Device for locking channel opening-closing handle of fluid controller

    公开(公告)号:US06189350B1

    公开(公告)日:2001-02-20

    申请号:US09062750

    申请日:1998-04-20

    IPC分类号: F16K3500

    摘要: A locking device comprises a stopper support fixed to the body of a fluid controller, and a stopper nonrotatably mounted on the stopper support and engageable with a channel opening-closing handle for preventing the rotation of the handle. The stopper mounted on the support is movable upward and downward between a locking position wherein the stopper engages with the handle and an unlocking position wherein the stopper is out of engagement with the handle. The stopper support is formed with an opening for fitting the controller body therein and an aperture for fitting the stopper therein. The stopper has a vertical portion slidably fitted in the aperture and formed with a lock attaching bore.

    Device for locking channel opening-closing handle of fluid controller
    2.
    发明授权
    Device for locking channel opening-closing handle of fluid controller 有权
    用于锁定流体控制器通道开闭手柄的装置

    公开(公告)号:US06453707B2

    公开(公告)日:2002-09-24

    申请号:US09750690

    申请日:2001-01-02

    IPC分类号: F16K3500

    摘要: A locking device comprises a stopper support fixed to the body of a fluid controller, and a stopper nonrotatably mounted on the stopper support and engageable with a channel opening-closing handle for preventing the rotation of the handle. The stopper mounted on the support is movable upward and downward between a locking position wherein the stopper engages with the handle and an unlocking position wherein the stopper is out of engagement with the handle. The stopper support is formed with an opening for fitting the controller body therein and an aperture for fitting the stopper therein. The stopper has a vertical portion slidably fitted in the aperture and formed with a lock attaching bore.

    摘要翻译: 锁定装置包括固定到流体控制器的主体上的止动器支撑件,以及不可旋转地安装在止动器支撑件上的止动件,并与通道开闭手柄接合以阻止手柄旋转。 安装在支撑件上的止动件可在其中止动器与手柄接合的锁定位置和止动器与手柄脱离啮合的解锁位置之间上下移动。 止动器支撑件形成有用于将控制器主体装配在其中的开口和用于将止动件装配在其中的孔。 止动器具有可滑动地装配在孔中的垂直部分并且形成有锁附接孔。

    Structure for sealing an inner peripheral portion of a metallic diaphragm
    5.
    发明授权
    Structure for sealing an inner peripheral portion of a metallic diaphragm 失效
    用于密封金属隔膜的内周部分的结构

    公开(公告)号:US5624102A

    公开(公告)日:1997-04-29

    申请号:US540971

    申请日:1995-10-11

    CPC分类号: F16K41/12

    摘要: An inner peripheral portion of a metallic diaphragm (11) having a mounting hole (11a) at a central portion is held between a metallic welding fitting (8, 8') and a metallic holding member (6, 17), each respectively having an annular flat portion (8a, 6a, 17a) to contact an inner peripheral portion. The inner peripheral portion of the metallic diaphragm and the portions of the metallic welding fitting and the metallic holding member contacting the inner peripheral portion of the foregoing metallic diaphragm are welded at W', W" along entire peripheries thereof in order to secure these three components together as one body.

    摘要翻译: 在金属焊接配件(8,8')和金属保持构件(6,17)之间,在中心部分具有安装孔(11a)的金属隔膜(11)的内周部分分别具有 环形平坦部分(8a,6a,17a)与内周部分接触。 金属隔膜的内周部分和与上述金属隔膜的内周部分接触的金属焊接配件和金属保持件的部分沿其整个外周焊接在W',W“上,以便确保这三个 组件一起作为一体。

    Block valve with tank chamber
    6.
    发明授权
    Block valve with tank chamber 失效
    带阀舱的截止阀

    公开(公告)号:US5469885A

    公开(公告)日:1995-11-28

    申请号:US326852

    申请日:1994-10-21

    申请人: Ryutaro Nishimura

    发明人: Ryutaro Nishimura

    IPC分类号: F16K11/22 F16K27/00 F16K11/10

    摘要: A valve body is provided with a gas feed passage having an inlet and an outlet, a tank chamber, and a branch passage having a first portion connected between the gas feed passage and the tank chamber and an outlet extending from the tank chamber to a side of the valve body. A first valve is mounted on the valve body and selectively opens and closes the gas feed passage at a point downstream of the junction of the branch passage with the gas feed passage. A second valve is mounted on the valve body and selectively opens and closes the branch passage at a point between the tank chamber and the junction of the branch passage and the gas feed passage. A vacuum pump is provided to evacuate the tank chamber. When the first valve is open and the second valve is closed, gas may flow from an inlet pipe, through the gas feed passage and the first valve to a semiconductor process chamber. When the first valve is closed and the second valve is opened, residual gas in piping upstream of the inlet is evacuated through the branch passage and the second valve by the vacuum in the tank chamber. The first valve isolates the process chamber while the residual gas is being evacuated from the upstream piping.

