.

摘要翻译： 流体控制器2包括：控制器主体6，其形成有入口通道42和各自具有向下开口端的出口通道43;操作部分7，其设置在主体6上并与之成一体，用于打开和关闭出口通道43; 以及设置在主体6下方的连接器11.连接器11具有入口通道41，用于使入口管接头构件1的入口通道40与主体6的入口通道42连通，并且向左开口 通道44与主体6的出口通道43连通。控制器主体6用螺钉17紧固到连接器11.操作部分7可以与主体6一起从连接器11移除。

公开(公告)号：US5188338A

公开(公告)日：1993-02-23

申请号：US821386

申请日：1991-12-23

申请人： Shigeru Itoi

发明人： Shigeru Itoi

IPC分类号： F16K7/16 ,  F16K31/50

CPC分类号： F16K31/506

摘要： In a diaphragm type control valve, a slide stem (14) having a coupling screw part (14a) is elevatably but non-rotatably inserted into a bonnet (11) having a coupling screw part (11c). A rotary stem (15) has concentrically a first coupling screw part (22) of thread pitch P1 inside, and a second coupling screw part (23) of thread pitch P2 larger than the thread pitch P1 outside is coaxially disposed above the slide stem (14), the first coupling screw part (22) being driven into the coupling screw part (14i c) of the slide stem (14), and the second coupling screw part (23) into the coupling screw part (11c) of the bonnet (11), so that the slide stem (14) is moved vertically by a small distance at each revolution of the rotary stem (15).