    摘要翻译: 阀体设置有具有入口和出口的气体供给通道,罐室和分支通道,其具有连接在气体供给通道和罐室之间的第一部分和从罐室延伸到侧面的出口 的阀体。 第一阀安装在阀体上,并且在分支通道与气体供给通道的接合点下游的一个点处选择性地打开和关闭气体供给通道。 第二阀安装在阀体上,并且在罐室与分支通道与气体供给通道的接合部之间的点处选择性地打开和关闭分支通道。 提供真空泵以抽空罐室。 当第一阀打开并且第二阀关闭时,气体可以从入口管通过供气通道和第一阀流到半导体处理室。 当第一阀关闭并且第二阀打开时,入口上游管道中的残余气体通过分支通道和第二阀通过罐室中的真空抽真空。 第一个阀将处理室隔离,同时从上游管道排出残留气体。

    Fluid controller with pivoting valve stem operator
    8.
    发明授权
    Fluid controller with pivoting valve stem operator 有权
    具有旋转阀杆操作器的流体控制器

    公开(公告)号:US6105930A

    公开(公告)日:2000-08-22

    申请号:US325846

    申请日:1999-06-04

    CPC分类号: F16K31/56 F16K7/16

    摘要: A fluid controller comprises a pivotal member pivotally movable about the axis of a horizontal pin, a pair of rollable rollers rotatably supported by the lower end of the pivotal member and having an axis in parallel to the axis of the horizontal pin, a slope provided by the upper surface of a bonnet for allowing each roller to roll therealong in a plane orthogonal to the axis of the roller, and a stopper supported by the pivotal member so as to be movable between a position to engage with a valve stem and a position to be out of engagement therewith. The pivotal member is pivotally moved to roll the rollers along the slope and move the roller-supporting pivotal member upward or downward with the rolling movement, whereby the horizontal pin is raised or lowered.

    摘要翻译: 流体控制器包括可围绕水平销的轴线枢转运动的枢转构件,由可枢转构件的下端可旋转地支撑并且具有平行于水平销的轴线的轴线的一对可滚动辊,由 用于允许每个辊在与辊的轴线正交的平面上滚动的发动机罩的上表面,以及由所述枢转构件支撑的止动件,以在与阀杆接合的位置和 与其失去联系。 枢转构件被枢转地移动以沿着斜面滚动辊,并且随着滚动运动而使辊支撑枢转构件向上或向下移动,由此水平销升高或降低。

    Fluid controller
    9.
    发明授权
    Fluid controller 有权
    流体控制器

    公开(公告)号:US5913504A

    公开(公告)日:1999-06-22

    申请号:US143663

    申请日:1998-08-31

    摘要: A ring divided in two is fitted around a valve stem at a portion thereof projecting upward beyond a piston, with a C-ring fitted around the divided ring. The divided ring has an annular projection formed on its inner periphery and fitted in an annular groove which is formed in the valve stem at the portion thereof projecting upward beyond the position. The divided ring is formed in its outer periphery with an annular recess having fitted therein the inner peripheral portion of the C-ring.

    摘要翻译: 分为两个的环围绕阀杆围绕其突出到活塞的上方的一部分,其中C形环安装在分隔环周围。 分隔环具有形成在其内周上的环形突起,并且装配在环形槽中,该环形槽在其向上突出的位置处形成在阀杆中。 分隔环在其外周形成有环形凹部,其内嵌有C形环的内周部分。

    Phenolic resin forming material and method of manufacturing same
    10.
    发明授权
    Phenolic resin forming material and method of manufacturing same 失效
    酚醛树脂成型材料及其制造方法

    公开(公告)号:US5733942A

    公开(公告)日:1998-03-31

    申请号:US719774

    申请日:1996-09-25

    IPC分类号: C08G8/10 C08J11/24 C08H11/24

    摘要: This invention relates to a granular phenolic resin forming material. Grains are obtained by pulverizing a hardened phenol resin or epoxy resin, particularly a waste, having aromatic rings. The grains are heated to react with a phenolic substance, to solubilize at least surfaces thereof, whereby the grains are made formable again. The pulverized, hardened grains and the phenolic substance, preferably a phenol, are mixed in the ratio of 100/10 to 100/90. An acid catalyst may be used, as necessary, in a quantity not exceeding 9 parts. A preferred reaction temperature is 80.degree. to 180.degree. C. at atmosphere pressure. The forming material of this invention may be formed with hexamine compounded therewith.

    摘要翻译: 本发明涉及一种颗粒状酚醛树脂形成材料。 通过粉碎具有芳香环的硬化酚醛树脂或环氧树脂,特别是废物获得颗粒。 将颗粒加热以与酚类物质反应,至少溶解其表面,从而使颗粒再次成型。 粉碎,硬化的颗粒和酚物质,优选苯酚,以100/10至100/90的比例混合。 根据需要可以使用不超过9份的酸催化剂。 在大气压下,优选的反应温度为80-180℃。 本发明的成形材料可以与其混合的六胺形成。